Patents Assigned to Verschleiss-Schutz-Technik Keller GmbH & Co. KG
  • Method for CVD surface coating and CVD reactor system
    Patent number: 6045617
    Abstract: Disclosed herein is a method and a reactor system for CVD surface coating. In this method, the reaction gas is supplied to the reactor chamber with any frequency and at any time intervals in succession, rising and falling in the form of a pulsed gas stream. The reversal of the gas flow direction is performed by a multipath valve located inside the reactor which can be controlled from outside by means of an adjusting shaft.
    Type: Grant
    Filed: October 5, 1998
    Date of Patent: April 4, 2000
    Assignee: Verschleiss-Schutz-Technik Keller GmbH & Co. KG
    Inventor: Klaus Keller