Patents Assigned to VACREE TECHNOLOGIES CO., LTD.
  • CRYOPUMP, CRYOPUMP CONTROL SYSTEM AND CRYOPUMP CONTROL METHOD
    Publication number: 20250059964
    Abstract: This application discloses a cryopump, including a pump housing, a radiation shield in the pump housing, a first-stage cold storage component in the pump housing, a second-stage cold storage component in the holding space of the radiation shield, a connector connecting the first-stage cold storage component and the radiation shield, and a cryopanel assembly in the holding space and connected to the second-stage cold storage component.
    Type: Application
    Filed: November 5, 2024
    Publication date: February 20, 2025
    Applicant: VACREE TECHNOLOGIES CO., LTD.
    Inventors: Jialiang DENG, Yang YANG, Yifeng WU, Xiang CHENG, Yusong HAN, Xinyu FENG, Jianyong WANG, Huan ZENG, Haifeng ZHANG, Xuehua ZHANG