Abstract: The design and structure of a physiological fluid collection bag with instant data transmission utilizing micromachined thermal time-of-flight flow sensing device as well as integrated pH value and density sensors for simultaneous and continuous measurement of the instant volumetric flow rate, accumulated total volume, pH value and density or specific gravity data of the collected fluid is disclosed in embodiments. The fluid collection bag includes a collection chamber and storage chamber wherein the sensing and measurement module is installed inside the storage chamber of the bag, for which it can be fully disposable. The fluid collection bag is able to metering the flow rate and instantly relay the data to the reusable data processing unit that can transmit the data to the designated data center or to the specified medical staffs.

Abstract: The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

Abstract: The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.

Abstract: The design and structure as well as the control scheme of a smart electronic vaporizer device having a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and control electronics that provide the vaporizing process in proportional to the user inhalation flowrate or strength for the best simulation of the experience for traditional cigarette. The device further incorporates a MEMS gas composition sensor that is coupled with the mass flow sensor to measure the user's respiratory health data, including but not limited to asthma status and metabolism related respiratory exchange rate. The device is further capable to relay the data to the designated mobile device and further to the designated cloud for big data process and sharing.

Abstract: The design and assembly of a smart device constituent of a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and an electrically controllable valve for applications in safety enhancement and intermit connectivity for residential or commercial gas range is disclosed in the present invention. The said smart device detects the gas flow at the unattended situations and sends information to the destined mobile devices of the use via the network such that it enables the users to remotely execute actions of either shutting off the gas supply or call for relevant party's immediate attention. The said smart device shall also automatically shut off the gas supply should the transmitted signal to users failed to send feedback signal such that it can prevent the safety incidents due to leakage or overheating or even fires.

Abstract: The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.

Abstract: The design and manufacture method of a silicon mass flow sensor made with silicon Micromachining MEMS, Micro Electro Mechanical Systems) process for applications of gas flow measurement with highly humidified or liquid vapors is disclosed in the present invention. The said silicon mass flow sensor operates with an embedded heater and an adjacent control temperature sensor beneath the integrated calorimetric and thermal dissipative sensing thermistors. When the condensation takes place at the surface of the said silicon mass flow sensor, the embedded heater shall be turned on to elevate the temperature of the supporting membrane or substrate for the sensing thermistors. The elevated temperature shall be adjusted to above the vaporization temperature with the feedback data of the adjacent temperature sensor such that the surface condensation due to the presence of the liquid vapors in a gas flow can be effectively eliminated.

Abstract: This invention relates to a micromachined ESD protection device and its microfabrication method for light emitting diode (LEDs) chips. The LEDs is coupled to the ESD protection device in a shunt connection to absorb and eliminate the electrostatic charges induced by human contact or other voltage spike sources. The ESD protection circuit can prevent the LED from burning down and extend its lifespan. By using a thick polyimide layer as the dielectric film for capacitors in the micromachined ESD protection device at the current invention has the advantages with high breakdown voltage compared to other ESD protection circuits. And furthermore, the device in the current invention is easy for mass production with low manufacturing cost. Another embodiment of the present invention is that the multiple-array arrangement in current micromachined ESD protection device could greatly enhance the liability due to multiple-protection and thus to provide the possibility of multiple-times usage.