Patents Assigned to VMICRO SAS
  • Patent number: 11761884
    Abstract: An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer.
    Type: Grant
    Filed: January 27, 2020
    Date of Patent: September 19, 2023
    Assignees: VMICRO SAS, UNIVERSITEIT GENT, CNRS
    Inventors: Bart Kuyken, Mathias Vanwolleghem, Mattias Verstuyft, Benjamin Walter, Jean-Francois Lampin