Patents Assigned to Veb Zentrum fur Forschung und Technologie Mikroelekronik
  • Position drive
    Patent number: 4448403
    Abstract: A position drive for a wafer in a system for testing of integrated circuit components of the wafer includes a first drive assembly for quick lifting of a wafer-supporting member towards testing probes, second drive assembly for positioning the wafer-supporting member in two stable positions in a vertical direction for compensating thickness allowances of the wafers to be tested and a third drive assembly for mechanical rotation of the wafer-supporting member through any required angle.
    Type: Grant
    Filed: December 7, 1981
    Date of Patent: May 15, 1984
    Assignee: Veb Zentrum fur Forschung und Technologie Mikroelekronik
    Inventors: Eberhard Riessland, Karl-Heinz Kruger