Patents Assigned to Xertronix, Inc.
  • Apparatus for processing semiconductor wafers
    Patent number: 4458704
    Abstract: Apparatus for processing semiconductor wafers is described as having a rotor mounted on a horizontal axis with support bearings at each end of the rotor. Wafers are arranged in a carrier which can be loaded and unloaded into the rotor of the apparatus through an access opening which is directed in a generally upward position when the rotor is stopped. Control means provide for automatic stopping of the rotor in a correct position for unloading and reloading at the end of each processing cycle.
    Type: Grant
    Filed: October 29, 1982
    Date of Patent: July 10, 1984
    Assignee: Xertronix, Inc.
    Inventor: William R. Higdon