Patents Assigned to Vacuum Products Corporation
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Publication number: 20230304883Abstract: A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.Type: ApplicationFiled: December 15, 2022Publication date: September 28, 2023Applicant: VACUUM PRODUCTS CORPORATIONInventor: Hisao HOJOH
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Patent number: 6869574Abstract: A charged particle generating method in which mode is changeable between an ion generation mode and an electron generation mode. In the ion generation mode, a raw material is supplied to a tip end of a charged particle generating electrode through a raw-material passage formed in the charged particle generating electrode. A first electric field, in which the charged particle generating electrode is positive and the charged particle extract electrode is negative, is generated to emit ions from the raw material at the charged particle generating electrode. In the electron generation mode, supplying the raw material from the raw-material supply section is stopped. A second electric field, in which the charged particle generating electrode is negative and the charged particle extract electrode is positive, is generated to emit electrons from the raw material at the charged particle generating electrode.Type: GrantFiled: March 7, 2002Date of Patent: March 22, 2005Assignee: Vacuum Products CorporationInventors: Hisao Hojoh, Masatoshi Ono, Morinobu Endo, Tetsuo Uchiyama
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Patent number: 6854708Abstract: A valve achieves a high-vacuum seal and opens and closes with no sliding or otherwise abrading contact between the sealing plate and the valve seat, while maintaining pressure of the plate against the valve seat in the event of a failure in the valve actuation mechanism. These results are attained by use of a composite valve plate that includes a sealing plate joined to a support block through a retractable resilient connector. During retraction, the sealing plate is drawing close to the block by a pneumatic actuator internal to the composite valve plate, the actuator arranged to oppose and overcome a mechanical resilient element also contained within the valve plate that urges the sealing plate outward from the support block to effect the seal when the actuator is not engaged.Type: GrantFiled: July 21, 2003Date of Patent: February 15, 2005Assignee: MDC Vacuum Products CorporationInventors: Jose L. Contin, Neli Ulea
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Publication number: 20040079915Abstract: A valve achieves a high-vacuum seal and opens and closes with no sliding or otherwise abrading contact between the sealing plate and the valve seat, while maintaining pressure of the plate against the valve seat in the event of a failure in the valve actuation mechanism. These results are attained by use of a composite valve plate that includes a sealing plate joined to a support block through a retractable resilient connector. During retraction, the sealing plate is drawing close to the block by a pneumatic actuator internal to the composite valve plate, the actuator arranged to oppose and overcome a mechanical resilient element also contained within the valve plate that urges the sealing plate outward from the support block to effect the seal when the actuator is not engaged.Type: ApplicationFiled: July 21, 2003Publication date: April 29, 2004Applicant: MDC Vacuum Products CorporationInventors: Jose L. Contin, Neli Ulea
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Publication number: 20020130039Abstract: A charged particle generating method in which mode is changeable between an ion generation mode and an electron generation mode. In the ion generation mode, a raw material is supplied to a tip end of a charged particle generating electrode through a raw-material passage formed in the charged particle generating electrode. A first electric field, in which the charged particle generating electrode is positive and the charged particle extract electrode is negative, is generated to emit ions from the raw material at the charged particle generating electrode. In the electron generation mode, supplying the raw material from the raw-material supply section is stopped. A second electric field, in which the charged particle generating electrode is negative and the charged particle extract electrode is positive, is generated to emit electrons from the raw material at the charged particle generating electrode.Type: ApplicationFiled: March 7, 2002Publication date: September 19, 2002Applicant: VACUUM PRODUCTS CORPORATIONInventors: Hisao Hojoh, Masatoshi Ono, Morinobu Endo, Tetsuo Uchiyama
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Patent number: 5473627Abstract: A rotating all metal sealed fluid delivery system for supplying fluid to an apparatus, such as an electron beam source assembly, in an UHV environment includes a housing with fluid inlet and outlet ports therethrough, opposed fluid inlet and outlet lines, an inlet and outlet bellows within the housing, and a turntable mounted in an aperture in the housing for attachment to a rotatable spindle of the apparatus. A ultra high vacuum compression gasket forms an UHV seal between the spindle and the turntable. The bellows are attached at first ends to the inlet and outlet ports, and at opposite ends to the opposed inlet and outlet lines extending to the rotatable apparatus, through the spindle and the turntable into the housing. The bellows are coiled within the housing and separated by a non-abrasive plate. Following attachment to the ports and lines, the entire length of each bellows remains within a single plane during rotation along the same axis as the axis of rotation of the apparatus.Type: GrantFiled: September 2, 1993Date of Patent: December 5, 1995Assignee: MDC Vacuum Products CorporationInventors: Nick Tsujimoto, Michael Weiss
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Patent number: 5116023Abstract: A low vibration, high cycle, high vacuum gate valve structure comprises a high vacuum housing defining a passageway, a valve actuator for providing a rectilinear displacement force, a translatable and pivotable gate valve assembly actuated by the valve actuator for translating from a fully retraction position outside of the passageway to an initial closure position adjacent to a fixed seal surface provided within the housing thereby blocking off the passageway. The gate valve assembly defines an angled sealing surface relative to an oppositely facing angled sealing surface of the fixed seal but displaced by a predetermined angular displacement at the initial closure position.Type: GrantFiled: May 14, 1991Date of Patent: May 26, 1992Assignee: MDC Vacuum Products CorporationInventor: Jose L. Contin
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Patent number: 4904141Abstract: A motion transmitting mechanism, for use as a sample manipulating device or wobble stick, is provided for transmitting manual movements through the wall of a vacuum vessel. The mechanism includes a central mounting flange for securing the mechanism in vacuum sealing arrangement with the vacuum vessel through a suitable orifice formed in the wall thereof. A spherical ball joint is moveably journalled within the mounting flange to enable the mechanism to be moved angularly relative to an axis perpendicular to the vacuum vessel wall throughout a predetermined range of limited angular displacement. A coaxial shaft assembly comprises an outer tube and a central shaft, the assembly being axially slideable through a central opening of the ball joint means to provide axial movements within the vacuum vessel throughout a predetermined range of limited axial displacement.Type: GrantFiled: October 28, 1987Date of Patent: February 27, 1990Assignee: MDC Vacuum Products CorporationInventor: Jose L. Contin
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Patent number: 4718637Abstract: A two part high vacuum gate valve construction includes a control mechanism part having a limited displacement stem passing through a first generally rectangular high vacuum flange and a valve body part including a generally rectangular case, a second generally rectangular high vacuum joint providing flange having a mirror image sealing geometry to the first high vacuum flange, two machined fluid flow flanges passing through openings defined through opposite sidewalls of said case and sealed thereto, at least one of the fluid flow flanges having an inside gate sealing surface machined prior to insertion through and sealing of the flange to the sidewall of the case; a two part, levered carriage having a central transverse pivot joint and having an endwall engagement mechanims for causing the pivot joint to pivot toward the inside gate sealing surface of the one flow flange in response to continued actuation force supplied by the control stem shaft after an inside endwall of said case has been contacted; a valvType: GrantFiled: April 20, 1987Date of Patent: January 12, 1988Assignee: MDC Vacuum Products CorporationInventor: Jose L. Contin
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Patent number: 4681329Abstract: A two part high vacuum gate valve construction includes a control mechanism part having a limited displacement stem passing through a first generally rectangular high vacuum flange and a valve body part including a generally rectangular case, a second generally rectangular high vacuum joint providing flange having a mirror image sealing geometry to the first high vacuum flange, two machined fluid flow flanges passing through openings defined through opposite sidewalls of said case and sealed thereto, at least one of the fluid flow flanges having an inside gate sealing surface machined prior to insertion through and sealing of the flange to the sidewall of the case; a two part, levered carriage having a central transverse pivot joint and having an endwall engagement mechanism for causing the pivot joint to pivot toward the inside gate sealing surface of the one flow flange in response to continued actuation force supplied by the control stem shaft after an inside endwall of said case has been contacted; a valvType: GrantFiled: July 2, 1986Date of Patent: July 21, 1987Assignee: MDC Vacuum Products CorporationInventor: Jose L. Contin