Patents Assigned to VI Systems GmbH
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Publication number: 20200313392Abstract: An in-plane-emitting semiconductor diode laser employs a surface-trapped optical mode existing at a boundary between a distributed Bragg reflector and a homogeneous medium, dielectric or air. The device can operate in both TM-polarized and TE-polarized modes. The mode exhibits an oscillatory decay in the DBR away from the surface and an evanescent decay in the dielectric or in the air. The active region is preferably placed in the top part of the DBR close to the surface. The mode behavior strongly depends on the wavelength of light, upon increase of the wavelength the mode becomes more and more extended into the homogeneous medium, the optical confinement factor of the mode in the active region drops until the surface-trapped mode vanishes. Upon a decrease of the wavelength, the leakage loss of the mode into the substrate increases. Thus, there is an optimum wavelength, at which the laser threshold current density is minimum, and at which the lasing starts.Type: ApplicationFiled: October 17, 2019Publication date: October 1, 2020Applicant: VI SYSTEMS GmbHInventors: Vitaly SHCHUKIN, Nikolay LEDENTSOV
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Patent number: 10777969Abstract: An in-plane-emitting semiconductor diode laser employs a surface-trapped optical mode existing at a boundary between a distributed Bragg reflector and a homogeneous medium, dielectric or air. The device can operate in both TM-polarized and TE-polarized modes. The mode exhibits an oscillatory decay in the DBR away from the surface and an evanescent decay in the dielectric or in the air. The active region is preferably placed in the top part of the DBR close to the surface. The mode behavior strongly depends on the wavelength of light, upon increase of the wavelength the mode becomes more and more extended into the homogeneous medium, the optical confinement factor of the mode in the active region drops until the surface-trapped mode vanishes. Upon a decrease of the wavelength, the leakage loss of the mode into the substrate increases. Thus, there is an optimum wavelength, at which the laser threshold current density is minimum, and at which the lasing starts.Type: GrantFiled: October 17, 2019Date of Patent: September 15, 2020Assignee: VI SYSTEMS GmbHInventors: Vitaly Shchukin, Nikolay Ledentsov
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Patent number: 10666017Abstract: An optoelectronic device employs a surface-trapped TM-polarized optical mode existing at a boundary between a distributed Bragg reflector (DBR) and a homogeneous medium, dielectric or air. The device contains a resonant optical cavity surrounded by two DBRs, and an additional DBR section on top supporting the surface-trapped mode. Selective chemical transformation, like selective oxidation, etching or alloy composition intermixing form a central core and a periphery having different vertical profiles of the refractive index. Therefore, the longitudinal VCSEL mode in the core is non-orthogonal to the surface-trapped mode in the periphery, and the two modes can be transformed into each other. Such transformation allows fabrication of a number of optoelectronic devices and systems like a single transverse mode VCSEL, an integrated optical circuit operating as an optical amplifier, an integrated optical circuit combining a VCSEL and a resonant cavity photodetector, etc.Type: GrantFiled: March 26, 2019Date of Patent: May 26, 2020Assignee: Vertically Integrated (VI) Systems GmbHInventors: Nikolay Ledentsov, Vitaly Shchukin
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Patent number: 10651628Abstract: The invention discloses a semiconductor optoelectronic micro-device comprising at least one cavity and at least one multilayer interference reflector. The device represents a micrometer-scale pillar with an arbitrary shape of the cross section. The device includes a vertical optical cavity, a gain medium and means of injection of nonequilibrium carriers into the gain medium, most preferably, via current injection in a p-n-junction geometry. To allow high electric-to-optic power conversion at least one contact is placed on the sidewalls of the micropillar overlapping with at least one doped section of the device. Means for the current path towards the contacts and for the heat dissipation from the gain medium are provided. Arrays of micro-devices can be fabricated on single wafer or mounted on single carrier. Devices with different cross-section of the micropillar emit light at different wavelengths.Type: GrantFiled: April 11, 2019Date of Patent: May 12, 2020Assignee: VI Systems GmbHInventors: Nikolay Ledentsov, Vitaly Shchukin
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Patent number: 10516251Abstract: An oxide-confined vertical cavity surface emitting laser including a distributed Bragg reflector (DBR) wherein the layers of the (DBR) includes a multi-section layer consisting of a first section having a moderately high aluminum composition, an second section which is an insertion having a low aluminum composition, and a third section which is an oxide-confined aperture formed by partial oxidation of a layer having a high aluminum composition (95% and above). A difference in aluminum composition between a high value in the aperture layer and a moderately high value in the first section prevents non-desirable oxidation of the first section from the mesa side while the aperture layer is being oxidized. A low aluminum composition in the second section prevents non-desirable oxidation in the vertical direction of the layer adjacent to the targeted aperture layer.Type: GrantFiled: June 23, 2017Date of Patent: December 24, 2019Assignee: VI Systems GmbHInventors: Nikolay Ledentsov, Vitaly Shchukin
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Patent number: 10283937Abstract: Optoelectronic device undergoes selective chemical transformation like alloy compositional intermixing forming a non-transformed core region and an adjacent to it periphery where transformation has occurred. Activated by selective implantation or diffusion of impurities like Zinc or Silicon, implantation or diffusion of point defects, or laser annealing, transformation results in a change of the refractive index such that the vertical profile of the refractive index at the periphery is distinct from that in the core. Therefore the optical modes of the core are no longer orthogonal to the modes of the periphery, are optically coupled to them and exhibit lateral leakage losses to the periphery. High order transverse optical modes associated to the same vertical optical mode have higher lateral leakage losses to the periphery than the fundamental transverse optical mode, thus supporting single transverse mode operation of the device.Type: GrantFiled: February 10, 2016Date of Patent: May 7, 2019Assignee: VI Systems GmbHInventors: Nikolay Ledentsov, Nikolay Ledentsov, Jr., Vitaly Shchukin
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Patent number: 10243330Abstract: Optical beam quality of an optoelectronic device is improved by suppression of high-order transverse optical modes by their resonant interaction with the continuum of modes in the surrounding regions, such continuum being realized by replacement of one or several layers by layers having a lower refractive index. In particular, selective oxidation of GaAlAs-based vertical cavity surface emitting laser results in (Ga)AlO layers surrounding the aperture and having a lower refractive index than the original (Ga)AlAs layers. The continuum of optical modes originates due to the modification of the optical field in the areas surrounding the aperture caused by the low index insertions positioned to result in enhancement of the optical field in their vicinity.Type: GrantFiled: February 20, 2013Date of Patent: March 26, 2019Assignee: VI SYSTEMS GMBHInventors: Nikolay Ledentsov, Vitaly Shchukin
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Patent number: 10121935Abstract: A method for fabrication of three-dimensional nanostructures on top of the surface of a first solid state material is disclosed, which includes steps of (i) deposition of a layer of a second solid state material forming a stable layer-like coverage of the surface, (ii) the subsequent deposition of a third solid state material, having a stronger binding energy with the first solid state material than the second solid state material, (iii) wherein the third solid state material replaces the second solid state material forming an interface with the first material and thus reduces the energy of the system, and (iv) where the resulting excess second solid state material forms three-dimensional nanostructures. The structure can be covered with another (fourth) solid state material, which eventually can be the same as the first material or a different one, and the three dimensional nanostructures form capped quantum dots or quantum wires.Type: GrantFiled: January 30, 2013Date of Patent: November 6, 2018Assignee: VI SYSTEMS GMBHInventors: Nikolay Ledentsov, Vitaly Shchukin
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Publication number: 20180233624Abstract: A method for fabrication of three-dimensional nanostructures on top of the surface of a first solid state material is disclosed, which includes steps of (i) deposition of a layer of a second solid state material forming a stable layer-like coverage of the surface, (ii) the subsequent deposition of a third solid state material, having a stronger binding energy with the first solid state material than the second solid state material, (iii) wherein the third solid state material replaces the second solid state material forming an interface with the first material and thus reduces the energy of the system, and (iv) where the resulting excess second solid state material forms three-dimensional nanostructures. The structure can be covered with another (fourth) solid state material, which eventually can be the same as the first material or a different one, and the three dimensional nanostructures form capped quantum dots or quantum wires.Type: ApplicationFiled: January 30, 2013Publication date: August 16, 2018Applicant: VI Systems GmbHInventors: Nikolay Ledentsov, Vitaly Shchukin
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Publication number: 20180233882Abstract: Optical beam quality of an optoelectronic device is improved by suppression of high-order transverse optical modes by their resonant interaction with the continuum of modes in the surrounding regions, such continuum being realized by replacement of one or several layers by layers having a lower refractive index. In particular, selective oxidation of GaAlAs-based vertical cavity surface emitting laser results in (Ga)AlO layers surrounding the aperture and having a lower refractive index than the original (Ga)AlAs layers. The continuum of optical modes originates due to the modification of the optical field in the areas surrounding the aperture caused by the low index insertions positioned to result in enhancement of the optical field in their vicinity.Type: ApplicationFiled: February 20, 2013Publication date: August 16, 2018Applicant: VI Systems GmbHInventors: Nikolay LEDENTSOV, Vitaly SHCHUKIN
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Patent number: 9917419Abstract: An optoelectronic semiconductor device is disclosed wherein the device is a vertical-cavity surface-emitting laser or a photodiode containing a section, the top part of which is electrically isolated from the rest of the device. The electric isolation can be realized by etching a set of holes and selective oxidation of AlGaAs layer or layers such that the oxide forms a continuous layer or layers everywhere beneath the top surface of this section. Alternatively, a device can be grown epitaxially on a semi-insulating substrate, and a round trench around a section of the device can be etched down to the semi-insulating substrate thus isolating this section electrically from the rest of the device. Then if top contact pads are deposited on top of the electrically isolated section, the pads have a low capacitance, and a pad capacitance below two hundred femto-Farads, and the total capacitance of the device below three hundred femto-Farads can be reached.Type: GrantFiled: June 26, 2016Date of Patent: March 13, 2018Assignee: VI Systems GmbHInventors: Joerg-Reinhardt Kropp, Nikolay Ledentsov, Vitaly Shchukin
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Publication number: 20170373470Abstract: An oxide-confined vertical cavity surface emitting laser including a distributed Bragg reflector (DBR) wherein the layers of the (DBR) includes a multi-section layer consisting of a first section having a moderately high aluminum composition, an second section which is an insertion having a low aluminum composition, and a third section which is an oxide-confined aperture formed by partial oxidation of a layer having a high aluminum composition (95% and above). A difference in aluminum composition between a high value in the aperture layer and a moderately high value in the first section prevents non-desirable oxidation of the first section from the mesa side while the aperture layer is being oxidized. A low aluminum composition in the second section prevents non-desirable oxidation in the vertical direction of the layer adjacent to the targeted aperture layer.Type: ApplicationFiled: June 23, 2017Publication date: December 28, 2017Applicant: VI Systems GmbHInventors: Nikolay LEDENTSOV, Vitaly SHCHUKIN
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Publication number: 20170373471Abstract: An optoelectronic semiconductor device is disclosed wherein the device is a vertical-cavity surface-emitting laser or a photodiode containing a section, the top part of which is electrically isolated from the rest of the device. The electric isolation can be realized by etching a set of holes and selective oxidation of AlGaAs layer or layers such that the oxide forms a continuous layer or layers everywhere beneath the top surface of this section. Alternatively, a device can be grown epitaxially on a semi-insulating substrate, and a round trench around a section of the device can be etched down to the semi-insulating substrate thus isolating this section electrically from the rest of the device. Then if top contact pads are deposited on top of the electrically isolated section, the pads have a low capacitance, and a pad capacitance below two hundred femto-Farads, and the total capacitance of the device below three hundred femto-Farads can be reached.Type: ApplicationFiled: June 26, 2016Publication date: December 28, 2017Applicant: VI Systems GmbHInventors: Joerg-Reinhardt KROPP, Nikolay LEDENTSOV, Vitaly SHCHUKIN
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Publication number: 20170317472Abstract: Optoelectronic device undergoes selective chemical transformation like alloy compositional intermixing forming a non-transformed core region and an adjacent to it periphery where transformation has occurred. Activated by selective implantation or diffusion of impurities like Zinc or Silicon, implantation or diffusion of point defects, or laser annealing, transformation results in a change of the refractive index such that the vertical profile of the refractive index at the periphery is distinct from that in the core. Therefore the optical modes of the core are no longer orthogonal to the modes of the periphery, are optically coupled to them and exhibit lateral leakage losses to the periphery. High order transverse optical modes associated to the same vertical optical mode have higher lateral leakage losses to the periphery than the fundamental transverse optical mode, thus supporting single transverse mode operation of the device.Type: ApplicationFiled: February 10, 2016Publication date: November 2, 2017Applicant: VI Systems GmbHInventors: Nikolay LEDENTSOV, Nikolay LEDENTSOV, JR., Vitaly SHCHUKIN
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Patent number: 9151918Abstract: An opto-electronic assembly for high speed opto-electronic signal transmission which comprises: mounting plate with a top side; wherein the top side contains at least one area at a higher level and at least one area at a lower level, an electro-optical or opto-electronic transducer component with a number of transducers with the optical port of the transducer component on the top side; a micro-mirror component; an optical transmission path assigned to each transducer wherein the transmission axis of each transmission path is oriented substantially parallel to the surface of the transducer component and to the top side of the mounting plate; and a transducer component that is mounted with the bottom side on the mounting plate below a micro-mirror component that is mounted above the transducer component in such a configuration that the optical transmission path to or from each transducer is reflected at the dedicated mirror surface.Type: GrantFiled: March 18, 2013Date of Patent: October 6, 2015Assignee: VI Systems GmbHInventor: Joerg-Reinhardt Kropp
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Publication number: 20140270630Abstract: An opto-electronic assembly for high speed opto-electronic signal transmission which comprises: mounting plate with a top side; wherein the top side contains at least one area at a higher level and at least one area at a lower level, an electro-optical or opto-electronic transducer component with a number of transducers with the optical port of the transducer component on the top side; a micro-minor component; an optical transmission path assigned to each transducer wherein the transmission axis of each transmission path is oriented substantially parallel to the surface of the transducer component and to the top side of the mounting plate; and a transducer component that is mounted with the bottom side on the mounting plate below a micro-minor component that is mounted above the transducer component in such a configuration that the optical transmission path to or from each transducer is reflected at the dedicated mirror surface.Type: ApplicationFiled: March 18, 2013Publication date: September 18, 2014Applicant: VI Systems GmbHInventor: Joerg-Reinhardt Kropp
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Patent number: 8478133Abstract: The present invention refers to a method for robust multi-level encoding of optical signals. The method uses a transmitter that transforms electric signals into optical signals and a receiver capable to transform optical signals into electric signals. The transmitter is capable to generate optical pulses having at least two different durations. The amplitudes of the pulses are preferably close to each other. The transmitter is fast, and the receiver is slow such that the response time of the receiver exceeds at least the shortest of the durations of the optical pulses. Then the receiver effectively integrates the optical signal and generates the electric signal having a larger amplitude when the optical signal has a larger duration. Thus, the method converts the modulation in pulse duration into the modulation in signal amplitude. In different embodiments of the present invention, the transmitter can be realized by a light-emitting diode, superluminescent light-emitting diode, or a diode laser.Type: GrantFiled: September 23, 2010Date of Patent: July 2, 2013Assignee: VI Systems GmbHInventors: Nikolai Ledentsov, Vitaly Shchukin
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Patent number: 8472496Abstract: A device representing a reflector, for example, an evanescent reflector or a multilayer interference reflector with at least one reflectivity stopband is disclosed. A medium with means of generating optical gain is introduced into the layer or several layers of the reflector. The optical gain spectrum preferably overlaps with the spectral range of the reflectivity stopband. This device can be attached to air, semiconductor or dielectric material or multilayer structures and provide a tool for preferential amplification of the optical waves propagating at larger angles with respect to the interface with the evanescent or the multilayer interference reflector. Thus angle selective amplification or generation of light is possible. Several evanescent or interference reflectors can be used to serve the goal of preferable amplification the said optical waves.Type: GrantFiled: July 6, 2010Date of Patent: June 25, 2013Assignee: VI Systems GmbHInventor: Nikolay Ledentsov
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Patent number: 8447187Abstract: An optoelectronic interconnect which includes optical transmitter and detector having capacitances below 150 femto-Farads each suitable for transmission of optical signals at speeds at and above 20 Gigabit per second at power consumption below 10 milliWatt per Gigabit per second.Type: GrantFiled: February 17, 2011Date of Patent: May 21, 2013Assignee: VI Systems GmbHInventors: Nikolay Ledentsov, Vitaly Shchukin
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Patent number: 8439578Abstract: The optoelectronic assembly for high speed signal transmission based on surface-emitting/receiving components is disclosed. The assembly contains a mounting plate with a top side used for the mounting of the components; single or multiple electrooptical or optoelectronic transducer components with the optical ports of the transducer on the top side and a bottom side used for assembly; a micro-mirror component; an optical transmission path wherein the transmission axis is oriented substantially parallel to the surface of the transducer components and to the top side of the mounting plate; and a transducer component mounted with the bottom side on the mounting plate near a micro-mirror component mounted above the transducer component in such a configuration that the optical transmission path to or from the transducer is reflected at the mirror surface such that the transducer is optically coupled to this same transmission path.Type: GrantFiled: August 26, 2010Date of Patent: May 14, 2013Assignee: VI Systems GmbHInventor: Joerg-Reinhardt Kropp