Abstract: A device for treating or acting on workpiece surfaces by means of an actuator, such as a cutting or engraving laser or a nozzle for applying oils, paints, adhesives, dyes, or etchants is disclosed. An ultrasonic levitation force field is generated by means of a sonotrode, which is coupled to the actuator into a working unit, such that the movably suspended working unit is supported on the workpiece surface in a hovering manner. The ultrasonic levitation force field allows a highly precise positioning of the working unit relative to the workpiece surface so as to allow a precise treatment or machining of the workpiece surface.

Abstract: A device for inspecting a workpiece surface includes a sensor, a sonotrode having a sound-emitting surface and rigidly connected to the sensor to form a sensor unit, and a movable positioning device coupled with the sensor unit to position the sensor unit in a position opposite to the workpiece surface. The positioning device includes a force-applying member to urge the sensor unit in a direction of the workpiece or strip material surface by applying a predefined urging force or using gravity as the urging force. The sound-emitting surface of the sonotrode generates ultrasonic oscillations to produce an ultrasonic levitation force field in the presence of a gaseous medium between the workpiece surface and the sound-emitting surface to thereby generate a counterforce in opposition to the urging force so that the sensor unit is held hovering at a distance to the workpiece or strip surface.

Abstract: A device for gripping a substrate without contact with which the substrate can be more securely transported. In the device, a housing cap has an air inlet in the upper surface and a lower opening, the lower opening communicating with the air inlet such that air introduced through the air inlet exits through the lower opening. A contour of the lower opening in its vertical cross section is convexly rounded such that the introduced air is guided along a horizontal undersurface of the housing cap. A nozzle is disposed in an inner hollow space of the housing cap, and has an inclined surface such that the width of the nozzle gradually decreases in the direction from the undersurface of the nozzle to the upper surface of the nozzle adjacent to the air inlet. The undersurface of the nozzle is at a predetermined distance from the inner surface of the housing cap. An ultrasonic shaker applies ultrasonic vibration to the housing cap.

Abstract: A device for inspecting a workpiece surface includes a sensor, a sonotrode having a sound-emitting surface and rigidly connected to the sensor to form a sensor unit, and a movable positioning device coupled with the sensor unit to position the sensor unit in a position opposite to the workpiece surface. The positioning device includes a force-applying member to urge the sensor unit in a direction of the workpiece or strip material surface by applying a predefined urging force or using gravity as the urging force. The sound-emitting surface of the sonotrode generates ultrasonic oscillations to produce an ultrasonic levitation force field in the presence of a gaseous medium between the workpiece surface and the sound-emitting surface to thereby generate a counterforce in opposition to the urging force so that the sensor unit is held hovering at a distance to the workpiece or strip surface.

Abstract: A device for treating or acting on workpiece surfaces by means of an actuator, such as a cutting or engraving laser or a nozzle for applying oils, paints, adhesives, dyes, or etchants is disclosed. An ultrasonic levitation force field is generated by means of a sonotrode, which is coupled to the actuator into a working unit, such that the movably suspended working unit is supported on the workpiece surface in a hovering manner. The ultrasonic levitation force field allows a highly precise positioning of the working unit relative to the workpiece surface so as to allow a precise treatment or machining of the workpiece surface.

Abstract: A device for gripping a substrate without contact with which the substrate can be more securely transported. In the device, a housing cap has an air inlet in the upper surface and a lower opening, the lower opening communicating with the air inlet such that air introduced through the air inlet exits through the lower opening. A contour of the lower opening in its vertical cross section is convexly rounded such that the introduced air is guided along a horizontal undersurface of the housing cap. A nozzle is disposed in an inner hollow space of the housing cap, and has an inclined surface such that the width of the nozzle gradually decreases in the direction from the undersurface of the nozzle to the upper surface of the nozzle adjacent to the air inlet. The undersurface of the nozzle is at a predetermined distance from the inner surface of the housing cap. An ultrasonic shaker applies ultrasonic vibration to the housing cap.