Abstract: A method and system for optical measurement via a resonator having a non-uniform phase profile provides a mechanism for measuring and/or detecting sub-micron surface features with increased resolution. A second surface forming part of a resonator is illuminated through a first partially reflective surface that has a non-uniform phase profile that transitions from negative to positive phase with respect to a resonance phase value of the resonator. As a result, a reduced spot size is produced at the second surface, which enhances the resolution of a measurement and/or detection of surface features on the second surface. Additionally, if a discontinuity is provided in the non-uniform phase profile, interaction of the discontinuity with surface features of the second surface will provide enhanced resolution of the surface features. The resolution of the system is improved over the resolution that can be attained using a Fabry-Perot resonator.

Abstract: An improved cleaning fluid supply housing assembly for a cascade-type substrate scrubber having a sliding piston configured with a flange with recesses so that the piston is out of contact with the rotating part of the brush core mandrel bearing assembly. Rather, the piston flange outer face only contacts the stationary outer race of the mandrel bearing. The water supply piston is also configured with a full bore to minimize the pressure on the end of the mandrel. A tolerance-controlled leak through the bearing is provided by the configuration of the piston flange to provide a flushing of the area in which wear might be a source of particle generation by a controlled tolerance leak upstream of the brushes. These features substantially eliminate the source of particle generation from contact wear and the contribution of such wear particles into the interface between the brush and the substrate surface being cleaned.

Abstract: Multi-disk processing system and method of continuous finishing of memory media disks for digital data storage systems in preparation for magnetic memory coating, comprising four main sub-systems: 1) multiple driven spindles mounted on a chassis, at 3, 6, 9 and 12 o'clock positions; 2) finishing tape head units mounted on a base; 3) a robotic handler for loading and unloading disks onto/off at least one of the spindles; and 4) a programmable system controller that controls the sub-system operations and loading/unloading. The tape head sub-system includes its own programmable controller and sensors for control of the finishing tape advance. The multiple spindles and handler rotate relative to each other. In a preferred embodiment, the spindles are mounted on a rotating turntable that also oscillates. Alternately, the spindles are fixed in position and a rotating handler with multiple grippers for simultaneously loading/unloading disks from all spindles at once is used.

Abstract: A method and system for determining surface feature characteristics (including position and dimensions) using slit detectors provides a low-cost and high-speed measurement system for inspecting a surface. The system includes multiple slit detectors positioned so that a feature on a surface scanned by the system is detected by at least two detectors that are rotationally offset from each other and from the direction of scanning, a scanning control system for providing motion to the surface of interest in relation to the detectors, and an electronic analyzer for computing characteristics (including position and dimensions) of surface features.