Abstract: A nanoscale positioning apparatus with a large stroke and multiple degrees of freedom and a control method thereof are provided. The nanoscale positioning apparatus includes a base, a plurality of parallel branch chain mechanisms and a working table. Each of the parallel branch chain mechanisms includes an electric cylinder, a micro-motion drive mechanism, a laser interferometer, a grating measuring device, a self-locking upper hinge and a self-locking lower hinge. The top of the base is connected to one end of the electric cylinder through the self-locking lower hinge. The other end of the electric cylinder is connected to one end of the micro-motion drive mechanism. The other end of the micro-motion drive mechanism is connected to the bottom of the working table through the self-locking upper hinge. The positioning apparatus has multiple degrees of freedom, and realizes multi-degree-of-freedom arbitrary position adjustment of the working table through parallel branch chain mechanisms.

Abstract: A nanoscale positioning apparatus with a large stroke and multiple degrees of freedom and a control method thereof are provided. The nanoscale positioning apparatus includes a base, a plurality of parallel branch chain mechanisms and a working table. Each of the parallel branch chain mechanisms includes an electric cylinder, a micro-motion drive mechanism, a laser interferometer, a grating measuring device, a self-locking upper hinge and a self-locking lower hinge. The top of the base is connected to one end of the electric cylinder through the self-locking lower hinge. The other end of the electric cylinder is connected to one end of the micro-motion drive mechanism. The other end of the micro-motion drive mechanism is connected to the bottom of the working table through the self-locking upper hinge. The positioning apparatus has multiple degrees of freedom, and realizes multi-degree-of-freedom arbitrary position adjustment of the working table through parallel branch chain mechanisms.