Patents Assigned to XTREME techonolgies GmbH
  • Patent number: 7541604
    Abstract: The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: June 2, 2009
    Assignee: XTREME techonolgies GmbH
    Inventors: Sven Goetze, Harald Ebel, Juergen Kleinschmidt, Imtiaz Ahmad