Abstract: A method of manufacturing diaphragms which are sensitive to fluoride ions, by depositing a poly-crystalline thin layer of difficulty soluble fluoride of 20 nm to 5,000 nm thick by means of sputtering or vaporization onto a substrate at temperatures of above 280.degree. C.
Type:
Grant
Filed:
August 7, 1985
Date of Patent:
October 13, 1987
Assignee:
Veb Waschgeratewerk Schwarzenberg
Inventors:
Martin Fait, Thomas Gunther, Peter Janietz, Werner Moritz, Lothar Muller, Hans Wellner