Patents Assigned to V-Automation Inc.
  • Rolling process cover
    Patent number: 7044732
    Abstract: A cover for the opening of a process tube of a furnace used in semiconductor manufacturing is comprised of a substantially continuous sheet of metal so that it may be rolled opened and closed while being against the opening of the process tube by a guide frame. The roller on which the cover is rolled is driven by a bidirectional DC motor. The process tube cover can be operated by a computer or controller that operates the furnace.
    Type: Grant
    Filed: January 13, 2004
    Date of Patent: May 16, 2006
    Assignee: V-Automation Inc.
    Inventors: Pradyumna V. Patel, Jesse R. Brown