Abstract: A probe head comprising of pogo pins and a slot for accepting a probe board is provided. The pogo pin has a spring-loaded rotating ball at its apex which allows for smooth sliding of a probe board into the slot. The probe board houses a probe chip with a single or multiple integrated probes. The probes are used to extract the electrical, mechanical, optical, chemical, and structural properties of thin film materials and semiconductor integrated circuits.

Abstract: A probe chip consisting of multiple probes integrated on a single substrate. The layout of the probes could be designed to match specific features on the device under test. The probes are spring-loaded to allow for reversible deformation during contacting of the device under test. The probe chip provides for detailed electrical and mechanical testing of integrated circuits (IC).

Abstract: Micro and nanoscale probes are used in the semiconductor and thin film materials industries to test wafers and samples. Probes supply and measure signals to and from the sample. Signals could be electrical, mechanical, chemical, optical, or photonics. Techniques of capacitance response signal, intensity response signal, photocurrent response signal, piezoresistance response signal, a high frequency response signal, elongated image response signal, contrast response signal, electrical response signal, resonance response signal, current response signal, and/or current-in-plane response signal could be used to determine when the probe tips are in proximity or contact a sample surface.

Abstract: A method for implementing a transistor using multiple integrated probe tips is provided. The method comprises the steps of (1) providing a sample; (2) providing a microscope probe comprising a plurality of probe tips; (3) contacting a first outer probe tip of the plurality of probe tips to the sample, wherein he first outer probe tip is configured to act as a source terminal for a transistor; (4) contacting a second outer probe tip of the plurality of probe tips to the sample, wherein the second outer probe tip is configured to act as a drain terminal for the transistor; (5) using an inner probe tip of the plurality of probe tips as a gate terminal for the transistor; and (6) characterizing the sample with the plurality of probe tips.

Abstract: Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.