Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
Type:
Grant
Filed:
December 17, 2007
Date of Patent:
March 9, 2010
Assignee:
Zyvex Instruments, LLC
Inventors:
Christof Baur, Robert J. Folaron, Adam Hartman, Philip C. Foster, Jay C. Nelson, Richard E. Stallcup, II
Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
Type:
Application
Filed:
December 17, 2007
Publication date:
June 26, 2008
Applicant:
ZYVEX INSTRUMENTS, LLC
Inventors:
Christof BAUR, Robert J. FOLARON, Adam HARTMAN, Philip C. FOSTER, Jay C. NELSON, Richard E. STALLCUP
Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
Type:
Grant
Filed:
February 23, 2005
Date of Patent:
January 15, 2008
Assignee:
Zyvex Instruments, LLC
Inventors:
Christof Baur, Robert J. Folaron, Adam Hartman, Philip C. Foster, Jay C. Nelson, Richard E. Stallcup, II
Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
Type:
Application
Filed:
April 17, 2007
Publication date:
August 16, 2007
Applicant:
ZYVEX INSTRUMENTS, LLC
Inventors:
George SKIDMORE, Matthew ELLIS, Aaron GEISBERGER, Kenneth BRAY, Kimberly TUCK, Robert Folaron
Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
Type:
Grant
Filed:
September 23, 2004
Date of Patent:
June 5, 2007
Assignee:
Zyvex Instruments, LLC
Inventors:
George Skidmore, Matthew D. Ellis, Aaron Geisberger, Kenneth Bray, Kimberly Tuck, Robert Folaron