Abstract: A method is disclosed for deburring components or workpieces (7) with ultrasound by using at least one sonotrode (6), having the following method steps: a) supplying at least one ultrasonic transducer (4) with electrical energy by at least one ultrasound generator (2) so that the ultrasonic transducer (4) is caused to vibrate mechanically; b) transmitting the vibrations to the sonotrode (6) that is mechanically connected to the ultrasonic transducer (4); c) immersing the sonotrode (6) with at least one vibrating sonotrode surface (6?) into a fluid (M) so that cavitation is generated in the fluid (M) in an area of this sonotrode surface (6?) by the mechanical vibrations of the sonotrode (6); d) arranging a workpiece (7) to be deburred in the vicinity of this sonotrode surface (6?) by which the workpiece (7) is deburred on at least one point, side, or surface opposite the sonotrode surface (6?). Furthermore, a device is disclosed for deburring components or workpieces (7) using ultrasound.