Patents Assigned to VARIAN SEMICONDUCTOR EQUIPEMENT ASSOCIATES, INC.
  • METHOD FOR SEALING PORES IN A POROUS SUBSTRATE
    Publication number: 20090324849
    Abstract: Several embodiments of a method for sealing pores on a porous substrate are disclosed. In one embodiment, the method comprises introducing first particles to the surface of the substrate and damaging the surface to decrease the size of the pores on the surface; introducing second particle to the surface; and forming a film on the surface covering the pores, where the film has a dielectric constant of 4 or less.
    Type: Application
    Filed: December 28, 2008
    Publication date: December 31, 2009
    Applicant: VARIAN SEMICONDUCTOR EQUIPEMENT ASSOCIATES, INC.
    Inventors: George D. PAPASOULIOTIS, Vikram Singh