Patents Assigned to Yang Iron Works Co., Ltd.
  • Digital non-contact blade position detection apparatus
    Patent number: 6348943
    Abstract: A digital non-contact blade position detection apparatus is provided for use on a wafer dicing machine for blade position detection so as to correct the position of the cutting blade.
    Type: Grant
    Filed: October 30, 1998
    Date of Patent: February 19, 2002
    Assignees: Industrial Technology Research Institute, Yang Iron Works Co., Ltd.
    Inventors: Chien-Rong Huang, Chih-Yi Lai, Chien-Hsing Lin, Chun-Hung Liu