Abstract: A method and mass spectrometer system for trapping ions within an ion trap by increasing the flight path of ions therein. An ion beam is produced by external ion source and is directed to the ion trap which comprises at least one trapping electrode in proximity to an exit region of the ion beam from the ion trap. A retarding DC voltage is applied to the trapping electrode during ion accumulation time for creating a fringing reflection field and for retaining ions within the ion trap.

Abstract: A peristaltic pump comprises a rotatable drum 2 having rollers 5 or cams 5' for squashing a flexible tube 9 against a profiled surface 10 of a presser plate 7. Tube 9 is mounted between supports 14 and 15 on presser plate 7 and is automatically movable between an inoperative and operative (pumping) position by pivotal movement of plate 7 about axis 8 produced by an electro mechanical actuator. A flexible membrane 33 is sandwiched between rollers 5 or cams 5' for eliminating shear forces on the tube 9. The construction of the pump and shape of profile 10 are such as to mimimise pulsations in the output flow. Systems for supplying a sample for analysis to spectroscopic apparatus using the peristaltic pump are also described.

Abstract: The use of audio signals from rotating samples in an NMR probe in a polarizing magnetic field as part of a nuclear magnetic spectrometer is presented.

Abstract: A method of detecting ions of a single ion species that have been selectively stored in a quadrupole ion trap mass spectrometer is disclosed. After the selected ion species is isolated the trapping field in rapidly changed to cause ions to leave the ion trap in the axial direction where they are detected using a conventional detector. Preferably, a dipole pulse is applied to the ion trap simultaneously with the reduction of the trapping field, such that all of the ions are caused to leave the trap in a single direction, doubling the ion current over prior art methods. The method of the invention allows ejection of all of the ions in a time period which is nearly twenty times faster than the prior art resonance ejection scanning technique, and without the artifacts in the signal current caused by frequency beating.

Abstract: Sputtering apparatus and method which are particularly suitable for forming step coatings. A workpiece is supported in a chamber, particles are emitted from a sputter source in a substantially uniform manner throughout an area of greater lateral extent than the workpiece, the pressure within the chamber is maintained at a level which is sufficiently low to prevent substantial scattering of the particles between the source and the workpiece, and the particles are passed through a collimating filter having a plurality of transmissive cells with a length to diameter ratio on the order of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles at which the particles can impinge upon the workpiece.

Abstract: The interior surfaces of an ion trap or ionization chamber is coated with an inert, inorganic non-metallic insulator or semiconductor material for the passivation of such surfaces so as to minimize absorption, degradation or decomposition of a sample in contact with the surface.

Abstract: The present invention provides electrode assemblies for LIC imagers that maximize ion collection and the electric field for the minimum bias voltage. To achieve this optimization the ion collection is confined to small regions. Due to this limited ion collection region, high neutralization efficiencies and fast sweep-out times can be obtained. Furthermore, with an electrode separation of approximately 0.1 millimeters, pulse voltages of less than 100 volts can be used. Low voltages result in improved reliability, longer system life, and lower safety risks.

Abstract: A slit assembly for use in a charged particle beam system wherein a charged particle beam is directed along a beam path. The slit assembly may be a mass resolving slit assembly for an ion implanter. The slit assembly includes first and second cylinders spaced apart from each other. Opposing surfaces of the first and second cylinders adjacent to the beam path define a slit for passing the charged particle beam. The first and second cylinders have first and second central axes, respectively. The slit assembly further includes a drive system for rotating the first cylinder about the first central axis and for rotating the second cylinder about the second central axis. The slit assembly provides low contamination and a long operating life. The slit assembly may include a system for adjusting the width of the slit. The slit assembly may further include a cooling system for controlling the temperatures of the first and second cylinders.

Abstract: A method for making an improved metal silicide layer on a silicon substrate by plasma bombardment of the substrate with Ne ions to remove the native oxide without damage or significant implantation of Ne atoms into said silicon, depositing a metal layer over the Ne etched surface and then rapidly thermally causing the metal layer to react with the underlying silicon.

Abstract: Small, hermetically sealed pans are leak tested after subjecting the finished device to an environment of trace gas such as helium. During the testing process the pans may lose their helium charge by rapid escape due to massive gross leaks. These cases demand pre-helium mass spectrometer leak detector gross leak testing procedure. The non-helium expansion technique, used in conjunction with a helium mass spectrometer leak detector, provides a reliable and automatic gross and fine leak testing of the pans by a single apparatus. The test pan is placed in a sealed test fixture, and a valve between the test fixture and an expansion chamber is opened. The pressure in the expansion chamber is measured after the valve is opened. When the measured pressure is less than a reference pressure, a leaking test pan is indicated. When a sealed test pan is indicated, a helium mass spectrometer leak test is performed to determine the presence of fine leaks in the test part.

Abstract: A positive displacement fluid handling apparatus has a first, high volumetric displacement rate scroll pump of nested interacting pairs of fixed and movable spiral-shaped blades supported in a housing between an inlet and an outlet. Each adjacent blade pair is of sufficient angular extent, preferably only about 360.degree., to close an inter-blade pocket. In a preferred form for a vacuum pump, a second scroll pump mounted in the housing has its fluid inlet in direct fluid communication with the first scroll outlet. The second scroll has a single pair of co-acting fixed and movable blades with multiple revolutions with a relatively short axial height. The low back leakage of this second pump allows the first pump to omit tip seals on the free spiral edges of the blades. The volumetric displacement rate of the first pump exceeds that of the second pump. An orbiting plate carries the movable blades of both scroll pumps.

Abstract: A field emission device (100) uses single crystals in order to eliminate grain boundaries within some or all of the electrodes (103, 104, and 205). The elimination of grain boundaries reduces susceptibility to damage, improves stability of the device (100), and improves uniformity and reproducibility among devices. In a preferred embodiment, the emitter and gate electrodes (103 and 104 respectively) are formed from a single crystal thin film (302). In other embodiments, other structures are employed wherein one or more of the electrodes (103, 104, and 205) are formed from single crystals.

Abstract: A method of isolating selected ion species in a quadrupole ion trap mass spectrometer is disclosed. One or more ranges of masses to be eliminated from the ion trap are ejected by applying a supplemental dipole excitation waveform, sparsely populated with frequency components, while the trapping field is modulated. The spacing of the frequency components in the supplemental excitation waveform varies across the range of frequencies in the waveform. Preferably, the frequency range is divided into a plurality of subranges, and the spacing of the frequency components in each of the subranges is constant. A method of creating a master set of frequencies used for generating a supplemental excitation waveform is also shown. Likewise, a method of calculating edge frequencies defining a gap in the mass spectrum that is excited by the supplemental waveform is also shown.

Abstract: An apparatus for releasably clamping a substrate to a support platform, or other support means, at a face of the substrate is described. In one embodiment, a retractable clamp holds a substrate near its edges on a support platform when the clamp is in its fully extended position. One or more leaf springs are mounted to the clamp and apply force to the substrate at respective points in the event the substrate adheres to the clamp, thereby releasing the substrate from the clamp. In a preferred embodiment of the present invention, one or more activators are positioned in cooperative relationship to the leaf springs to cause the leaf springs to retract into recesses in the clamp when the clamp is extended against the substrate. In their retracted position, the leaf springs do not contact the substrate so as to minimize the generation of particle contamination and the chance of the release leaf springs themselves adhering to the substrate.

Abstract: A single potential ion source includes a single conical electrode encircled by a cylindrical magnet. At least one filament is placed proximate to the electrode. This arrangement serves to accelerate electrons created by energy from the filament toward a center axis of the conical electrode. The electrons collide with gas particles to create a focused ion stream. The stream may be directed into a magnetic field in a mass spectrometer tube.

Abstract: A solid-state detector for use in an atomic spectrometer comprises a plurality of arrays of sensing elements, or pixels, each of the arrays being positioned along and on the locations of spectral signals on a focal plane of an echelle grating spectrometer. The sensing elements are positioned along the many diffraction orders presented on a two-dimensional echelle grating focal plane so that at least one element is located at each and every resolution element regardless of global x-y coordinate positioning of the elements or with reference to each other. The result is a series of skewed lines of sensing elements, those lines being in the same shape as the series of diffraction order lines which comprise an echelle spectrum. The solid-state detector is particularly useful in an atomic spectrometer wherein an echelle grating is used to diffract incident radiation such that the various components of the radiation may be observed.

Abstract: A three terminal ionization chamber includes a first electrode coupled to a bias voltage source spaced apart from a second electrode coupled to ground. A third terminal is provided which is positioned between the first and second electrodes. Measurement circuitry may be coupled to the third terminal to measure charge indicative of the amount of radiation incident to the chamber.

Abstract: A magnetron sputtering source which is capable of very low pressure operation is disclosed. The source comprises a dish-shaped sputter target behind which is mounted a primary magnet for confining a plasma discharge adjacent to the front surface of the sputter target. A bucking magnet, positioned adjacent to the perimeter of the sputter target and, preferably, at the same level as the target, is used to prevent the magnetic field created by the primary magnet from spreading out at near the edge of the sputter target. This enables the source to operate at very low pressure and reduces the impedance of the discharge.

Abstract: An NMR receiver includes an analog to digital converter for sampling a nuclear magnetic resonance probe output signal at a frequency that is less than the probe signal center frequency and is at least twice the probe signal bandwidth.

Abstract: An X-ray tube of a rotating anode type for reducing acoustic noise and vibration by using an isolating structure which suppresses and prevents transmission of the vibrational energy from the rotating anode assembly to a vacuum envelope and a housing of the X-ray tube. The isolating structure comprises at least one flexible member which is connected between a support structure of the the anode assembly and a neck portion of the vacuum envelope forming a hermetical sealing therewith, and symmetrically disposed isolating members placed between the neck and head portions of the vacuum envelope and the housing, respectively. The flexible members of the isolating structure can be incorporated into the walls of the vacuum envelope.