Abstract: Apparatus and methods in accordance with implementations of the present invention can be configured for cleaning at least one process chamber, which in turn is configured for coating at least one substrate. In general, the at least one substrate will be made from glass, and the at least one process chamber can be purged with a conditioned purge gas prior to a coating operation.
Abstract: A cleaning apparatus (1), to clean a conveyor belt (3) curving in its main plane, comprises a cleaning drum (9) of which the diameter at its end (9i) adjacent to the belt's inner edge (3i) is smaller than its diameter at its end (9a) adjacent to the outer edge (3a).
Type:
Grant
Filed:
March 30, 2000
Date of Patent:
March 6, 2001
Assignee:
Wiessner GmbH
Inventors:
Franz Kilgert, Jürgen Fichtel, Hans Widmer