Patents Assigned to Varion Semiconductor Equipment Associates, Inc.
  • Temperature controlled ion source
    Patent number: 8183542
    Abstract: An ion source is provided that utilizes a cooling plate and a gap interface to control the temperature of an ion source chamber. The gap interface is defined between the cooling plate and a wall of the chamber. A coolant gas is supplied to the interface at a given pressure where the pressure determines thermal conductivity from the cooling plate to the chamber to control the temperature of the interior of the chamber.
    Type: Grant
    Filed: April 5, 2010
    Date of Patent: May 22, 2012
    Assignee: Varion Semiconductor Equipment Associates, Inc.
    Inventors: Victor Benveniste, Bon-Woong Koo, Shardul Patel, Frank Sinclair