Patents Assigned to Zygo Corpporation
  • Patent number: 8913226
    Abstract: Methods and apparatuses for performing the same, where the methods include obtaining, from an interferometer, a time-varying interference signal S(t) based on a combination of a first beam and a second beam, the first beam being diffracted from an encoder scale, in which at least one of the encoder scale and the interferometer is moveable with respect to the other, obtaining one or more error correction signals based on one or more errors that modify the time-varying interference signal S(t), and outputting information about a change in a position of the encoder scale relative to the interferometer based on the time-varying interference signal S(t) and the one or more error correction signals.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: December 16, 2014
    Assignee: Zygo Corpporation
    Inventor: Frank C. Demarest