Patents Assigned to VEBCO INSTRUMENTS INC.
  • Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas
    Patent number: 10128083
    Abstract: The presently disclosed ion sources include one or more electromagnets for changing the distribution of plasma within a discharge space of an ion source. At least one of the electromagnets is oriented about an outer periphery of a tubular sidewall of the ion source and changes a distribution of the plasma in a peripheral region of the discharge space.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: November 13, 2018
    Assignee: VEBCO INSTRUMENTS INC.
    Inventors: Boris Druz, Rustam Yevtukhov, Robert Hieronymi, Alan V. Hayes, Mathew Levoso, Peter Porshnev