Abstract: A Mueller-matrix microscope, including: a polarizing unit and an analyzing unit. The polarizing unit is configured to modulate a light beam emitted from an external light source module to yield a polarized light beam, and then to project the polarized light beam on the surface of a sample to be measured. The analyzing unit is configured to analyze the polarization state of a light beam reflected from the surface of the sample, to acquire information of the sample. The analyzing unit includes a polarization state analyzer (PSA) and a backside reflection suppression (BRS) unit. The PSA unit is configured to demodulate the polarization state of the light beam; and the BRS unit is configured to suppress the backside reflections from transparent substrate.
Type:
Grant
Filed:
April 13, 2017
Date of Patent:
July 9, 2019
Assignee:
WUHAN EOPTICS TECHNOLOGY CO., LTD.
Inventors:
Xiuguo Chen, Jun Chen, Chao Chen, Shiyuan Liu