Patents Assigned to WELL AND SHINE PRECISION CO., LTD.
  • Patent number: 11094514
    Abstract: A rotatable sputtering target has a target material, a back tube and a joint piece. The joint piece is disposed between the target material and the back tube. The joint piece has a compressible structure and an electrically and thermally conductive adhesive. Particularly, the compressible structure being a compressible blanket or a compressible sheet has multiple through holes and thus the electrically and thermally conductive adhesive is filled in the through holes and then directly formed between the target material and the back tube. Using the joint piece to joint the target material and the back tube not only maintains the joint strength but also elevates the tolerable power of the rotatable sputtering target, which can increase the sputtering efficiency.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: August 17, 2021
    Assignees: OUMEIDA APPLIED MATERIALS TECHNOLOGY CO., LTD., WELL AND SHINE PRECISION CO., LTD.
    Inventor: I-Sheng Wu