Abstract: A method of manufacturing a capacitive micromachined ultrasonic transducer (CMUT) includes the steps of: a) forming a first dielectric layer on a first substrate; b) forming a second dielectric layer on a second substrate; c) forming a cavity in the first or second dielectric layer; d) assembling the first and second substrates by direct bonding of the surface of the second dielectric layer opposite to the second substrate to the surface of the first dielectric layer opposite to the first substrate; e) removing the second substrate to only keep above the cavity a suspended membrane formed by the second dielectric layer; and f) forming an upper electrode on the surface of the membrane opposite to the first substrate.

Abstract: A portable electronic device for assessing a human cardiovascular activity includes first and second probes substantially parallel to each other and located on either side of a third probe, substantially perpendicular to the first and second probes, each probe comprising an array of ultrasound transducers, and a control circuit configured to: a) estimate, by means of a first ultrasound beam emitted by the first probe, a position of a blood vessel with respect to the device; and b) adjust a second ultrasound beam, emitted by the third probe, according to the estimated position of the blood vessel.

Abstract: The present disclosure relates to a method of simultaneous manufacturing, from a same substrate (101), at least one first CMUT transducer (I) having a first resonance frequency and at least one second CMUT transducer (II) having a second resonance frequency different from the first frequency, the method comprising the steps of: a) for each transducer (I, II), forming a cavity (103) on the upper surface side of the substrate, and forming a flexible membrane (105) suspended above the cavity (103); b) forming a first layer (109) extending over a portion only of the upper surface of the membrane (105) of the first transducer (I) and which does not extend over the membrane (105) of the second transducer (II); and c) forming a second layer (111) extending over the entire upper surface of the membrane (105) of the first transducer and over the entire upper surface of the membrane of the second transducer.

Abstract: The present disclosure relates to a CMUT transducer (200) comprising: —a conductive or semiconductor substrate (201) coated with a stack of one or a plurality of dielectric layers (203, 213); —a cavity (205, 215) formed in said stack; —a conductive or semiconductor membrane (221) suspended above the cavity; —at the bottom of the cavity, a conductive region (209) in contact with the upper surface of the substrate, said conductive region being interrupted on a portion of the upper surface of the substrate; and—in the cavity, a stop structure (207) made of a dielectric material localized on or above the area of interruption of the conductive region (209).

Abstract: A method of manufacturing a panel transducer scale package includes securing acoustic components at predetermined locations on a first carrier substrate with a first surface of the acoustic components positioned adjacent to the first carrier substrate. ASIC components are also secured at predetermined locations on the first carrier substrate with a first surface of the ASIC components positioned adjacent to the first carrier substrate. Photoresist resin is applied over the acoustic components and the ASIC components such that a second surface of the acoustic components is left exposed from the photoresist resin. The first carrier substrate is removed to expose the first surface of the acoustic components and the first surface of the ASIC components. A buildup layer is formed including electrical pathways between each of the acoustic components and the ASIC components, and the photoresist resin is removed.

Abstract: A portable two-mode probe intended to be applied against a biological tissue to be examined, the probe comprising: an ultrasonic transducer (34, 63), configured to emit ultrasonic waves into the tissue and to receive ultrasonic waves reflected by the tissue, the transducer extending along a transverse axis; at least two optodes (32, 60, 62a, 62b) placed on either side of the transverse axis, such that the transducer extends between the two optodes; each optode comprising a casing (52, 61), the casing containing: a light emitter (31), configured to emit a light wave toward the tissue; and/or an optical detector (32), configured to detect a light wave scattered by the tissue; the optodes being arranged such that at least one light emitter and at least one optical detector are placed on either side of the transducer; at least one optical detector having a detection area (53, 63a, 63b) formed from a semiconductor and connected to a circuit board (54).

Abstract: A piezoelectric bimorph cantilever beam system includes a shim having a first main surface, a second main surface opposite the first main surface, a proximal end connected to an anchor, and a distal end opposite the proximal end. The system further includes a first piezoelectric layer laminated on the first main surface of the shim and a second piezoelectric layer laminated on the second main surface of the shim. A first beam stiffener is provided over the first main surface of the shim adjacent to the anchor with the first beam stiffener at least partially covering the first piezoelectric layer. A second beam stiffener is provided over the second main surface of the shim adjacent to the anchor with the second beam stiffener at least partially covering the second piezoelectric layer.

Abstract: A vibrational multi-morph piezoelectric energy harvester includes a composite shim having a parallelepiped form with a thickness dimension made smaller than width and length dimensions, and having a stiffness shifting from one extremity to the other extremity to minimize mechanical constraints developed at a clamping area; a seismic mass mounted at an end opposite to the clamping area to mechanically match the system to the surrounding vibration resonance; one or more piezoelectric layers laminated on said composite shim; and electrodes plated onto the one or more piezoelectric layers for connection to an electronic harvesting circuit, a battery, or a super capacitor.

Abstract: An ultrasonic non-destructive testing method and device for rail applications uses a plurality of phased array transducers to inspect aluminothermit weld defects located in a head portion, a web portion, an ankle portion, and a toe portion of a weld of a rail section. The method includes: scanning the head portion of the weld including: a first phased array transducer positioned above the weld and a second phased array transducer positioned a distance from the first phased array transducer to provide inclined access to the weld; and scanning the toe portion of the weld including: positioning pairs of third, fourth, and fifth phased array transducers on a surface of the toe portion, such that the pairs of third, fourth and fifth phased array transducers are disposed symmetrically with one of the pair on each side of the toe portion.

Abstract: A device for a bimodal diagnostic probe with optical and ultrasonic imaging, the probe including a main body supporting an ultrasonic transducer at its front end. The device includes a shell, an illumination mechanism mounted on a front end of the shell to light outside of the shell, and a collection or detection mechanism mounted on the front end of the shell to collect or detect an optical signal produced outside the shell. The shell includes an attachment mechanism to reversibly assemble it around the main body of the probe, with the illumination mechanism and the collection or detection mechanism mounted on the shell.

Abstract: A device for a bimodal diagnostic probe with optical and ultrasonic imaging, the probe including a main body supporting an ultrasonic transducer at its front end. The device includes a shell, an illumination mechanism mounted on a front end of the shell to light outside of the shell, and a collection or detection mechanism mounted on the front end of the shell to collect or detect an optical signal produced outside the shell. The shell includes an attachment mechanism to reversibly assemble it around the main body of the probe, with the illumination mechanism and the collection or detection mechanism mounted on the shell.

Abstract: A capacitive micro-machined ultrasonic transducer (CMUT) array includes an improved elementary aperture for imaging operations. The transducer can be of a linear, curved linear, annular, matrix or even single surface configuration. The elementary apertures thereof are formed by a specific arrangement of capacitive micromachined membranes (CMM) so as to exhibit ideal acoustical and electrical behavior when operated with imaging systems. The CMM arrangements can be either conventional where the element transducers of the array are uniformly shaped by predefined CMMs in a manner such as to exhibit acoustic behavior similar to a piezoelectric transducer, or can be more sophisticated, wherein each element transducer is formed by a specific combination of different CMMs (i.e., of a different size and/or shape) so as to provide the transducer with built-in acoustic apodization that can be implemented in the azimuth and/or elevation dimension of the device.

Abstract: A motorized scanhead device is capable of rotating an array transducer through 360 degrees of angular rotation in a manner such as to provide acquisition of images in successive scanning planes arranged around the principal axis of the device. The device can be incorporated in endoscopes (e.g., transesophageal endoscopes), laparoscopes, endocavity or intracavity probes so as to provide an expanded angle of vision or to render 3D images, without the need for external movement of the device. The motorized scanhead device includes a motor that is isolated from the transducer signal interconnections in order to minimize electrical discharges associated with motor operation and to provide more room between an associated probe housing and the scanhead device.

Abstract: A micro-machined ultrasonic transducer substrate for immersion operation is formed by a particular arrangement of a plurality of micro-machined membranes that are supported on a silicon substrate. The membranes, together with the substrate, form surface microcavities that are vacuum sealed to provide electrostatic cells. The cells can operate at high frequency and can cover a broader bandwidth in comparison with conventional piezoelectric bulk transducers.

Abstract: An ultrasonic imaging probe is provided which is capable of capturing “on-the-fly” scanning planes in successive positions of the probe so as to form a volumetric image representation at a real time frame rate. The probe includes a flexible sealing membrane for a coupling fluid. Laterally extending folding portions of the flexible membrane provide fluid isolation and cancellation of parasitic constraining forces normally generated during probe movement.

Abstract: A micro-machined ultrasonic transducer substrate for immersion operation is formed by a particular arrangement of a plurality of micro-machined membranes that are supported on a silicon substrate. The membranes, together with the substrate, form surface microcavities that are vacuum sealed to provide electrostatic cells. The cells can operate at high frequency and can cover a broader bandwidth in comparison with conventional piezoelectric bulk transducers.

Abstract: A method is provided for making a backing layer for an ultrasonic matrix array transducer useful in medical imaging and the like. A conductive grid is provided which includes a plurality of micro-contacts each joined together by a common base so that spaces are provided between the free ends of the contacts. A mold for the grid is filled with an acoustically absorbent material such that the absorbent material fills the spaces between the contacts, so as to produce a block when cured. The common base is removed so as to separate the contacts from one another within the block. Further machining exposes the opposite ends of micro-contacts so that a like number of contact faces or pads are provided at opposed surfaces of the backing layer. Improved transducer constructions are also disclosed.

Abstract: An ultrasonic apparatus is provided for producing three dimensional images using at least one moving curved array transducer for scanning a volume of a region of interest to be imaged. The apparatus includes an acoustic front shell having complex shape and an ultrasonic transducer adapted for swinging movement underneath the front shell and having a front surface of a shape conforming to the complex shape of the front shell. A motor provides the swinging movement of the ultrasonic array transducer underneath the front shell so as to scan a volume of the region of interest. The shell and a transducer carrier may be of an ovoid shape. The transducer may include lips at superior edges thereof which contain a coupling grease. Multiple transducers for different applications may be employed.

Abstract: Ultrasonic probe devices are provided which are particularly suitable for use as invasive imaging probes such as endocavity probes and endoscopic probes. The probe devices include a dual cross-scanning bi-plane array transducer formed by a pair of orthogonal, intersecting transducer arrays. The probe devices are capable of providing, either simultaneously or alternately, crossing scanning through a single symmetrical scanning axis.

Abstract: A method is provided for manufacturing crossing/intersecting transducer arrays including first and second ultrasonic transducer arrays which intersect centrally of one another. Each transducer operates independently without any decrease in acoustic performance. The first and second arrays have their own independent signal electrodes, respectively disposed on the front and rear surfaces of the device. Because the arrays are built on a unique piezoelectric member, a portion of signal electrode of each array is adapted to be connected to ground in a manner permitting proper operation of the entire array. A method of forming matching layer sets incorporating electrical interconnections is also provided.