Abstract: An metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the second end of the reference structure and located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.

Abstract: Bat wings are removed at step discontinuities within the coherence length of the light source of a vertical-scanning interferometer. A first height profile is obtained from a correlogram using a coherence-sensing technique. A second height profile is obtained from phase measurements at the best-focus frame position of the scanner. The two profiles are compared, and phase ambiguities are removed in conventional manner. In addition, during unwrapping the differences in height between two adjacent pixels obtained both by coherence sensing and by phase measurements are compared to f&lgr;/4. Where the inter-pixel height difference calculated by coherence sensing is smaller and the inter-pixel height difference calculated by phase is larger than f&lgr;/4, the phase measurement is corrected by 2&pgr; increments until both coherence and phase inter-pixel height differences are within f&lgr;/4. This additional step removes bat-wing effects from profiles obtained by phase measurement.

Abstract: A method is provided for a repetitive deposition and etch of a substrate using a carbon containing ion beam in a gridded ion source. The method includes the actual ion beam processing step combined with the thermal and chemical conditioning of the ion source and a special cleaning step(s). The special cleaning step(s) effect robust removal of the precipitates accumulated in the operating source due to the decomposition of carbon containing gases such as hydrocarbons and halocarbons Precipitate removal is achieved by employing ions and radicals formed in an inert gas plasma or a mixture of inert gas and oxygen to reactively etch or bombard the precipitates.

Abstract: An electronic template representing the topography of a magnetic head being tested and delineating distinct patterns corresponding to particular regions of interest, such as ABS surfaces, is provided in order to limit analysis of the sample's surface to such regions. The outline of the slider positioned within the field of view of an interferometric microscope is identified by measuring the modulation of incident light at each pixel inside and outside the contour of the sample using the loci of perceivable fringe contrast as the criterion for establishing the location of such edges. Once the outline of the slider within the plastic tray is so established, the slider is shifted within the field of view to match the position of the template, thereby automatically achieving a precise alignment of the template with the boundary of the slider.

Abstract: A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.

Abstract: An improved metrology apparatus, such as a scanning probe microscope (SPM), has an actuator that controls motion in three orthogonal directions when it is selectively and electrically stimulated. The X-Y section of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y directions and the Z section of the actuator controls motion in the Z direction. A flexure is attached to the actuator and is mounted on a reference structure to prevent unwanted X and Y motion by the Z section of the actuator from moving a probe attached to the flexure. Preferably, two mirrors are mounted on the flexure. In operation of the SPM, a light beam is directed towards these mirrors. When the flexure moves in the Z direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z position of the flexure and the probe.

Abstract: This invention is directed to methods for depositing multilayered thin films onto substrates, for example in making thin film magnetic heads. In accordance with the invention a first film, such as Cr, is deposited onto the substrate at a first pressure and a second layer, such as CoCrPt is deposited at a second pressure.

Abstract: An interferometer scans the sample surface laterally with respect to the optical axis of the interferometric objective. The objective is tilted, so that the sample surface is placed at an angle with respect to the maximum coherence plane of the instrument. By moving the sample stage laterally, at an angle, through a point at a set distance from the objective on the objective's optical axis, rather than vertically along the optical axis, different parts of the object intersect the maximum coherence plane at different times as the surface passes through the coherence plane, the precise time depending on the profile of the surface. When the OPD of a point on the object's surface is greater than the coherence length of the light source, the intensity of light reflected from this point does not produce interference fringes. Therefore, the intensity registered by the detector is approximately constant.

Abstract: Surface characteristics of a surface of a three-dimensional object, such as surface area, surface area enhancement (i.e., the ratio of the actual surface area to an area of that surface projected onto an X-Y plane), and surface roughness parameters can be calculated based solely on line-based measurements and without performing the calculations required to actually create a three-dimensional image of that surface. Because a true three-dimensional image is not created, interline registration and low frequency noise limitations are eliminated from the measurement, and data can be acquired by scanning bidirectionally without adversely affecting the results. Likewise, the analysis time required to determine surface parameters is a fraction of that required by image-based techniques. This technique, being line-based rather than image-based, can be performed by any probe-based instrument, optical-based instrument, or any other instrument capable of measuring a sample surface in either digital or analog fashion.

Abstract: An integrated cantilever sensor array system that accurately detects and measures the presence of target substances in various environmental conditions. The integrated cantilever sensor array system comprises a cantilever sensor measurement head, a cantilever sensor system for measuring the oscillatory properties of the cantilevers and a measurement chamber. The measurement head includes a cantilever array having at least one cantilever, a light source and a detector positioned to detect incoming light reflected by the cantilevers within the cantilever array. The cantilever sensor system measures the oscillatory properties generated by the cantilevers within the cantilever array. The system includes the cantilever array and a detection system that measures a signal related to the bending of the cantilever. In addition, optional components such as a high frequency clock, Q-Control, may be added to more accurately measure the oscillation of the cantilevers within the cantilever array.

Abstract: A flexure carriage assembly has a carriage formed of a substantially rigid material. The carriage has four elongate columns arranged spaced apart and parallel to one another. Each of the elongate columns has first and second ends. The flexure carriage has four first cross members disposed between adjacent pairs of elongate columns and arranged to interconnect the first ends. The flexure carriage also includes four second cross members arranged between adjacent pairs of elongate columns and arranged to interconnect the bottom ends. The elongate columns and first and second cross members define a three-dimensional rectangular structure. The flexure carriage also has disposed centrally between the four elongate columns a translating section spaced equidistant between the first and second ends of the columns.

Abstract: A cathode assembly includes a monolithic target having a first surface and a center region. In addition, a sculpted section is formed in the first surface, and the sculpted section is generally recessed from the first surface and extends around the center in a racetrack configuration. The racetrack has a concentric centerline, and the sculpted section preferably is generally symmetric about the centerline. A magnetic field generator is disposed adjacent to the target and produces a magnetic field having an in-plane component. The magnetic field generator is tuned so that a distribution of the magnitude of the in-plane component in a direction transverse to the centerline at a point along the racetrack is characterized by two peaks that have a generally equal magnitude.

Abstract: A method of operating a probe-based instrument comprises placing a probe of the probe-based instrument in an operative state in which the probe interacts with a heated sample, measuring a parameter of probe operation indicative of a characteristic of the heated sample, and during the measuring step, maintaining interaction between the probe and the heated sample that is substantially free of influences caused by condensation on the probe. The maintaining step includes heating the probe to a temperature at which the measured parameter of probe operation is substantially free of influences caused by condensation on the probe. Heating the probe reduces or eliminates the formation of condensation on the probe from water or materials that have evaporated from the heated sample. The invention is especially useful in connection with atomic force microscopes and other probe-based instruments.

Abstract: Local sensitive force detector output data, acquired from a cellular and sub-cellular structures (“biological structures”), are quantified in an objective format. Data are acquired from two axes of the biological structure at scan positions along a third axis of the biological structure, which is perpendicular to the two axes. Data are then quantified as a function of scan position along the third axis. The quantified data can be plotted and displayed to generate a two-dimensional representation of a biological structure's morphology, which contains quantified data points from along the third axis of the biological structure. The output can be used for morphology-based classification and typing of biological structures. The invention classifies and types biological structures by converting the local sensitive force detector data into a graphical fingerprint, which, for example, can be compared to standard data generated from known biological structures.

Abstract: A vertical probe card assembly containing a plurality of vertical probe cards is mounted within a central corridor or opening within a magnetic field generator. Each of the vertical probe cards has a multiplicity of probe needles extending downwardly therefrom for electrically contacting test pads of a device under test that is positioned below the magnetic field generator.

Abstract: A high degree of measurement reproducibility is assured for the life of the tip of a probe-based instrument such as an atomic force microscope (AFM) by periodically operating the instrument in a tip cleaning mode to remove contaminants from the tip. The instrument is operated to interrupt the scanning operation and cause the probe to interact with the cleaning medium so as to remove contaminants from at least the pointed end portion of the tip. Tip cleaning may be achieved, for example, by ramming the tip vertically into the sample itself or into another cleaning medium located adjacent the sample. Alternatively, the tip can be moved laterally over the sample, a sticky material, a brush-like material, a ribbed material, or another material having surface characteristics that remove contaminants from the tip.

Abstract: The invention provides a system and method for microscopic X-ray fluorescence. An X-ray source, X-ray focusing element and a tapered X-ray opaque focusing aperture provide a focused X-ray spot on a sample. The system translates a sample between an imaging position and a testing position. In the imaging position, the sample is aligned in three dimensions and after alignment, the system automatically translates the sample between the imaging position and the testing position. To avoid collision between the sample and other elements of the system, a position detecting device terminates the sample translation if the sample trips the position detecting device. The focusing aperture of the system has a tapered through opening to block unfocused X-rays and reduce or eliminate a halo effect. To detect low atomic number elements, a detector aperture is vacuum sealed to an X-ray detector and X-ray elements of the system are vacuum evacuated.

Abstract: A cathode assembly includes a monolithic target having a first surface and a center region. In addition, a sculpted section is formed in the first surface, and the sculpted section is generally recessed from the first surface and extends around the center in a racetrack configuration. The racetrack has a concentric centerline, and the sculpted section preferably is generally symmetric about the centerline. A magnetic field generator is disposed adjacent to the target and produces a magnetic field having an in-plane component. The magnetic field generator is tuned so that a distribution of the magnitude of the in-plane component in a direction transverse to the centerline at a point along the racetrack is characterized by two peaks that have a generally equal magnitude.

Abstract: The bandwidth of a microactuator for a surface modification instrument or a surface measurement instrument is improved by inertially-balancing the microactuator to prevent the transfer of any net forces from the microactuator to its support structure by counteracting momentum generated upon operation of the microactuator, thereby inhibiting induced resonances in the support structure. Net force transfer prevention can be achieved using either 1) a multi-actuator assembly including a primary microactuator and a counteracting actuator operating substantially out-of-phase with respect to the primary microactuator, or 2) a single microactuator mounted on the microactuator's support structure so as to prevent momentum transfer to the support structure during microactuator operation. The instrument also preferably includes high internal damping to minimize the effect of any slight inertial misbalances on instrument operation.

Abstract: A method of controlling a scanner, particularly a scanner for use in scanning probe microscopes such as an atomic force microscope, including the steps of generating a scan voltage which varies as a parametric function of time, applying the scan voltage to the scanner, sensing plural positions of the scanner upon application of the scan voltage, fitting a parametric function to the sensed scanner positions, and controlling at least one parameter of the scan voltage function based on the parametric function fitted to the sensed scanner positions in the fitting step. In a preferred embodiment, the scan voltage is a polynomial parametric function of time and the order of terms of the polynomial is set in relation to the size of the scan being controlled, with small scans having at least one order term and relatively larger scans having plural order terms.