Abstract: A Faraday sensor test system includes a Faraday sensor configured to intercept a quantity of ions incident on said Faraday sensor, a primary conductor and a test conductor coupled to said Faraday sensor, and a controller. The controller is configured to automatically provide a test current into the test conductor in response to a test condition. The controller is further configured to receive a return current from the primary conductor in response to the test current and to compare the return current to a value representative of the test current to determine a condition of a conductive path comprising the test conductor, the Faraday sensor, and the primary conductor.
Type:
Grant
Filed:
June 30, 2006
Date of Patent:
July 21, 2009
Assignee:
Varian Semiconductor E1quipment Associates, Inc.
Inventors:
Joseph P. Dzengeleski, Greg Gibilaro, Gregg Norris, David Olden, Tamer Onat