Patents Assigned to VON ARDENNE ANLAGENTECHNIK
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Patent number: 8605292Abstract: A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.Type: GrantFiled: March 28, 2011Date of Patent: December 10, 2013Assignee: VON ARDENNE Anlagentechnik GmbHInventors: Damir Muchamedjarow, Hubertus Von Der Waydbrink, Michael Hentschel, Marco Kenne, Reinhardt Bauer, Steffen Leβmann, Thomas Bock, Reinhard Jaeger
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Publication number: 20130299346Abstract: A sputtering device with a tubular target, includes a holding device with a supporting shaft having a shaft flange connected to the target tube detachably and in a water-tight manner by a clamping device. The end of the target tube facing the shaft flange of the supporting shaft is flangeless and a spacer ring is arranged detachably on the outer side of the tube in a predetermined position. The spacer ring is held by a form-fitting connection at a minimum distance from the end of the target tube. The clamping device includes the shaft flange of the supporting shaft, the spacer ring and a clamping ring which engages over the shaft flange and the spacer ring and comprises at least two pieces. At least one sealing element is arranged between the outer side and/or the end side of the target tube, and an opposite sealing face of the shaft flange.Type: ApplicationFiled: August 24, 2011Publication date: November 14, 2013Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Armin Huebner, Hans-Juergen Heinrich
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Publication number: 20130295707Abstract: In a method for producing an organic light emitting illuminant, a base electrode layer is formed over a substrate, an organic light emitting layer is formed over at least one portion of the base electrode layer, and a top electrode layer is formed over at least one portion of the organic light emitting layer, the layers being formed in the shape of strips. The strip-shaped formation of the layers is carried out in a coating process in an in-line vacuum coating system having stationary shadowing masks on the advancing substrate such that at least one area of the base electrode layer remains uncoated once the layers have been formed.Type: ApplicationFiled: December 7, 2011Publication date: November 7, 2013Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Carsten Deus, Joerk Richter, Ruben Seifert, Lutz Gottsmann
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Patent number: 8563084Abstract: A process and a device for coating substrates with a stoichiometric gradient in an in-line coating system include at least two evaporation devices, each with an evaporator tube. The evaporator tubes are implemented so as to be tiltable independently of one another, whereby the transition area of the two vapor lobes can be adapted to the requirements of the gradient profile. Furthermore, the spacing of the evaporator tubes from the substrate and each other can be set.Type: GrantFiled: August 24, 2010Date of Patent: October 22, 2013Assignee: VON ARDENNE Anlagentechnik GmbHInventors: Harald Gross, Carsten Deus
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Publication number: 20130273678Abstract: A coating device for producing an organic light-emitting illuminant comprising mutually adjacent regions having in each case different emission colors, includes a vacuum chamber, a device for linearly transporting a substrate, and a plurality of coating sources and diaphragms, provides OLED structures which have an improved intensity of the light emission. The thicknesses of the hole transport, emission and electron transport layers in the mutually adjacent regions differ and are in each case set such that an optimum coupling-out for the light color emitted in the corresponding region is achievable.Type: ApplicationFiled: December 7, 2011Publication date: October 17, 2013Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Carsten Deus, Joerk Richter, Ruben Seifert
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Patent number: 8506773Abstract: A drive end block for a magnetron arrangement with a rotating target, comprises an end block housing having a rotatably mounted drive shaft. The drive shaft is arranged in the end block housing, accessible at an end from outside of the end block housing for connection to the rotating target, and adapted at its end inside the end block housing for introduction of a torque. An electric motor with a stator and a rotor for creating the torque is arranged inside the end block housing.Type: GrantFiled: July 17, 2009Date of Patent: August 13, 2013Assignee: VON ARDENNE Anlagentechnik GmbHInventors: Hans-Juergen Heinrich, Sven Haehne
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Patent number: 8470094Abstract: Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.Type: GrantFiled: November 10, 2011Date of Patent: June 25, 2013Assignee: VON ARDENNE Anlagentechnik GmBHInventors: Hubertus Von Der Waydbrink, Siegfried Scheibe, Jens Meyer, Andrej Wolf, Uwe Traeber, Michael Hentschel
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Publication number: 20130139750Abstract: A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first sub-module, is arranged in a first module and provided with an outer interface which is the same for at least a second module.Type: ApplicationFiled: June 14, 2011Publication date: June 6, 2013Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Matthias Smolke, Matthias Klooss, Andrej Wolf, Johannes Struempfel
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Patent number: 8377578Abstract: An infrared radiation reflecting transparent layer system on a transparent substrate and a method for producing same is provided. The infrared radiation reflecting layer system comprises an infrared radiation reflecting layer sequence which includes a selective function usually consisting of a noble metal, mostly silver, or an alloy thereof and having a good selective reflectivity in the infrared range. The layer sequence is supplemented by at least one transparent dielectric layer of an oxynitride of a metal, a semiconductor or a semiconductor alloy having a low to moderate refractive index arranged directly on the substrate or above the infrared radiation reflecting layer sequence.Type: GrantFiled: January 12, 2012Date of Patent: February 19, 2013Assignee: Von Ardenne Anlagentechnik GmbHInventors: Christoph Koeckert, Holger Proehl, Falk Milde
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Patent number: 8367226Abstract: A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.Type: GrantFiled: July 23, 2010Date of Patent: February 5, 2013Assignee: Von Ardenne Anlagentechnik GmbHInventors: Joerg Fiukowski, Matthias List, Hans-Christian Hecht, Falk Milde
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Patent number: 8337681Abstract: To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attachment surface for attaching the end block on a support apparatus, a pivot bearing for rotatable mounting of the rotating target, and at least one current conduction apparatus which conducts current through the end block housing in operation of the end block. The end block housing is implemented so that each current path in the end block housing which encloses the current conduction apparatus has an interruption at least one point.Type: GrantFiled: November 18, 2009Date of Patent: December 25, 2012Assignee: Von Ardenne Anlagentechnik GMGHInventors: Hans-Juergen Heinrich, Ulf Seyfert, Goetz Teschner
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Publication number: 20120299247Abstract: A sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element, includes at least two sealing elements disposed in tandem in the axial direction of the machine element. Inner sides of the sealing elements are configured for forming an active sealing connection with the rotating machine element. At least one of the sealing elements can be pressurized with an additional force acting in the radial direction so that the force of compression acting on the rotating machine element for the at least one of the sealing elements can be adjusted relative to the force of compression acting on the rotating machine element due to at least one other sealing element.Type: ApplicationFiled: July 30, 2012Publication date: November 29, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hans-Juergen Heinrich, Ulf Seyfert, Peter Botzler
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Publication number: 20120292289Abstract: A transport cylinder for the vacuum treatment of substrates includes a roll body and at least one spacer element arranged on the roll body and enveloping the roll body. The spacer element is made of a knitted tube containing metallic or/and metallic threads.Type: ApplicationFiled: May 17, 2012Publication date: November 22, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Steffen MOSSHAMMER, Reinhardt BAUER, Thomas MEYER, Matthias SMOLKE, Michael HOFMANN, Torsten DSAAK
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Publication number: 20120281975Abstract: A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.Type: ApplicationFiled: August 23, 2010Publication date: November 8, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Michael Hentschel, Thomas Meyer, Hubertus Von Der Waydbrink, Marco Kenne, Daniel Stange, Hans-Christian Hecht
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Publication number: 20120263885Abstract: In method for the manufacture of a reflective layer system on a substrate with at least one metallic reflective layer, a dielectric, transparent layer is deposited on the substrate as a silicon oxide containing layer using a suitable PVD process. The coated substrate subsequently is transferred out of the vacuum and at least one metallic reflective layer is deposited via a wet-chemical process.Type: ApplicationFiled: April 11, 2012Publication date: October 18, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Christoph KOECKERT, Markus BERENDT
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Patent number: 8277890Abstract: The transporting device according to the invention, in particular for transporting sheet-like substrates through a coating installation, comprises transporting rollers which are rotatably mounted on both sides and horizontally arranged transversely in relation to the transporting direction, the uppermost surface lines of the transporting rollers defining the transporting plane, and is characterized in that the end parts of the transporting rollers have a smaller diameter than the middle part of the transporting rollers and in that baffles which are mounted displaceably in the axial direction of the transporting rollers between a first position and a second position are arranged between the end parts of the transporting rollers and the transporting plane. The fact that the baffles are mounted in an axially displaceable manner has the effect of considerably extending the cleaning intervals of the transporting device.Type: GrantFiled: April 7, 2006Date of Patent: October 2, 2012Assignees: First Solar, Inc., Von Ardenne Anlagentechnik GmbHInventors: Hubertus Von Der Waydbrink, Georg Laimer, Siegfried Scheibe, Ricky C. Powell, James Ernest Hinkle, James B. Foote
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Patent number: 8257500Abstract: In a transport device for elongated substrates, especially in hot processes, which includes an essentially rectangular frame, formed by longitudinal and transverse spars connected to each other, in which at least three transverse spars are provided between two longitudinal spars, at least one transverse spar is made from a material, whose heat expansion coefficient differs from the heat expansion coefficient of the material of the other transverse spars or/and at least one transverse spar is connected force-free to at least one transverse support or/and at least one transverse spar is formed from an open profile.Type: GrantFiled: October 8, 2008Date of Patent: September 4, 2012Assignee: Von Ardenne Anlagentechnik GmbHInventors: Johannes Struempfel, Reinhardt Bauer, Andreas Heisig, Andre Ulbricht, Steffen Goerke, Heiko Richter, Falk Schwerdtfeger
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Patent number: 8259294Abstract: A method and device are provided for measurement of various transmission and reflection values of transparent measurement objects having transparent layers in an inline coating system, and particularly the turbidity of the measurement object during a relative movement between the measurement object and measuring device. Transmission fractions are measured in two different radiation directions of a lighting source emitting diffuse light by two photodetectors, by which a fraction of diffuse light of the lighting source is suppressed in one direction.Type: GrantFiled: August 11, 2010Date of Patent: September 4, 2012Assignee: Von Ardenne Anlagentechnik GmbHInventors: Holger Proehl, Thomas Knoth, Tina Schoessler, Martin Dimer
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Publication number: 20120204791Abstract: An apparatus for transporting strip-like material, has a treatment roller and at least one transporting or strip-gliding roller. The at least one transporting or strip-guiding roller is arranged upstream or downstream of the treatment roller, and comprises a twisting roller having an axis of rotation which encloses an angle other than 0° in relation to an axis of rotation of the treatment roller. The twisting roller rotates the course taken by the strip-like material in relation to the course defined by the surface of the treatment roller.Type: ApplicationFiled: September 7, 2010Publication date: August 16, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Harald Gross, Carsten Deus, Falk Otto, Lutz Gottsmann, Manfred Kammer
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Patent number: 8240462Abstract: The transport device especially for transporting flat substrates through a coating installation comprises a plurality of transporting rolls, which are arranged transversely in relation to the transporting direction, and supporting rolls are also provided.Type: GrantFiled: January 11, 2011Date of Patent: August 14, 2012Assignees: First Solar, Inc., Von Ardenne Anlagentechnik GmbHInventors: Michael Hentschel, Steffen Lessmann, Michael Huhn, Reinhard Jaeger, Ricky C. Powell