Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
Type:
Application
Filed:
October 28, 2003
Publication date:
August 5, 2004
Applicant:
Xros, Inc., a California corporation
Inventors:
Armand P. Neukermans, Timothy G. Slater, Marc R. Schuman, Jack D. Foster, Sam Calmes, Sateesh S. Bajikar, Arun Malhotra, Jane Ang, Jerry Hurst, John Green