Abstract: The invention provides an automatic system and method using x-ray inspection to image arrays of electrical interconnections on electronic devices. The electron beam of a rotating anode X-ray tube is deflected relative to the anode to cause emission of x-rays from different regions of the anode at different times. The x-ray tube is located at an inspection station for the electronic devices and disposed to irradiate a first part of the array of interconnections with x-rays emitted from a first region of the anode and to irradiate a further part of the array of interconnections with x-rays emitted from another region of the anode. X-rays emerging from the array of interconnections are detected and used to image part at least of the array in order to automatically register interconnection integrity failures and/or detect a performance trend in the formation of the connections.

Abstract: The invention provides an automatic system and method using x-ray inspection to image arrays of electrical interconnections on electronic devices. The electron beam of a rotating anode X-ray tube is deflected relative to the anode to cause emission of x-rays from different regions of the anode at different times. The x-ray tube is located at an inspection station for the electronic devices and disposed to irradiate a first part of the array of interconnections with x-rays emitted from a first region of the anode and to irradiate a further part of the array of interconnections with x-rays emitted from another region of the anode. X-rays emerging from the array of interconnections are detected and used to image part at least of the array in order to automatically register interconnection integrity failures and/or detect a performance trend in the formation of the connections.

Abstract: A compact X-ray source is disclosed, improving controllability and insulation from unwanted high voltage effects. In one aspect, an active variable conductance device (130, 330) connected in series with the cathode is used in a closed loop, feedback arrangement to control the cathode beam current; the current flowing through the device to the cathode being directly sensed and compared with a desired current level. The result of the comparison is used to control the conductance of the device, thereby directly influencing the cathode current. A second aspect provides an extension of a Faraday cage, whereby the secondary winding of a transformer used to supply power to components within the cage is shielded within a coaxial, tubular member connected to the cage and extending outwardly from it.