Patents Assigned to Zyvex Instruments, LLC
  • Charged particle beam device probe operation
    Patent number: 7675300
    Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: March 9, 2010
    Assignee: Zyvex Instruments, LLC
    Inventors: Christof Baur, Robert J. Folaron, Adam Hartman, Philip C. Foster, Jay C. Nelson, Richard E. Stallcup, II
  • Charged particle beam device probe operation
    Patent number: 7319336
    Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: January 15, 2008
    Assignee: Zyvex Instruments, LLC
    Inventors: Christof Baur, Robert J. Folaron, Adam Hartman, Philip C. Foster, Jay C. Nelson, Richard E. Stallcup, II
  • Method, system and device for microscopic examination employing fib-prepared sample grasping element
    Patent number: 7227140
    Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: June 5, 2007
    Assignee: Zyvex Instruments, LLC
    Inventors: George Skidmore, Matthew D. Ellis, Aaron Geisberger, Kenneth Bray, Kimberly Tuck, Robert Folaron