Abstract: A temperature-stabilized MEMS device in which heat is generated by ohmic heating as an electric current passes through at least part of one of the structural layers of the device. Various implementation options are disclosed in which the heating occurs in a device layer (25) of the device, either in an outer frame (2) or within the area of an active structure (3), or where heating occurs within a substrate (1) or a cover (8) of the device. One application of particular relevance is a gyroscope device.
Abstract: The present invention has three aspects: 1. A concept for a force-balanced accelerometer in which the proof mass is levitated inside an enclosure and has an electrically conductive path to the enclosure. 2. A planar Implementation of the invention. 3. Implementation of the invention using MEMS (Micro Electro Mechanical System) technology.
Type:
Application
Filed:
December 16, 2010
Publication date:
September 27, 2012
Applicant:
Y-SENSORS LTD.
Inventors:
Yishay Netzer, Oren Aharon, Michael Girgel