Abstract: The invention relates to a MEMS printed circuit board module (1) for a sound transducer assembly (2) for generating and/or detecting surge waves in the audible wavelength spectrum with a printed circuit board (4) and a multi-layer piezoelectric structure (5), by means of which a membrane (6) provided for this purpose can be set into oscillation and/or oscillations of a membrane (6) can be detected. In accordance with the invention, the multi-layer piezoelectric structure (5) is directly connected to the printed circuit board (4). In addition, the invention relates to a sound transducer assembly (2) with such a MEMS printed circuit board module (1) along with a method for the manufacturing of the MEMS printed circuit board module (1) and the sound transducer assembly (2).

Abstract: A sound transducer assembly for generating and/or detecting sound waves in the audible wavelength spectrum includes a membrane, a cavity and a MEMS printed circuit board unit. A MEMS printed circuit board unit for a sound transducer assembly for generating and/or detecting sound waves in the audible wavelength spectrum includes a multi-layer piezoelectric structure embedded in a printed circuit board. The printed circuit board includes a membrane, which the multi-layer piezoelectric structure can oscillate or detect oscillations thereof.

Abstract: The present invention relates to a sound transducer assembly with a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength spectrum. The MEMS sound transducer includes a first cavity, and the sound transducer assembly includes an ASIC electrically connected to the MEMS sound transducer. The ASIC is embedded in a first substrate, and the first MEMS sound transducer is arranged on a second substrate. The first substrate and the second substrate are electrically connected to one another, and the first cavity is at least partially formed in one of the first substrate and the second substrate.

Abstract: A MEMS loudspeaker for generating sound waves in the audible wavelength spectrum includes a carrier substrate with a substrate cavity with two substrate openings formed on two opposite sides of the carrier substrate, and a diaphragm anchored in the substrate. An actuator structure is arranged in the region of one of the two substrate openings and configured to vibrate the diaphragm to generate sound waves. An intermediate cavity is formed in a space between the diaphragm and the actuator structure. A coupling element is disposed in the intermediate cavity and connects the actuator structure to the diaphragm and can vibrate with respect to the carrier substrate.

Abstract: The invention relates to a MEMS sound transducer, in particular a MEMS loudspeaker and/or a MEMS microphone, for generating and/or detecting sound waves in the audible wavelength spectrum, with a support element (9), a membrane (2) deflectable with respect to the support element (9) along a z-axis, at least one piezoelectric actuator (7) supported on the support element (9) for deflecting the membrane (2) and one electronic control unit (11) for driving the actuator (7). In accordance with the invention, the MEMS sound transducer features at least one position sensor (19), by means of which the control unit (11) can provide a sensor signal (37) that is dependent on the membrane deflection.

Abstract: A circuit board module for a sound transducer assembly for generating and/or detecting sound waves in the audible wavelength spectrum includes a circuit board, which features a recess with a first opening. At least a part of a MEMS sound transducer is arranged in the area of the first opening, such that the recess at least partially forms a cavity of the MEMS sound transducer. The recess features a second opening opposite to the first opening, such that the recess extends completely through the circuit board. A sound transducer assembly includes such a circuit board.

Abstract: A MEMS loudspeaker arrangement for generating sound waves in the audible wavelength spectrum includes a housing that defines a sound-conducting channel and a sound outlet arranged at the end of the sound-conducting channel. At least two MEMS loudspeakers are arranged in the interior of the housing so that they generate sound waves through the sound-conducting channel to the sound outlet. One of the MEMS loudspeakers is disposed downstream of the other in the direction of the sound outlet. A control unit is connected to control the MEMS loudspeakers so as to increase the maximum loudness of the MEMS loudspeaker arrangement. The first of the two MEMS loudspeakers is controlled to function as a sound generator for generating an initial wave, and the second MEMS loudspeaker is controlled to function as a sound amplifier for amplifying the initial wave.

Abstract: A loudspeaker array includes a MEMS loudspeaker with a diaphragm deflectable along a Z axis; a printed circuit board having a first cavity housing an ASIC electrically connected to the MEMS loudspeaker; and a sound-conducting channel disposed adjacent to the MEMS loudspeaker and having an acoustic outlet opening. The printed circuit board includes a second cavity having an opening, which is closed by the MEMS loudspeaker, so that the second cavity forms at least a part of a cavity of the MEMS loudspeaker. The sound-conducting channel extends at an angle to the Z axis of the MEMS loudspeaker. The acoustic outlet opening is arranged on a side face of the loudspeaker array.

Abstract: A loudspeaker arrangement for a plurality of MEMS loudspeakers for generating sound waves in the audible wavelength spectrum includes a housing, which has a sound conduction cavity and at least one sound outlet opening, and at least two MEMS loudspeakers, arranged in the interior of the housing opposite and spaced apart from each other by the sound conduction cavity. Each MEMS loudspeaker has a cavity in the region of their opposite faces. The loudspeaker arrangement includes a shielding wall for acoustically decoupling the two MEMS loudspeakers from each other. The shielding wall is arranged in the interior of the housing between the two MEMS loudspeakers such that the sound conduction cavity is subdivided into a first and a second a cavity region respectively associated with one of the two MEMS loudspeakers.

Abstract: A MEMS sound transducer for at least one of generating and detecting sound waves in air in an audible wavelength spectrum includes a carrier substrate, a cavity defined in the carrier substrate, the cavity defining at least one opening, and a multilayered piezoelectric membrane structure spanning over the opening of the cavity and having an edge area connected with the carrier substrate so that with respect to the carrier substrate the membrane structure is capable of vibrating to at least one of generate and/or and detect sound energy, wherein the membrane structure has in cross-section at least in some areas a first piezo layer spaced from a second piezo layer. An interlayer is arranged in an area between the first and second piezo layers, the interlayer being made of at least one of silicon oxide, silicon nitride and polysilicon, the interlayer being configured so that sound energy can be reflected in the direction of at least one interface of the membrane structure adjacent to the air.

Abstract: A MEMS loudspeaker for generating sound waves within an audible wavelength spectrum includes a circuit board, a membrane spaced from the circuit board and being deflectable along a z-axis, at least one piezoelectric actuator for deflecting the membrane, an electronic control unit embedded in the circuit board for controlling the at least one piezoelectric actuator, and at least one position sensor for providing to the control unit a sensor signal dependent on the deflection of the membrane, the control unit controlling the piezoelectric actuator based on the sensor signal.

Abstract: A MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength spectrum includes a membrane carrier, a membrane that is connected in its edge area to the membrane carrier, and may vibrate along a z-axis with respect to the membrane carrier, and a stopper mechanism, which limits the vibrations of the membrane in at least one direction. The stopper mechanism includes at least one reinforcing element, which is arranged on one side of the membrane, and an end stop opposite to the reinforcing element. In a neutral position of the membrane, the end stop is spaced at a distance from the membrane and against which the reinforcing element abuts at a maximum deflection. A sound transducer arrangement includes such a MEMS sound transducer.

Abstract: The invention relates to a MEMS loudspeaker (1) for generating sound waves in the audible wavelength spectrum, with a carrier substrate (2) that features a substrate cavity (6) with two substrate openings (7, 8), which are formed on two opposite sides of the carrier substrate (2), an actuator structure (3), in particular a piezoelectric actuator structure, which is arranged in the area of one of the two substrate openings (7, 8) and is connected to the carrier substrate (2) in its edge area, and a membrane (4) anchored in its edge area, which, by means of the actuator structure (3), can be set into vibration for generating sound waves. In accordance with the invention, in a cross-sectional view of the MEMS loudspeaker (1), the membrane (4) is spaced at a distance from the actuator structure (3), such that an intermediate cavity (13) is formed between these two.