Abstract: A method for digital direct recording of an artwork representing electric connections of components on a substrate includes receiving data representing the artwork, analyzing the artwork representation to identify sections that are similar and sections that are unique and to identify locations of the components in the artwork, and dividing the artwork into modules corresponding to the identified sections, providing a set of unique modules and a set of redundant modules. The method also includes rasterizing each unique module to provide rasterized modules, dividing the rasterized modules into submodules, and receiving measurements representing positions of the components on the substrate.

Abstract: A device for measuring reference points in real time during lithographic printing includes a light source providing an exposure beam; a light modulator modulating the exposure beam according to an exposure pattern; a measurement system configured to measure a position of a number of alignment marks previously arranged on a substrate; and an exposure optical system comprising a control unit. The exposure optical system delivers the modulated exposure beam as an image provided by the light modulator onto the substrate. The exposure system control unit is configured to calculate the orientation of the substrate based on the position of the alignment marks and control the delivering of the modulated exposure beam relative to the calculated orientation of the substrate.

Abstract: A confocal microscope device for scanning a two-dimensional array of illumination beams over a target surface and scanning a corresponding two-dimensional array of emission beams stimulated by the array of illumination beams on to a sensor of an imaging device. The device comprises first scanning optics operable to scan the array of illumination beams over the target surface along a first axis and scan the array of emission beams over the sensor along the first axis.

Abstract: A device for measuring reference points in real time during lithographic printing includes a light source providing an exposure beam; a light modulator modulating the exposure beam according to an exposure pattern; a measurement system configured to measure a position of a number of alignment marks previously arranged on a substrate; and an exposure optical system comprising a control unit. The exposure optical system delivers the modulated exposure beam as an image provided by the light modulator onto the substrate. The exposure system control unit is configured to calculate the orientation of the substrate based on the position of the alignment marks and control the delivering of the modulated exposure beam relative to the calculated orientation of the substrate.

Abstract: A system for exposing a material with images includes an exposure table and an electronic light projector arranged above the exposure table. The system is adapted to project images towards a material arranged at the exposure table. The electronic light projector and the exposure table are configured to be moved relative to each other during exposure. The electronic light projector is connected to a projector control unit configured to provide a sequence of images to be exposed represented by image data and superimpose a static image pattern onto the edge sections of the images to be exposed, resulting in a sequence of combined images. The width of the static image pattern is slimmer than the image to be exposed. The electronic light projector is configured to expose the combined images sequentially onto the material.

Abstract: The invention relates to improving the spatial resolution of images captured using multi-beam scanning confocal imaging systems by developing the mechanisms required in a variety of multibeam confocal scanner formats that enable the data capture requirements of the prior art calculations to be met.

Abstract: According to a first embodiment the invention provides for increasing the throughput and reducing the striping due to imperfections in the microlens and/or confocal aperture arrays of a Laser Confocal Scanning Microscope by increasing the number of repeat patterns in the microlens and confocal aperture arrays to more than one, and incorporating an intensity modulation function that ensures constant integrated image intensities at the image detector independent of the instantaneous speed of scanning. According to a second embodiment the invention provides for reducing the striping in a Laser Confocal Scanning Microscope by introducing a second galvanometer mirror such that the emitted laser light beam is descanned at the image (sample) plane.

Abstract: According to a first embodiment the invention provides for increasing the throughput and reducing the striping due to imperfections in the microlens and/or confocal aperture arrays of a Laser Confocal Scanning Microscope by increasing the number of repeat patterns in the microlens and confocal aperture arrays to more than one, and incorporating an intensity modulation function that ensures constant integrated image intensities at the image detector independent of the instantaneous speed of scanning. According to a second embodiment the invention provides for reducing the striping in a Laser Confocal Scanning Microscope by introducing a second galvanometer mirror such that the emitted laser light beam is descanned at the image (sample) plane.

Abstract: According to a first embodiment the invention provides, for achieving fast multi-wavelength scanning in an acousto-optical deflector based confocal scanning microscope, dynamically adjusting an optical path of said an acousto-optical deflector based confocal microscope by mechanical means in accordance with a selected wavelength of a laser light beam, to compensate for astigmatism and collimation changes due to the change in input beam wavelength and modifying detected images of an object by electronic means to maintain alignment of the scan lines of the image at all wavelengths. According to a second embodiment the invention provides, for achieving fast multi-wavelength scanning in an acousto-optical deflector based laser confocal scanning microscope, dynamically adjusting drive parameters of the acousto-optical deflector in accordance with the selected wavelength of the input laser light beams, to maintain alignment of the scan lines of the image at all wavelengths.

Abstract: A light source device for illuminating microdisplay devices, e.g. a DMD, LCOS, LCD, GLV, etc. comprises a housing having a specularly and/or diffusely light reflective interior surface and an exit aperture adapted to the shape and size of the microdisplay device, wherein the housing defines a cavity, at least one light emitting device mounted on or in wall(s) of the housing, for emitting light into the cavity, electrical power supply unit(s) and control electronic unit(s) for controlling the light emitting device(s). The device may also comprise an optical component in the cavity, e.g. a lens in the light path for obtaining even more output efficiency of the device.

Abstract: An optical image separation system, connected to a confocal image output port of a Nipkow disk type confocal scanner, wherein light returned from a sample and emitted from the confocal image output port is separated into a plurality of different wavelen regions, respectively, so that a plurality of samples emitting different wavelenghts are concurrently detected.