Abstract: A thin-film scribing apparatus employing an optical device converts a low M2, Gaussian or pseudo-Gaussian beam into an inverted Gaussian beam. The all refractive optical device is such that it is not susceptible to either beam size or angular variations and exhibits very little loss of energy for the transformation process. The output can be configured for either single or dual-axis operation where the geometric shape of the beam is rectangular or square with steep edge intensity. The resulting rectangular beam requires less beam overlap and has very little shoulder in the intensity profile, providing high uniformity scribe features with greatly improved processing speeds.

Abstract: A thin-film scribing apparatus employing an optical device converts a low M2, Gaussian or pseudo-Gaussian beam into an inverted Gaussian beam. The all refractive optical device is such that it is not susceptible to either beam size or angular variations and exhibits very little loss of energy for the transformation process. The output can be configured for either single or dual-axis operation where the geometric shape of the beam is rectangular or square with steep edge intensity. The resulting rectangular beam requires less beam overlap and has very little shoulder in the intensity profile, providing high uniformity scribe features with greatly improved processing speeds.

Abstract: An apparatus for removing heavy metals from a thin film stack. A glass or plastic substrate has a front surface and a back surface and a heavy metal thin film is deposited on the back surface. A laser is provided for generating high density radiation. A scanning means directs the high density radiation through the substrate so that the high density radiation impinges upon the heavy metal thin film. The substrate is disposed in contacting relation to a flowing liquid and a liquid bath is provided for containing the flowing liquid and collecting heavy metal that is ablated by the high density radiation. The heavy metals are filtered from the liquid bath. The same parts can also remove heavy metals from both sides of a substrate or may be used to remove only peripheral edges of a thin film stack.

Abstract: A high precision refractive scanner includes a light source that generates a light beam, a lens pair including a stationary plano-concave lens and a movable plano-convex lens, a thin film-covered panel, and an F-theta lens that focuses the light beam that passes through the lens pair onto the panel. The plano-convex lens has an initial position where a first edge is in refracting relation to the light beam and a final position where a second edge is in refracting relation to the light beam. The plano-convex lens rotates about a pivot point that represents the origin of the respective radii of curvatures of both lenses with a nominal air gap between the two lenses. Rotation of the plano-convex lens causes the light beam to be refracted over a predetermined scan angle. A focal spot forms a scribe when it travels from a first to a second edge of the panel.