Patents Assigned to Xradia
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Publication number: 20140233692Abstract: A multi energy, such as dual-energy (“DE”), x-ray imaging system data acquisition and image reconstruction system and method enables optimizing the image contrast of a sample. Using the DE x-ray imaging system and its associated user interface applications, an operator performs a low energy (“LE”) and high energy (“HE”) x-ray scan of the same volume of interest of the sample. The system creates a low-energy reconstructed tomographic volume data set from the set of low-energy projections and a high-energy tomographic volume data set from the set of high-energy projections. This enables the operator to control the image contrast of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in the low-energy and high-energy tomographic data sets. This creates a combined volume data set from the LE and HE volume data sets with optimized image contrast throughout.Type: ApplicationFiled: February 15, 2013Publication date: August 21, 2014Applicant: XRADIA, INC.Inventor: Xradia, Inc.
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Patent number: 8526575Abstract: A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.Type: GrantFiled: August 12, 2010Date of Patent: September 3, 2013Assignee: Xradia, Inc.Inventors: Alan Francis Lyon, Michael Feser, Wenbing Yun, Sharon Chen
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Patent number: 8353628Abstract: The position of the sample is measured and used to correct for any off-axis motion during tomography using x-ray projection microscope system with a rotation stage system. The position is sensed using a precision-machined, low-CTE gold-coated cylinder or disc and three to five capacitive distance sensors. The correction can then be performed purely as image processing in software, by applying an appropriate shift in X and Y of the captured x-ray projections. A calibration is often necessary for each system (gold disc plus sensors plus sample stage) to account for any machining errors of the gold disc or positioning errors of the capacitive sensors. This calibration should also be repeated whenever any maintenance is performed on the metrology setup.Type: GrantFiled: December 4, 2009Date of Patent: January 15, 2013Assignee: Xradia, Inc.Inventors: Wenbing Yun, Ying Xu, Frederick W. Duewer, Mason Freed, Chao-chih Hsu
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Patent number: 8267388Abstract: Alignment assembly is used to center a sample on a moving stage system. The alignment assembly includes a pair of slides stacked on a stage with linear perpendicular movement relative to each other, and at least one actuator that is preferably physically separate from the linear slides and stage. The actuator(s) repeatedly extend an actuator arm to move the linear slides, and retract the arm for subsequent movement of the stage during and after the process of centering the sample in two dimensions on the stage. Either the stage system rotates, or multiple actuators are placed to move the alignment system in perpendicular directions relative to the stage, by repeatedly contacting only the top linear slide.Type: GrantFiled: September 12, 2007Date of Patent: September 18, 2012Assignee: Xradia, Inc.Inventor: Ying Xu
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Patent number: 8139846Abstract: A method and system for verifying the integrity of integrated circuits (ICs) by detecting the presence of unauthorized circuit insertions or modifications using non-destructive x-ray microscopy is disclosed. A reference image based on a trusted IC or a trusted design file may be generated. An un-trusted IC may be received from an un-trusted foundry, which IC is manufactured in response to the trusted design file provided to the foundry. An x-ray microscope may record a plurality of sets of base images of the un-trusted IC, each set corresponding to a different viewing angle. One or more un-trusted images may be produced from the base images. The reference images may be compared with the un-trusted images to illuminate any additions or modifications in circuit elements or other parameters.Type: GrantFiled: November 5, 2008Date of Patent: March 20, 2012Assignees: University of Southern California, XradiaInventors: Michael A. Bajura, John N. Damoulakis, Younes Boulghassoul, Michael P. K. Feser, Andrei V. Tkachuk
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Patent number: 8068579Abstract: A process to determine the porosity and/or mineral content of mineral samples with an x-ray CT system is described. Based on the direct-projection techniques that use a spatially-resolved x-ray detector to record the x-ray radiation passing through the sample, 1 micrometer or better resolution is achievable. Furthermore, by using an x-ray objective lens to magnify the x-ray image in a microscope configuration, a higher resolution of up to 50 nanometers or more is achieved with state-of-the-art technology. These x-ray CT techniques directly obtain the 3D structure of the sample with no modifications to the sample being necessary. Furthermore, fluid or gas flow experiments can often be conducted during data acquisition so that one may perform live monitoring of the physical process in 3D.Type: GrantFiled: April 9, 2009Date of Patent: November 29, 2011Assignee: Xradia, Inc.Inventors: Wenbing Yun, Michael Feser, Andrei Tkachuk, Thomas A. Case, Frederick W. Duewer, Hauyee Chang
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Patent number: 7974379Abstract: A metrology system that uses an imaging system to monitor alignment features on the sample or sample holder of an X-ray laminography or tomography system. the metrology system has the capability to provide both sample shift and sample rotation movement data to a data acquisition system. These shift and rotation data can be used in alignment routines to produce 3D reconstructions from the X-ray images/projections. The metrology system is based on an imaging and focusing measurement of intrinsic feature of the sample or artificial features fabricated on the sample or sample holder.Type: GrantFiled: September 9, 2009Date of Patent: July 5, 2011Assignee: Xradia, Inc.Inventors: Thomas A. Case, Wenbing Yun, Alan Francis Lyon
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Patent number: 7920676Abstract: CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (˜12×, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.Type: GrantFiled: July 6, 2007Date of Patent: April 5, 2011Assignee: Xradia, Inc.Inventors: Wenbing Yun, Yuxin Wang, Srivatsan Seshadri, Kenneth W. Nill
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Publication number: 20110002528Abstract: A method and system for verifying the integrity of integrated circuits (ICs) by detecting the presence of unauthorized circuit insertions or modifications using non-destructive x-ray microscopy is disclosed. A reference image based on a trusted IC or a trusted design file may be generated. An un-trusted IC may be received from an un-trusted foundry, which IC is manufactured in response to the trusted design file provided to the foundry. An x-ray microscope may record a plurality of sets of base images of the un-trusted IC, each set corresponding to a different viewing angle. One or more un-trusted images may be produced from the base images. The reference images may be compared with the un-trusted images to illuminate any additions or modifications in circuit elements or other parameters.Type: ApplicationFiled: November 5, 2008Publication date: January 6, 2011Applicants: UNIVERSITY OF SOUTHERN CALIFORNIA, XRADIAInventors: Michael A. Bajura, John N. Damoulakis, Younes Boulghassoul, Michael P.K. Feser, Andrei V. Tkachuk
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Patent number: 7864426Abstract: A method to stabilize planar nanostructures, for example grating and zone plate lenses that are typically used for directing or focusing x-ray radiation, includes the deposition of a top, stabilizing layer. The structures are typically made on a flat substrate, and therefore are only fixed at the bottom. At high aspect ratio, the stability can be poor since small forces such as electrostatic forces and van de Waals forces that are often present can alter the structure. The top coating of a metallic material such as titanium constrains the nanostructures at the top and at the same time eliminates electrostatic forces and reduces any thermal gradient that may be present across the device.Type: GrantFiled: February 13, 2007Date of Patent: January 4, 2011Assignee: Xradia, Inc.Inventors: Wenbing Yun, Alan Francis Lyon, Yan Feng
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Patent number: 7813475Abstract: An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.Type: GrantFiled: March 11, 2009Date of Patent: October 12, 2010Assignee: Xradia, Inc.Inventors: Ziyu Wu, Wenbing Yun, Peiping Zhu, Yuxin Wang, Qingxi Yuan, Andrei Tkachuk, Wanxia Huang, Michael Feser
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Patent number: 7800072Abstract: A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum efficiency of up to 95%. The design of this detector also allows it to function as an energy filter to remove high-energy x-rays. This detector is useful in a wide range of applications including x-ray imaging, spectroscopy, and diffraction. The scintillator optical system has scintillator material with a lens system for collecting the light that is generated in the scintillator material. A substrate is used for spacing the scintillator material from the lens system.Type: GrantFiled: April 6, 2006Date of Patent: September 21, 2010Assignee: Xradia, Inc.Inventors: Wenbing Yun, Yuxin Wang, David R. Trapp
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Patent number: 7796725Abstract: An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.Type: GrantFiled: March 11, 2009Date of Patent: September 14, 2010Assignee: Xradia, Inc.Inventors: Ziyu Wu, Wenbing Yun, Peiping Zhu, Yuxin Wang, Qingxi Yuan, Andrei Tkachuk, Wanxia Huang, Michael Feser
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Patent number: 7787588Abstract: The principle of reciprocity states that full-field and scanning microscopes can produce equivalent images by interchanging the roles of condenser and detector. Thus, the contrast transfer function inversion previously used for images from scanning systems can be applied to Zernike phase contrast images. In more detail, a full-field x-ray imaging system for quantitatively reconstructing the phase shift through a specimen comprises a source that generates x-ray radiation, a condenser x-ray lens for projecting the x-ray radiation onto the specimen, an objective x-ray lens for imaging the x-ray radiation transmitted through the specimen, a phase-shifting device to shift the phase of portions of x-ray radiation by a determined amount, and an x-ray detector that detects the x-ray radiation transmitted through the specimen to generate a detected image.Type: GrantFiled: July 21, 2009Date of Patent: August 31, 2010Assignee: Xradia, Inc.Inventors: Wenbing Yun, Michael Feser, Benjamin Hornberger
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Patent number: 7561662Abstract: A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolution and high throughput are described. It also concerns ways to optimize the system design to obtain improved image quality.Type: GrantFiled: February 12, 2008Date of Patent: July 14, 2009Assignee: Xradia, Inc.Inventors: Yuxin Wang, Wenbing Yun, David Dean Scott
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Patent number: 7535193Abstract: A rotating stage assembly performs high precision rotational angle and position error correction by continuous sensing and correcting motor stage assembly errors. It performs these corrections, to adjust for motor environmental and operational errors by sensing and correcting using five sensors placed to measure the adjustments of five corresponding actuators, which adjust the entire motor rotating stage and rotary motor assembly relative to a reference frame.Type: GrantFiled: June 18, 2007Date of Patent: May 19, 2009Assignee: Xradia, Inc.Inventor: Ying Xu
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Publication number: 20090067976Abstract: Alignment assembly is used to center a sample on a moving stage system. The alignment assembly includes a pair of slides stacked on a stage with linear perpendicular movement relative to each other, and at least one actuator that is preferably physically separate from the linear slides and stage. The actuator(s) repeatedly extend an actuator arm to move the linear slides, and retract the arm for subsequent movement of the stage during and after the process of centering the sample in two dimensions on the stage. Either the stage system rotates, or multiple actuators are placed to move the alignment system in perpendicular directions relative to the stage, by repeatedly contacting only the top linear slide.Type: ApplicationFiled: September 12, 2007Publication date: March 12, 2009Applicant: XRADIA, INC.Inventor: Ying Xu
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Patent number: 7499521Abstract: An imaging technology for fuel cells is based on x-ray microscopy. A metrology system images the electro-chemical interaction areas of solid-oxide fuel cells (SOFC) in-situ. This system takes advantage of both the penetrating power and elemental absorption contrast of hard x-ray radiation to image the internal interaction areas in a SOFC. The technology can further take advantage of the strong dependence of the x-ray absorption on material type and energy to distinguish the four major material types: cathode, electrolyte, air, and low-Z contaminants such as sulfur.Type: GrantFiled: January 4, 2007Date of Patent: March 3, 2009Assignee: Xradia, Inc.Inventors: Yuxin Wang, Wenbing Yun
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Publication number: 20080309276Abstract: A rotating stage assembly performs high precision rotational angle and position error correction by continuous sensing and correcting motor stage assembly errors. It performs these corrections, to adjust for motor environmental and operational errors by sensing and correcting using five sensors placed to measure the adjustments of five corresponding actuators, which adjust the entire motor rotating stage and rotary motor assembly relative to a reference frame.Type: ApplicationFiled: June 18, 2007Publication date: December 18, 2008Applicant: XRADIA, INC.Inventor: Ying Xu
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Publication number: 20080273662Abstract: CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (˜12×, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.Type: ApplicationFiled: July 6, 2007Publication date: November 6, 2008Applicant: XRADIA, INC.Inventors: Wenbing Yun, Yuxin Wang, Srivatsan Seshadri, Kenneth W. Nill