Abstract: Proposed are a vertical MEMS probe having a tethering structure and a manufacturing method thereof. The probe includes a pin including a contact portion that contacts at least one of two ends thereof and an elastic portion that withstands a contact load applied to the contact portion by an elastic restoring force between the two ends, a housing having a penetration portion that exposes the contact portion to an outside, and configured to cover the elastic portion, and a tether configured to connect the contact portion and the housing or the elastic portion and the housing, wherein a first connection portion between the contact portion or the elastic portion and the housing, a second connection portion between the housing and the tether, or the tether may be separated.

Abstract: Provided is a scanning micromirror including a reflective surface rotatable with respect to a rotation axis, a rim disposed on the outside of the reflective surface, a spring positioned on the rotation axis and connected to the reflective surface, and a connector connecting the reflective surface and the rim. The rim may include a first sub-rim disposed on one side and a second sub-rim disposed on the other side with respect to the spring.

Abstract: Disclosed is a hydrogen sensor having an integrated structure, the sensor being usable even in poor conditions, having a greatly reduced volume, minimizing the influence of humidity, and facilitating mass production thereof at low cost.

Abstract: A contactor for connection and signal transfer between conductors includes: a core part configured to extend in a longitudinal direction, contain a conductive particle and be formed to be elastically deformable; an insulation part configured to surround a transverse surface of the core part and be formed to be elastically deformable; and a shield part configured to surround a transverse surface of the insulation part to be spaced apart from the core part, contain a conductive particle and be formed to be elastically deformable.

Abstract: A flexible contactor that electrically connects a pad of an inspection target object with a pad of an inspection device includes, a first elastic part configured to contain a first conductive particle and be formed elastically deformable; and a second elastic part, which is connected in parallel to the first elastic part in a longitudinal direction, configured to contain a second conductive particle and be formed elastically deformable. The first elastic part and the second elastic part are different from each other in at least one of physical properties including hardness, Young's modulus, and resistivity.