Patents Assigned to Xpress Holding B.V.
  • Precision stage
    Patent number: 8091243
    Abstract: The invention relates to a positioning system for positioning and/or measuring a movable object, wherein the movable object (10) has an object position that is defined with respect to a at least two axes (X, Y) extending in at least two different directions. The movable object (10) has a first surface (SX) and a second surface (SY) having mutually different orientations. The first surface (SX) makes a first angle (?) with the first direction and the second surface (SY) makes a second angle (?) with the second direction.
    Type: Grant
    Filed: April 23, 2010
    Date of Patent: January 10, 2012
    Assignee: Xpress Holding B.V.
    Inventor: Edwin J. C. Bos