Abstract: A single body injector for delivering gases to a surface. The injector includes a single elongated block with one or more passages formed in the block and communicating with a gas delivery surface via thin channels which extend between the passages and the gas delivery surface. Metering tubes may be placed in the passages to control the profile of the gases delivered.
Type:
Grant
Filed:
March 22, 1996
Date of Patent:
November 4, 1997
Assignee:
Watkins-Johnson Co.
Inventors:
Jay B. DeDontney, Nicholas M. Gralenski, Adam Q. Miller
Abstract: A method for fabricating a semiconductor diode array, utilizing an alignment tool to precisely position a plurality of diodes so that they can be bonded into a precision array. The alignment tool and a method for fabricating the tool are also disclosed.