Abstract: There is disclosed a system for delivering gas at a predetermined rate of flow, including a diaphgram type flow controller, a pressure regulator for providing a constant flow of gas to the flow controller, and a microprocessor controlled stepper motor utilizing an optical encoder to adjust the rate of flow of a gas leaving the controller without having to use a gas flow measurement device to monitor the flow rate.
Type:
Grant
Filed:
March 8, 1993
Date of Patent:
July 19, 1994
Assignee:
Vici Metronics Incorporated
Inventors:
David C. Fenimore, Walter H. McHenry, James L. Blumberg