Abstract: A liquid target producing device to which multiple capillary tubes are mountable includes a capillary tube for injecting a liquid target in a jet form; a gas storage tank connected to the capillary tube through a gas line to store a gas to be supplied to the capillary tube; a metal jacket positioned at an outer circumference of the capillary tube such that a plurality of capillary tubes are installable thereto, the metal jacket liquefying the gas supplied through the gas line; a cryo-cooler connected to the metal jacket through a thermal conductive wire to cool the metal jacket; and a moving means for moving the metal jacket so as to set an initial position of the capillary tube.
Type:
Grant
Filed:
August 28, 2008
Date of Patent:
March 12, 2013
Assignees:
VMT Co., Ltd, Potech Academy-Industry Foundation
Inventors:
Byung-Nam Ahn, Dong-Eon Kim, Jin-Gon Kim, Jae-Sik Son, Dong-Su Kim