Abstract: A device for storing and feeding chips to a deposition location in a coating system comprises a holder stack comprising a plurality of holders including first and last holders, a biasing element which applies a force to the last holder, and a pushing element which, when actuated, will push the first holder from a loading position to a deposition location adjacent to a deposition opening. There is also provided a method comprising loading a plurality of holders, each containing a chip, into a holding space, so that the holders are in the form of a holder stack, a force being applied by a biasing element to the last holder in the stack; and actuating a pushing element to push a first holder from the loading position to the deposition location. The method preferably further comprises passing a deposition material through the opening and then into contact with the chip.
Type:
Application
Filed:
April 26, 2005
Publication date:
January 5, 2006
Applicant:
Vacuum Logistics, Inc.
Inventors:
William Branagan, Frank DeWitt, Brian Feltz