Abstract: Method for the production of dislocation-free, monocrystalline semiconduc rods with large diameters by crucible-free zone melting, which comprises producing the melting zone in a uniform electromagnetic field substantially symmetrical to the rod axis. The invention also relates to an induction heating coil for carrying out the method.
Type:
Grant
Filed:
August 17, 1976
Date of Patent:
August 22, 1978
Assignee:
Wacker-Chemitronik Gesellschaft fur Elektronik-Grundstoffe mbH