Patents Assigned to VLSI Technologies
  • Patent number: 6242805
    Abstract: A method of using polish stop film to control dishing during copper chemical mechanical polishing. In one embodiment, the method comprises several steps. One step involves depositing a polish stop layer above a metal layer disposed on a semiconductor wafer. Another step involves placing the semiconductor wafer onto a polishing pad of a chemical mechanical polishing machine. A further step involves removing the metal layer of the semiconductor wafer and also preferentially removing the polish stop layer using a chemical mechanical polishing process. The benefit of the polish stop layer is to prevent dishing of the metal layer within the trench. Another step involves ceasing the chemical mechanical polishing process when the metal layer is removed from desired areas of the semiconductor wafer and the semiconductor wafer is substantially planar.
    Type: Grant
    Filed: November 8, 1999
    Date of Patent: June 5, 2001
    Assignee: VLSI Technology, Inc.
    Inventor: Milind Weling
  • Patent number: 6243653
    Abstract: Computer-implemented methods and apparatus for extracting and computing parasitic capacitance values and capacitances respectively, from a physical design of an integrated circuit are described. In one embodiment, the physical design comprises a plurality of layered conductors which are disposed within a first dielectric material. At least one conductor of the plurality of conductors is identified, and for the identified conductor, the first dielectric material is replaced for calculational purposes with a second (fictitious) dielectric material having a dielectric constant which is higher than the dielectric constant of the replaced dielectric material. In general, the second dielectric may have a different dielectric constant for each identified layer or elevation. Parasitic capacitance values are then computed for the integrated circuit. In a preferred embodiment, spaced-apart conductors at a common substrate elevation are identified, and a distance between the conductors is determined.
    Type: Grant
    Filed: August 17, 1998
    Date of Patent: June 5, 2001
    Assignee: VLSI Technology, Inc.
    Inventor: Paul R. Findley
  • Patent number: 6233632
    Abstract: A system and method for eliminating unnecessary data transfers (e.g., null data phase transfers) in a computer system. The computer system comprises a bus, a target device coupled to the bus, and an initiator device coupled to the bus. The initiator device is adapted to transfer a data byte and a signal corresponding to the data byte over the bus to the target device, wherein the signal is equal to a first value to indicate that the target device is to accept the data byte and the signal is equal to a second value to indicate that the target device is to disregard the data byte. The initiator device is further adapted to decode the signal for each of a plurality of data bytes. The initiator device withholds transferring a subset of the data bytes to the target device when the signal corresponding to each of the data bytes in the subset is equal to the second value, thereby eliminating unnecessary data transfers.
    Type: Grant
    Filed: January 7, 1999
    Date of Patent: May 15, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Subramanian S. Meiyappan, Peter Chambers
  • Patent number: 6233257
    Abstract: A method and system that enables an automatic delay setting within a wireless local loop system. The present invention determines the transmission distance time delay existing between a base station and a personal station by employing the communication interface that is utilized between them. The main reason for determining the transmission time delay caused by large transmission distances (e.g., over 300 meters) existing between base stations and personal stations is to compensate for it. Once the transmission distance time delay is known, the personal station utilizes that value to compensate for it. Specifically, the present invention directs a base station to transmit a control signal to a personal station. The personal station receives the control signal and transmits a signal to the base station. The base station determines if it started to receive the signal from the personal station later than it expected the signal to arrive, assuming close proximity of the two stations.
    Type: Grant
    Filed: October 3, 1997
    Date of Patent: May 15, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Satoshi Yoshida, Patrick Feyfant, Varenka Martin, Laurent Winckel, Philippe Gaglione, Oliver Weigelt, Denis Archambaud
  • Patent number: 6233723
    Abstract: The present invention provides stimuli generators, methods of analyzing a cell, methods of generating at least one stimuli, and methods of characterizing delay of a cell. One method of analyzing a cell in accordance with the invention includes providing a truth table which includes plural lines defining the logical behavior of a cell, the truth table comprising stimulus for application to the cell and output information generated by the cell responsive to applied stimulus; providing a preselected condition; and selectively extracting at least one stimuli from the truth table responsive to the preselected condition.
    Type: Grant
    Filed: August 28, 1997
    Date of Patent: May 15, 2001
    Assignee: VLSI Technology, Inc.
    Inventor: Olivier Pribetich
  • Patent number: 6232801
    Abstract: Comparators, memory devices, comparison methods and memory reading methods are provided. One aspect provides a comparator including an input stage having a data input adapted to receive a data voltage signal, a reference input adapted to receive a reference voltage signal, and a plurality of current sources individually coupled with one of the data input and the reference input and individually configured to convert one of the data voltage signal and the reference voltage signal to a differential current signal and to output the differential current signal; and a comparator stage including a plurality of inputs configured to receive the differential current signals from the input stage and the comparator stage being configured to compare the differential current signals and to output an output signal indicative of a comparison of the differential current signals.
    Type: Grant
    Filed: August 4, 1999
    Date of Patent: May 15, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Elie Georges Khoury, Richard W. Ulmer
  • Patent number: 6230216
    Abstract: A system and method for using single address cycles and eliminating dual address cycles to transmit a target address in a computer system. The computer system comprises a bus, a central processing unit coupled to the bus, an initiator device coupled to the bus, and a target device coupled to the bus. The target device comprises a first configuration register which is adapted to use a configuration bit to indicate an address range of the target device. The central processing unit interrogates the first configuration register and communicates the address range indicated by the configuration bit to the initiator device. The initiator device comprises a second configuration register which is adapted to use a configuration bit to register the address range of the target device.
    Type: Grant
    Filed: January 28, 1999
    Date of Patent: May 8, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Peter Chambers, Subramanian S. Meiyappan, Swaroop Adusumilli
  • Patent number: 6224460
    Abstract: A multi-platen chemical-mechanical polishing system is used to polish a wafer. The wafer is polished at a first station. During polishing, an endpoint is detected. The endpoint is detected by generating optical radiation by a first light source. The first optical radiation travels through a translucent area in a surface of a first platen and travels through a first polishing pad. After being reflected by the wafer, the optical radiation returns through the first polishing pad through the translucent window to a first optical radiation detector. The first polishing pad has a uniform surface in that no part of the surface of the first polishing pad includes transparent material through which non-scattered optical radiation originating from the first light source can pass and be detected by the first optical radiation detector. Optical radiation that travels through the first polishing pad and is detected by the first optical radiation detector is haze scattered by inclusions within the first polishing pad.
    Type: Grant
    Filed: June 30, 1999
    Date of Patent: May 1, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Samuel Vance Dunton, Yizhi Xiong
  • Patent number: 6226701
    Abstract: A method and system that enables real-time peripheral devices to be connected to a computer system utilizing Universal Serial Bus architecture. The present invention empowers the computer system to perform an accurate determination of the moment in time a predetermined event occurred within a real-time peripheral device by utilizing the start of frame pulse transmitted from a USB host controller to peripheral devices connected to it. When a predetermined event occurs within a peripheral device, a first timer within the peripheral device starts incrementing to determine the amount of time that elapses until the next start of frame occurs. Once the next start of frame occurs, the first timer stops incrementing and stores the time before start of frame value. Every start of frame pulse causes a second timer located within the USB host controller to start incrementing.
    Type: Grant
    Filed: September 21, 1999
    Date of Patent: May 1, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Peter Chambers, Lonnie Goff, David R. Evoy, Mark Hidson
  • Patent number: 6222260
    Abstract: A flat, thin decoupling capacitor is disposed inside an integrated circuit device in a coplanar relationship with a semiconductor chip and a bonding element. When connected to the power and ground plane of a device substrate or in a leadframe device, the decoupling capacitor is positioned close to the semiconductor chip to substantially reduce ground bounce and crosstalk from the semiconductor chip. When the decoupling capacitor is positioned to locate the semiconductor chip between itself and the device substrate or leadframe device, the decoupling capacitor shields electromagnetic interference from the semiconductor chip.
    Type: Grant
    Filed: May 7, 1998
    Date of Patent: April 24, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Dexin Liang, Ray Killorn
  • Patent number: 6223232
    Abstract: A target configuration prediction system that provides an initiator coupled to a bus system with a prediction of the configuration type of a target. The present invention stores information regarding the address and configuration of targets and utilizes this information to predict the address of a target an initiator is currently attempting to access. The prediction is based upon the proximity of stored target addresses to a target address an initiator is currently trying to access and the probability that targets with addresses within certain ranges are the same target configuration type. The configuration type is determined by initiator component logic during an initial attempt at accessing a target and a status bit indicating the configuration type is stored in a status bit component.
    Type: Grant
    Filed: February 22, 1999
    Date of Patent: April 24, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Swaroop Adusumilli, Subramanian S. Meiyappan
  • Patent number: 6222238
    Abstract: The present invention relates to a method and device for providing CMOS logic which can be operated at various operating voltages, without resulting in unbalanced operation of n-channel and p-channel CMOS transistors. In accordance with the present invention, CMOS circuitry can be provided that is operable over a range of voltages (e.g., a range from below 3 volts to a range over 5 volts) without producing unbalanced operation of n-channel and p-channel transistors. Thus, integrated circuits formed in accordance with the present invention can be operated at different voltage power sources without requiring a redesign or relay out of the integrated circuit. In accordance with the present invention, CMOS transistors can be fabricated without increased fabrication complexity to provide transistors which operate within a relatively safe region of their operating characteristics and which operate with a speed that is unaffected by the reduced voltage supply (i.e.
    Type: Grant
    Filed: July 2, 1997
    Date of Patent: April 24, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Kuang-Yeh Chang, Ramachandr A. Rao
  • Patent number: 6218303
    Abstract: Copper is the bulk interconnect metal in the manufacture of an integrated circuit in accordance with the damascene process. When copper is exposed through via apertures, carbon monoxide and hydrogen are used as reduction agents to convert black copper oxide to red copper oxide and the red copper oxide to copper. The integrated circuit is then transferred in a high vacuum to a sputter chamber so that re-oxidation does not occur before tantalum barrier metal can be deposited. As a result, a good tantalum-copper electrical contact can be made without risking embedding copper in oxide sidewalls (whence it could migrate to active circuit regions and impair device reliability).
    Type: Grant
    Filed: December 11, 1998
    Date of Patent: April 17, 2001
    Assignee: VLSI Technology, Inc.
    Inventor: Xi-Wei Lin
  • Patent number: 6214734
    Abstract: A method of using films having optimized optical properties for chemical mechanical polishing (CMP) endpoint detection. Specifically, one embodiment of the present invention includes a method for improving chemical mechanical polishing endpoint detection. The method comprises the step of depositing a dielectric layer over a reflectance stop layer. The reflectance stop layer is disposed above a component that is disposed on a semiconductor wafer. During a determination of the thickness of the dielectric layer using a reflected signal of light, the reflectance stop layer substantially reduces any light from reflecting off of the component. Therefore, the present invention provides a method and system that provides more accurate endpoint detection during a CMP process of semiconductor wafers. As a result of the present invention, an operator of a CMP machine knows precisely when to stop a CMP process of a semiconductor wafer.
    Type: Grant
    Filed: November 20, 1998
    Date of Patent: April 10, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Subhas Bothra, Milind G. Weling
  • Patent number: 6211087
    Abstract: A primary layer deposited over a secondary layer is planarized. A chemical mechanical polishing process is performed using a slurry which targets the primary layer. Then, chemical etching is performed using a chemical wet etchant which targets the secondary layer. The method is used, for example, when making connections to a lower layer through an insulating layer. Plug holes are formed through the insulating layer to the lower layer. Then the secondary layer is deposited. The secondary layer acts as a barrier layer or a glue layer.
    Type: Grant
    Filed: June 29, 1998
    Date of Patent: April 3, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Calvin Gabriel, Milind Weling
  • Patent number: 6211045
    Abstract: A method is presented in which nitrogen-based gas in incorporated in polysilicon gate re-oxidation to improve hot carrier performance. A gate oxide layer is formed. Gate material is deposited on the gate oxide layer. The gate material is etched to form a gate structure. The gate oxide layer and the gate are re-oxidized. During re-oxidation, nitrogen-based gas is introduced to nitridize re-oxidized portions of the gate oxide layer.
    Type: Grant
    Filed: November 30, 1999
    Date of Patent: April 3, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Victor Liang, Mark Rubin, Bijan Moslehi
  • Patent number: 6212633
    Abstract: A distributed firewall is utilized in conjunction with a memory-mapped serial communications interface such as that defined by the IEEE 1394 specification to permit secure data transmission between selected nodes over the interface. The distributed firewall incorporates security managers in the selected nodes that are respectively configured to control access to their associated nodes, thereby restricting access to such nodes to only authorized entities. Furthermore, encrypted transmissions may be supported to restrict unauthorized viewing of data transmitted between the selected nodes over the interface. Implementation of the distributed firewall does not modify any critical specifications for the memory-mapped communications interface that would prevent the selected nodes from residing on the same interface as other nodes that adhere to such specifications but that do not support secure data transmission.
    Type: Grant
    Filed: June 26, 1998
    Date of Patent: April 3, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Paul S. Levy, Steve Cornelius
  • Patent number: 6212205
    Abstract: The present invention provides a method of generating a data stream comprising: generating a first slot having a first data field; generating a second slot; and providing the second slot within the first data field of the first slot. The present invention additionally provides methods of validating an integrated circuit and communicating a data stream.
    Type: Grant
    Filed: February 25, 1997
    Date of Patent: April 3, 2001
    Assignee: VLSI Technology, Inc.
    Inventor: Michel Eftimakis
  • Patent number: 6207543
    Abstract: A process for making an integrated circuit is disclosed. This technique includes electrically interconnecting a pair of adjacent transistors positioned along a semiconductor substrate by coating with an oxide layer, planarizing the layer, then forming a trench exposing a contact region for each transistor. This trench is filled with a metal, such as tungsten to provide an electrical interconnection of the contact regions. The metal is then planarized to be approximately coplanar with the planarized oxide layer. Metal gate electrodes are formed at the same time as the interconnection. Additional processing includes depositing an IMO layer over the planarized metal and oxide and defining additional interconnections through the IMO layer.
    Type: Grant
    Filed: June 30, 1997
    Date of Patent: March 27, 2001
    Assignee: VLSI Technology, Inc.
    Inventors: Ian Robert Harvey, Xi-Wei Lin
  • Patent number: 6208172
    Abstract: A circuit monitor performance of an integrated circuit. The circuit includes a clock signal and a phase delay detection circuit. The clock signal is used by the integrated circuit to generate an output signal on an output pin of the integrated circuit. The phase delay detection circuit detects relative phase difference between the clock signal and the output signal on the output pin of the integrated circuit. The phase delay detection circuit includes a digital signal generator and an integrator. The digital signal generator is connected to an output pin of the integrated circuit. The digital signal generator generates a digital signal. Changes in phase delay between the output signal on the output pin of the integrated circuit and the clock signal used by the integrated circuit are encoded in a duty cycle of the digital signal generated by the digital signal generator. The integrator is connected to the digital signal generator and integrates the digital signal to produce an integrated signal.
    Type: Grant
    Filed: January 13, 1995
    Date of Patent: March 27, 2001
    Assignee: VLSI, Technology, Inc.
    Inventors: David R. Evoy, Nicholas J. Richardson