Abstract: A smart material actuator comprising a layered web assembly, compensator, smart material device and at least one actuating arm. The web assembly comprises a first surface in operable contact with the smart material device and having at least one resilient member in operable connection with the compensator and the actuating arm. Upon activation of the smart material device, the resilient member flexes and the actuating arm moves. The web assembly is formed of joined layers of inner and outer plates.

Abstract: A smart material actuator comprising a layered web assembly, compensator, smart material device and at least one actuating arm. The web assembly comprises a first surface in operable contact with the smart material device and having at least one resilient member in operable connection with the compensator and the actuating arm. Upon activation of the smart material device, the resilient member flexes and the actuating arm moves. The web assembly is formed of joined layers of inner and outer plates.

Abstract: A smart material actuator having more than two actuating arms, more than two mechanical webs, and being driven by a piezo or other smart material device within an enclosed compensator, and which may be adapted for use as an actuator, an energy capture device, or a sensor. In certain embodiments, the smart material actuator can also operate as the driver for an audio speaker.

Abstract: An actuator driven by a smart material device and suitable for use as an actuator, energy capture device, or sensor, having an enclosed compensator, potting material, at least one actuating arm, and two mechanical webs and a movable supporting member adapted such that application of a suitable electric potential causes a change in shape of the smart material device, thereby flexing the mechanical webs and causing movement of the actuating arm. As an energy capture device or sensor, external motion causes the actuating arm to move, thereby causing the smart material device to generate recoverable electrical energy or an electric signal indicating motion.

Abstract: An actuator apparatus comprising a smart material device, a compensator, a movable supporting member, at least three mechanical webs, at least three actuating arms, and a second stage assembly is disclosed wherein the mechanical webs comprise a first resilient member attached to the compensator and a second resilient member attached to said movable supporting member. A piezoelectric or smart material device is affixed between the first mounting surface and the compensator. The actuating arms comprise a first actuating arm end attached to one mechanical web and a second actuating arm end attached to the second stage assembly. The second stage assembly comprises resilient strips having a first end attached to the actuating arm and a second end attached to a second stage attachment surface. Application of an electrical potential causes the smart material device to expand, thereby urging the movable supporting member away from the compensator and causing the first and second resilient members to flex.

Abstract: An improved mass flow controller with a body having an inlet and an outlet; a sensor adapted to sense the flow of material out of the outlet; a controller adapted to receive a signal from the sensor; a proportional valve operatively connected between the inlet and the outlet; and a mechanically-amplified smart material actuator electrically connected to the controller and operatively connected to the proportional valve. The mechanically-amplified actuator comprises a smart material device, a compensator, a movable supporting member, at least two mechanical webs, at least two actuating arms, and a second stage assembly.

Abstract: A smart material actuator comprising a mechanical amplifier with a fixed supporting member, at least one mountable actuating arm, and mechanical web having at least one compliant member attached to the mountable arm and a movable supporting member. A piezoelectric stack is affixed between a first mounting surface on the fixed supporting member and a second mounting surface on the movable supporting member. With the fixed supporting member being substantially rigid, and the piezoelectric stack being affixed between the first mounting surface and the second mounting surface, which are substantially parallel, applying an appropriate electric potential to the piezoelectric stack will cause it to expand substantially without angular movement. The expansion urges the second mounting surface away from the first, thereby causing the compliant members of the mechanical web to flex, thereby moving the mountable actuating arm.

Abstract: A micro-scale, smart material actuator having an overall length smaller than 10 mm comprising a multilayer piezoelectric stack housed in a mechanical amplifier made up of a fixed supporting member, a movable supporting member connected to compliant links attached to one or more actuating arms such that, when a suitable electric current is applied to the piezoelectric stack, the resulting expansion is translated through the movable supporting member, thereby causing movement in the actuating arms A method of generating electricity from motion using such an actuator is also disclosed in which the actuating arms are connected to a source of mechanical motion and the piezoelectric stack is connected to an electrical load, whereby the mechanical motion causes the piezoelectric stack to generate electrical charge that is then discharged into the load.

Abstract: A smart material actuator having a fixed supporting member, mechanical web, actuating arm, and piezoelectric or smart material stack is disclosed, together with a sensor adapted to indicate the degree of motion of the actuating arms and controller adapted to allow safe operation of the actuator in resonant conditions. Methods of maintaining resonant operation, avoiding resonant operation, and adjusting resonant frequencies are also disclosed.

Abstract: An actuator apparatus comprising a smart material device, a compensator, a movable supporting member, at least three mechanical webs, at least three actuating arms, and a second stage assembly is disclosed wherein the mechanical webs comprise a first resilient member attached to the compensator and a second resilient member attached to said movable supporting member. A piezoelectric or smart material device is affixed between the first mounting surface and the compensator. The actuating arms comprise a first actuating arm end attached to one mechanical web and a second actuating arm end attached to the second stage assembly. The second stage assembly comprises resilient strips having a first end attached to the actuating arm and a second end attached to a second stage attachment surface. Application of an electrical potential causes the smart material device to expand, thereby urging the movable supporting member away from the compensator and causing the first and second resilient members to flex.

Abstract: A smart material actuator apparatus having a smart material device, compensator, movable supporting member, two mechanical webs, two actuating arms, and a second stage assembly. Application of an electrical potential causes the smart material device to expand, thereby moving the actuating arms. That movement causes resilient strips to urge a second stage attachment surface in a direction substantially parallel to the smart material device. Optional dampening assemblies may be added where high speed operation is desired, and an optional valve assembly may be attached where an actuated valve, such as a high speed actuated air valve, is needed.

Abstract: An actuator-driven pump having a resilient chamber and a plurality of smart material actuators arranged such that activation of each smart material actuator will cause the smart material actuator to compress the resilient chamber is disclosed. A controller is connected to the smart material actuators for controlling the activation and deactivation of said smart material actuators in a pattern to urge a material through the resilient chamber. Methods of pumping material through activating actuators in an actuator driven pump in a predetermined pattern are also disclosed.

Abstract: A smart material actuator having more than two actuating arms, more than two mechanical webs, and being driven by a piezo or other smart material device within an enclosed compensator, and which may be adapted for use as an actuator, an energy capture device, or a sensor. In certain embodiments, the smart material actuator can also operate as the driver for an audio speaker.

Abstract: An actuator driven by a smart material device and suitable for use as an actuator, energy capture device, or sensor, having an enclosed compensator, potting material, at least one actuating arm, and two mechanical webs and a movable supporting member adapted such that application of a suitable electric potential causes a change in shape of the smart material device, thereby flexing the mechanical webs and causing movement of the actuating arm. As an energy capture device or sensor, external motion causes the actuating arm to move, thereby causing the smart material device to generate recoverable electrical energy or an electric signal indicating motion.

Abstract: A method and apparatus for harvesting energy comprising determining an electrical impedance of a piezoelectric stack, connecting an electrical load to the piezoelectric stack wherein the piezoelectric stack is housed in a mechanical amplifier comprising a fixed supporting member, a movable supporting member connected to compliant links attached to at least one actuating arm, and connecting the actuator to a source of motion whereby movement of the actuating arm results in compression and expansion of the piezoelectric stack, which generates electrical current into the electrical load.

Abstract: A nano piezoelectric actuator energy conversion apparatus fabricated from silicon comprising a mechanical amplifier comprising a fixed supporting member, a movable supporting member connected to compliant links attached to at least one actuating arm, and a piezoelectric stack affixed between the fixed supporting member and movable supporting member. Also disclosed is a method for fabricating a nano piezoelectric actuator from silicon and preloading the nano actuator with a piezoelectric stack.

Abstract: A smart material actuator having a fixed supporting member, mechanical web, actuating arm, and piezoelectric or smart material stack is disclosed, together with a sensor adapted to indicate the degree of motion of the actuating arms and controller adapted to allow safe operation of the actuator in resonant conditions. Methods of maintaining resonant operation, avoiding resonant operation, and adjusting resonant frequencies are also disclosed.

Abstract: A smart material actuator comprising a mechanical amplifier with a fixed supporting member, at least one mountable actuating arm, and mechanical web having at least one compliant member attached to the mountable arm and a movable supporting member. A piezoelectric stack is affixed between a first mounting surface on the fixed supporting member and a second mounting surface on the movable supporting member. With the fixed supporting member being substantially rigid, and the piezoelectric stack being affixed between the first mounting surface and the second mounting surface, which are substantially parallel, applying an appropriate electric potential to the piezoelectric stack will cause it to expand substantially without angular movement. The expansion urges the second mounting surface away from the first, thereby causing the compliant members of the mechanical web to flex, thereby moving the mountable actuating arm.

Abstract: A micro-scale, smart material actuator having an overall length smaller than 10 mm comprising a multilayer piezoelectric stack housed in a mechanical amplifier made up of a fixed supporting member, a movable supporting member connected to compliant links attached to one or more actuating arms such that, when a suitable electric current is applied to the piezoelectric stack, the resulting expansion is translated through the movable supporting member, thereby causing movement in the actuating arms A method of generating electricity from motion using such an actuator is also disclosed in which the actuating arms are connected to a source of mechanical motion and the piezoelectric stack is connected to an electrical load, whereby the mechanical motion causes the piezoelectric stack to generate electrical charge that is then discharged into the load.