Patents Assigned to Xtreme technologies GbmH
  • Radiation source with high average EUV radiation output
    Patent number: 6815900
    Abstract: The invention is directed to a radiation source for generating extreme ultraviolet (EUV) radiation based on a hot, dense plasma generated by gas discharge.
    Type: Grant
    Filed: December 19, 2003
    Date of Patent: November 9, 2004
    Assignee: Xtreme technologies GbmH
    Inventors: Imtiaz Ahmad, Juergen Kleinschmidt, Guido Schriever, Uwe Stamm, Sven Goetze