Patents Assigned to Veco International, Inc.
  • Patent number: 4371386
    Abstract: An improved filter holding device for an air filter that forms a chamber around the periphery of the air filter. A vacuum is created within the chamber to carry any unfiltered air to the upstream side of the filter and thus prevent any air from bypassing the filter and contaminating a clean room.
    Type: Grant
    Filed: May 18, 1981
    Date of Patent: February 1, 1983
    Assignee: Veco International, Inc.
    Inventor: Francisco DeVecchi