Abstract: An exposure apparatus includes an optical unit which defines a first exposure area and a second exposure area at different positions in a first direction and which radiates exposure light beams onto the first and second exposure areas respectively; and a first movement system which moves the first exposure area and the second exposure area relative to a substrate in the first direction. The exposure light beams are radiated by the optical unit onto the first and second exposure areas respectively while moving the first and second exposure areas relative to a predetermined area on the substrate. Accordingly, the predetermined area on the substrate is subjected to multiple exposure with an image of a first pattern formed by the exposure light beam radiated onto the first exposure area and an image of a second pattern formed by the exposure light beam radiated onto the second exposure area.

Abstract: An observation device that limits the brightness of an area to be a background of a sample, so that contrast of the sample can be clearly observed in the reflection observation method. An illumination light quantity limiting stop that is disposed on the emission-side pupil surface of the illumination light has a doughnut shape, by which an opening portion is formed at the center of a disk, so that the peripheral portion of the luminous flux of the illumination light is interrupted and only the center portion thereof is transmitted. An incident light quantity limiting stop that is disposed on the incident-side pupil surface has a circular shape smaller than the cross-section of the luminous flux, so that the center portion of the luminous flux is interrupted, and therefore only the peripheral portion of the luminous flux of the reflected light is transmitted.

Abstract: In an imaging apparatus adding image signals output from a sensor array which receives a light flux through an optical system and performs photoelectric conversion thereon, the sensor array being arranged a plurality of light receiving elements two-dimensionally, the imaging apparatus includes a pixel adding unit that divides the light receiving elements on the sensor array into a plurality of groups with a region including predetermined types of pixels as a group unit, and that adds, for each of the types of pixels, image signals output from the pixels included in four of the groups which are positioned “n” groups away from each other on the sensor array.

Abstract: A user operates an operating section to cause a motorized stage to move, and observes and checks an entire sample that is disposed on the motorized stage. When the motorized stage is stopped for a predetermined reference time or longer, a controller recognizes the position where the stage is stopped as a position for time-lapse observation, and records as observation position information that observation position. After observation of the entire sample, the controller sequentially moves the motorized stage to the observation positions indicated by the observation position information, on the basis of the recorded observation position information, whereby the user observes the sample at each observation position and decides on a final observation position.

Abstract: A temperature-controlled room accommodates an incubation container incubating a sample and maintains the inside thereof in a predetermined environment condition. An imaging section generates data of a plurality of observing images. An image analyzing section performs an image analyzing process on the data of the plurality of observing images obtained by imaging the incubation container at different times. Image analyzing data generated by the image analyzing section includes morphological information which indicates incubation states of the samples and rate-of-change information regarding the morphological information. A search processing section conducts a search for the incubation container which meets the first searching condition and the second searching condition based on the image analyzing data.

Abstract: An image processing device changes degree of noise reduction for image data in accordance with tone correction to be performed according to the image data and includes a change rate acquisition part and a noise reduction part. The change rate acquisition part obtains, at a plurality of portions in the image data, a change rate of a signal level of the image data before and after tone correction. The noise reduction part controls a degree of noise reduction for each portion in the image data according to the change rate.

Abstract: A digital still camera includes an image-capturing unit capturing a subject image via an image-capturing lens to create an image, a focus detecting unit detecting focus in accordance with the image created by the image-capturing unit, an image-capturing lens driving unit driving the image-capturing lens in accordance with a result of the focus detection provided by the focus detecting unit, and a receiving unit receiving an instruction to initiate image capture by the image-capturing unit. When the receiving unit receives the instruction to initiate image capture, the image-capturing unit captures the subject image successively to create a plurality of images, while the image-capturing lens driving unit drives the image-capturing lens successively. Accordingly, it is possible to provide an image in a high in-focus state while shortening the time required until an image is actually captured after an instruction is provided to initiate the capture of the image.

Abstract: When the quantity of light diagonally entering light-receiving portions of an image-capturing element in an electronic camera is large and thus an electrical charge is generated readily in an electrical charge transfer line, hue correction processing is executed to correct any change occurring in the hue induced by the charge generated in the electrical charge transfer line.

Abstract: Image display optical systems are disclosed that extend the angle of view longitudinally and transversely while saving space. The image display optical system includes a prism-shaped substrate transparent to an image-carrying light flux to be projected to a viewing eye, an introduction unit that guides the image-carrying light flux to a propagation path through which the image-carrying light flux propagates in a direction in which the image-carrying light flux from the outside enables internal reflection at least at three surfaces including at least one side of the substrate, and an output unit that guides the image-carrying light flux propagating through the substrate from the substrate to the viewing eye. By internally reflecting the image-carrying light flux at all the sides, i.e.

Abstract: Providing a compact lens system having high optical performance over the entire focusing range from infinity to a close distance, an optical apparatus equipped therewith, a method for focusing the lens system, and a method for vibration reduction of the lens system. The lens system includes, in order from an object, a first lens group G1, a second lens group G2, and a third lens group G3. Combined refractive power of the first lens group G1 and the second lens group G2 is positive. The first lens group G1 and the second lens group G2 are movable to an object side for varying focusing from the object locating at infinity to the object locating at a close distance. Each lens group includes at least one positive lens and at least one negative lens. Given conditional expressions are satisfied.

Abstract: A digital still camera according to the present invention can obtain an image with appropriate brightness easily without an increase in memory capacity. The digital still camera of the present invention includes: an image-capturing unit which captures a field of object to generate an image; a photometry unit which measures a luminance of a predetermined area of the field of object; a calculating unit which calculates a ratio between a luminance value of a portion of the image captured according to the luminance measured by the photometry unit, and a target luminance value of the predetermined area, the portion corresponding to the predetermined area; and a correcting unit which corrects the image generated by the image-capturing unit according to the ratio.

Abstract: A vibration actuator driving device includes a plurality of wiring sections and a supply controller. The plurality of wiring sections are disposed correspondingly to a plurality of electrically independent electrodes of an electromechanical conversion element. The wiring sections input driving signals to drive the electromechanical conversion element. The supply controller is capable of independently supplying a driving signal for each respective wiring section.

Abstract: A digital camera includes: a lens unit that forms a subject image on an imaging plane; an image sensor that includes color filters each disposed at one of pixels disposed in a lattice-like pattern over pixel intervals (a, b) along two directions, an x direction and a y direction, extending perpendicular to each other, with color filters corresponding to a first color component among first through nth (n?2) color components, disposed in a checkered pattern at pixels amounting to at least half an entire color filter density and color filters corresponding to remaining color components disposed at other pixels, and outputs image signals expressing the subject image; and an optical low pass filter unit at which light having passed through the lens unit and yet to enter the image sensor undergoes light beam separation along two diagonal directions ((1/2)a, (1/2)b)×(?2/?) and ((1/2)a, ?(1/2)b)×(?2/?) relative to (x, y) coordinate axes, so as to achieve frequency modulation for the subject image to become extinct at

Abstract: Provided is a lens barrel, which can be further reduced by providing such a first helicoid as can be easily manufactured even in the zone of a small lead. The lens barrel (1) comprises a first barrel member (6) having a first helicoid (18, 25 and 26) formed in a first face (6a), and a second barrel member (21) having a second helicoid (24) formed in a second face (21a) confronting the first face (6a). The lens barrel is characterized in that the first barrel member (6) has, in the first face (6a), a first zone (Z1), in which the first helicoid (18, 25 and 26) has a first lead, and a second zone (Z2 and Z3), in which the first helicoid (18 and 25) has a second lead smaller than the first lead, and in that the first helicoid (18 and 25) having the second lead has a smaller thread number than that of the first helicoid (18, 25 and 26) having the first lead.

Abstract: This camera system includes: a vibration compensation unit including a vibration compensation optical system and an image-capturing unit; a drive unit that drives the vibration compensation unit; a detection unit that detects vibration; a position detection unit that detects the position of the vibration compensation unit; a target position determination unit that determines a target position for the vibration compensation unit according to the vibration of the camera; a calculation unit that calculates a drive amount for the drive unit; a range of movement limitation unit that limits the position of the vibration compensation unit within a range; a range setting unit that sets a movement permitted range that is within the range in which the vibration compensation unit can be positioned; and a centering unit that controls the drive unit so that the vibration compensation unit is centered in the center of the movement permitted range.

Abstract: A camera includes: a battery unit on which a battery is mounted, that can be detachably loaded into the camera and supplies power to the camera; and a function unit that executes camera functions, wherein: as a function of the camera is executed, the function unit transmits information related to the executed function to the battery pack; and the battery unit has a storage unit in which the information related to the camera function is stored.

Abstract: Projection-optical systems are disclosed that reduce OoB radiation doses on the wafer while reducing deterioration of optical properties of the systems. An exemplary system includes a first reflector having a reflectance for light of a second predetermined wavelength, different from light of a first predetermined wavelength, that is less than a predetermined reflectance. The system also includes a second reflector having a reflectance for light of the second wavelength which is greater than the predetermined reflectance. When the reflectors in the system are classified as reflectors having a high percentage of overlap for the reflecting regions corresponding to two different points on the wafer, and reflectors having a low percentage of overlap for the reflecting regions, then, among the reflectors having a lower percentage of overlap for the reflecting regions, the most upstream reflector in the light path of the system is the second reflector.

Abstract: A device container assembly (30) for storing a reticle (26) includes a device container (246) and a shield assembly (250). The device container (246) encircles the reticle (26). Further, the device container (246) includes a fluid port (254) that allows for the flow of fluid (276) into and out of the device container (246). The shield assembly (250) is encircled by the device container (246). Further, the shield assembly (250) is positioned between the fluid port (254) and the reticle (26) when the reticle (26) is positioned within the device container (246). The shield assembly (250) can inhibit contaminants (278) near the fluid port (254) from being deposited on the reticle (26) and can maintain the integrity of the reticle (26).

Abstract: Goal: Providing a vibration-proof lens that can restrict an increase in thickness in the direction of the optical axis. Means: A vibration-proof lens unit comprising a lens holder that holds a vibration-proof lens; a support that supports the lens holder in a manner to be movable within a plane orthogonal to an optical axis of the vibration-proof lens; an engaging section that engages the lens holder with the support such that the lens holder can move (i) in a rotational direction around an axis line parallel to the optical axis of the vibration-proof lens and (ii) in a direction of a rotational radius orthogonal to the axis line; a rotational driving unit that moves the lens holder in the rotational direction; and a linear driving unit that moves the lens holder in the direction of the rotational radius.

Abstract: A phase adjusting apparatus includes a comparison code generating section, a calculating section, and a delay section. The comparison code generating section individually generates a first comparison code having a phase of a head code advanced and a second comparison code having the phase of the head code delayed, the head code being included in serial transfer data. The calculating section acquires a direction of adjustment of a phase of the serial transfer data using a comparison result of the head code and the first comparison code and a comparison result of the head code and the second comparison code. The delay section adjusts a delay amount of the serial transfer data based on the direction of adjustment of the phase.

Abstract: A digital camera includes: an image processing unit that creates first display image data and second display image data; a display device that displays a first screen image and a second screen image so as to allow a user to observe the first screen image when viewed along a first direction with respect to a display face and so as to allow the user to observe the second screen image when viewed along a second direction that differs from the first direction; and a control unit that instructs the display device to display the first display image data as the first screen image, and the second display image data as the second screen image.

Abstract: There is provided an optical characteristic measuring method for measuring an optical characteristic of an optical system which forms, on a second plane, an image of an object arranged on a first plane, the optical characteristic measuring method including: arranging, on the first plane, a first area through which a measuring light passes or by which the measuring light is reflected; arranging a second area, through which the measuring light passes or by which the measuring light is reflected, on the second plane at a position corresponding to the first area; and detecting, via one of the first area and the second area, a light amount of the measuring light via the optical system and the other of the first area and the second area; wherein at least one of the first area and the second area has a shape such that a light amount, of the measuring light which passes or which is reflected via the optical system, is changed depending on the optical characteristic.

Abstract: A lithographic apparatus is arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate. The apparatus includes a structure substantially parallel to a surface of a substrate table configured to hold the substrate, to divide the space into two parts. The structure has an aperture to allow transmission of the pattern and a recess at the bottom side of the structure to extract a fluid from the space.

Abstract: A display apparatus includes an input section inputting an image of subject obtained by imaging a person who is a subject, a display section displaying the image of subject being input, a viewer imaging section imaging a viewer viewing the image of subject and generating an image of viewer, a viewer face-detection section detecting a face of the viewer by using the image of viewer, a viewer face-recognition section performing facial recognition based on individual parts of the face of the viewer being detected, an image processing section performing image correction on the image of subject based on a result of the facial recognition performed on the viewer, and a control section switching a display from the image of subject to the image of subject on which the image correction is performed.

Abstract: Providing an imaging apparatus wherein dust does not easily adhere to the imaging portion. The apparatus comprising an imaging portion provided with an image pickup device, a first housing holding the imaging portion, a protective cover disposed a photographic object side, a second housing holding the cover and provided with a mount structure, to attachably and removably mount interchangeable lenses at the photographic object side, and wherein an airtight space is formed by at least one of the first and the second housings, the imaging portion, and the cover.

Abstract: An image processing device that rotates an image according to the inclination of a line segment included in the image, includes an evaluation unit 106 that evaluates a plurality of line segments whose inclinations are different, on the basis of each of a plurality of different decision standards, and a selection unit 106 that selects, on the basis of the results of the plurality of evaluations, from among the plurality of line segments, a line segment on the basis of which the image is to be rotated

Abstract: A reflection plate for an optical encoder includes: a base material (1) with a reflecting surface; and a film (3) that is formed on a part of the reflecting surface and includes a non-electrolytic plating film or an electrolytic oxide film.

Abstract: A computer-readable computer program product contains an image processing program which includes: an instruction for displaying a sample image and a correction object image on a display device; an instruction for setting a sample area in an area of the sample image; an instruction for receiving an operation signal which is output by an input device in response to an operation in which the sample area is dragged and dropped into an area of the correction object image; an instruction for setting correction coordinates in the area of the correction object image based upon the operation signal and for associating the sample area with the correction coordinates; an instruction for setting a correction area in the area of the correction object image based upon the correction coordinates; and an instruction for performing a color correction to an image of the correction area based upon the sample area.

Abstract: An imaging device includes an imagine lens, an imaging sensor having a color filter array with color filters of a plurality of colors having a plurality of pixels which are arranged on a light-receiving surface, a computing section obtaining a pixel value of an objective pixel by adding pixel values of a plurality of adjacent pixels which are adjacent to the objective pixel and which have one of the color filters of same color as the objective pixel among pixel values output from the imaging sensor, and a control section making the computing section compute, while shifting the objective pixel one by one in one direction, a pixel row formed of pixel values of the objective pixel in the one direction with respect to each predetermined pixel width in other direction, and generating an image thinned out at the predetermined pixel width in the other direction.

Abstract: An exposure apparatus comprises: an optical system, which has an emergent surface wherefrom exposure light emerges; a first surface, which is disposed at least partly around an optical path of the exposure light from the emergent surface; and a second surface, which is disposed at least partly around the first surface; and a first supply port, which is disposed at least partly around the first surface such that it faces in an outward radial direction with respect to an optical axis of the projection optical system, that supplies a first liquid to the second surface; wherein, during at least part of an exposure of a substrate, a front surface of the substrate opposes the emergent surface, the first surface, and the second surface; and the substrate is exposed with the exposure light that emerges from the emergent surface and transits a second liquid between the emergent surface and the front surface of the substrate.

Abstract: An electronic camera capable of exposure control is disclosed which flexibly responds to situations during the display of confirmation moving image before photographing.

Abstract: A focus detection device includes a micro lens array having a plurality of micro lenses, a light receiving element array having a plurality of light receiving elements for each micro lens and that receives light rays from a plurality of partial areas in which pupils of an imaging optical system are different from each other, in a plurality of light receiving elements respectively through each micro lens and a focus detection calculation circuit. The device generates at least three signal strings respectively corresponding to images of light rays which have been transmitted through at least three of the partial areas, based on signals output from the plurality of light receiving elements of the light receiving element array. The device obtains, from the at least three signal strings, shift amounts of two signal strings corresponding to two partial areas, and detects a focus adjustment state of an imaging optical system based on the obtained plurality of shifts amounts.

Abstract: A light beam emitted from a light source (11) impinges on the spherical surface (20a) of a collimator lens (20) substantially perpendicularly thereto. A light beam making a small angle to the optical axis impinges on the ellipsoid (20c) and then it is refracted. The ellipsoid (20c) converts light beams diverging from a light source located at the first focal point thereof into parallel light beams. A light beam making a large angle to the optical axis impinges on an ellipsoid (20b) and then it is reflected totally off the ellipsoid (20b). A light beam diverging from a light source located at the first focal point of the ellipsoid (20b) is converted into a light beam being focused on the second focal point thereof. An ellipsoid (20d) converts the light beams focused on the second focal point thereof into parallel light beams.

Abstract: A shutter device includes: a base plate having a photographic aperture and a front surface and a rear surface; a shutter blade group that closes and opens the photographic aperture to light; a rear cover having an opening portion that corresponds to the photographic aperture, provided to the rear surface of the base plate with the shutter blade group between the rear cover and the rear surface of the base plate, and having a front surface and a rear surface; and a reflection prevention member fitted to the rear surface of the rear cover.

Abstract: The present invention concerns a connection device for use in an articulated apparatus comprising two or more tandemly arranged interconnected movable segments, for limiting rotation between two adjoining segments connected by a joint having a single axis of rotation, comprising: a spring assembly comprising one or more helical torsion springs, which assembly has a first end and a second end, configured for placement co-axially along the joint axis of rotation; a stop pin adapted for attachment to one adjoining segment, another stop pin adapted for attachment to the other adjoining segment, each pin moveable around the axis of rotation in fixed relation to the attached segment, wherein the first end of the spring assembly is configured for disengageable connection with the stop pin of one segment, and the second end is configured for disengageable connection with the stop pin of the other segment, such that the degree of rotation by the one segment about the joint axis relative to the other segment is limited

Abstract: An electronic camera is characterized by including an imaging part shooting a figure image; an area detection part detecting a flesh-colored area including a face portion and a portion other than a face; a color judgment part judging color information of the flesh-colored area; a color difference calculation part determining a color difference between first color information of the face portion and second color information of the flesh-colored area of the portion other than the face; a correction coefficient calculation part determining color correction coefficients based on the color difference; an area appointment part appointing an area on which a color conversion is performed; and a color conversion part performing, when the color difference is equal to or greater than a predetermined value, the color conversion on the area appointed by the area appointment part by using the color correction coefficients.

Abstract: An image-capturing device includes: a micro-lens array in which a plurality of micro lenses are arrayed; a light reception element array having a plurality of groups of light reception elements respectively corresponding to the plurality of micro lenses, and that receives a ray bundle from an optical system via the micro lenses and outputs a plurality of received light signals; a detection unit that detects a deviation amount of an image surface by the optical system when the received light signals were obtained; and an image creation unit that selects a portion of the plurality of received light signals on the basis of the deviation amount detected by the detection unit, and creates an image on the basis of that selected portion of the received light signals.

Abstract: An imaging device includes an imaging section imaging a subject by either of all-pixel readout of an imaging sensor and thinning-out readout and generating an image, a face detection section detecting a face of the subject by using the image imaged by the thinning-out readout, a facial recognition section recognizing respective forms of a corner of mouth, teeth, and a tail of eyes along with the face of the subject being detected, an expression determination section determining that the subject is smiling when the respective forms of the corner of mouth, the teeth, and the tail of eyes being recognized match at least one of smile conditions, and a control section giving an imaging instruction of the subject by the all-pixel readout to the imaging section when the subject is determined to be smiling by the expression determination section.

Abstract: Goal: Providing a mirror unit that can decrease the wait time before distance measurement.

Abstract: An image sensor includes: a plurality of image-capturing pixels that, upon each receiving a partial light flux within a predetermined wavelength range, which is part of a photographic light flux used to form an optical image, output image signals corresponding to the optical image; a plurality of focus detection pixels that receive a pair of focus detection light fluxes in a wider wavelength range than the predetermined wavelength range and output a pair of focus detection signals; and a reduction unit that adjusts a signal level of the focus detection signals output from the plurality of focus detection pixels to be equal to or less than a signal level of the image signals each output from one of the plurality of image-capturing pixels under a given light receiving condition.

Abstract: An imaging device has pixels being disposed two-dimensionally, in matrix, a plurality of vertical signal lines each coupled to a plurality of the pixels in a column direction, a column amplifier amplifying an optical signal and a reset signal, and a holding part holding each of the optical signal and the reset signal. The imaging device is provided with a first clip driving circuit which is disposed between the vertical signal lines and the column amplifier and clips a signal out of a predetermined voltage, a first clip voltage generation circuit which gives a clip voltage to the first clip driving circuit, a second clip driving circuit which is disposed between the column amplifier and the holding part and clips a signal out of a predetermined voltage, and a second clip voltage generation circuit which gives a clip voltage to the second clip driving circuit.

Abstract: The light beam 5a emitted from a light source Pa is formed into a parallel light beam 6a upon entering the substrate 1 as a result of the effect of lens strips 2a. The parallel light beam 6a reaches the end surface on the emission side of the substrate 1, and is there subjected to the effect of lens strips 3a so that this light beam is focused at a focal position Qa (focal point) on the rear side of the lens strips 3a. Similarly, the light beam 5b emitted from a light source Pb is subjected to the effect of lens strips 2b and is formed into a parallel light beam 6b inside the substrate 1; this light beam is then further subjected to the effect of lens strips 3b, and is therefore focused at a focal point Qb located in a position that is separated from the surface of the substrate 1 by a distance of f.

Abstract: An apparatus takes in a plurality of still image frames, to generate an interpolated image frame. Next, moving addition of the still image frame and an interpolated image frame is performed in time-axis direction, to generate a superimposed image frame. At this time, high spatial frequency components in the superimposed image frame are suppressed strongly as alienation of motion between the still image frames becomes larger. Movie is reproduced by sandwiching these superimposed image frames between the still image frames. As a result of this, the movie reproduction with smooth motion is made possible even from a group of the still images photographed by an electronics still camera and the like.

Abstract: An electronic camera 100 automatically transmits captured image data and user identification information to a gateway server 160 over a wireless portable telephone link 130. The gateway server 160 manages image albums created on a per-user basis on multiple image servers on the Internet 170, automatically selects one of the multiple image servers based on the user identification information received from the electronic camera 100, and stores the image data received from the electronic camera 100 in an image album corresponding to the user identification information on the selected image server.

Abstract: A frame member of an optical element holding device integrally includes an inner ring, an outer ring, six arms, and a lever connected to each arm. Each arm is rotatably connected to the inner ring and the lever. The lever is rotatable with respect to the outer ring. The orientation of the inner ring and the orientation of the optical element are adjusted in according with the displacement of the lever caused by a displacement module.

Abstract: A diffractive optical system including a diffractive optical element is provided with a first lens component having a first positive lens, and a second lens component having a second positive lens and a negative lens. The diffractive optical element has a first diffractive optical member having a first diffractive optical surface, and a second diffractive optical member having a second diffractive optical surface. The first diffractive optical member and the second diffractive optical member are arranged so that the first diffractive optical surface and the second diffractive optical surface are in contact with each other. A refractive index of the first diffractive optical member and a refractive index of the second diffractive optical member at the d line are different from each other.

Abstract: An illumination device for photography includes: a light emission unit that emits illumination light towards a photographic subject; and a control unit that performs control so as to change a light emission luminance of the light emission unit within an exposure time period that is set to the camera.

Abstract: The present application has a proposition to provide a highly efficient laser excitation fluorescent microscope. Accordingly, a laser excitation fluorescent microscope of the present application includes a laser light source part radiating at least two types of excitation lights having different wavelengths; a light collecting part collecting the two types of excitation lights on a sample; a high-functional dichroic mirror, disposed between the laser light source part and the light collecting part, reflecting the two types of excitation lights to make the excitation lights incident on the light collecting part, and transmitting two types of fluorescence generated at the sample; and a detecting part detecting light transmitted through the high-functional dichroic mirror, in which an incident angle ? of the excitation lights and the fluorescence to the high-functional dichroic mirror satisfies a formula of 0°<?<45°.

Abstract: In order to perform a pipeline processing on a noise filtering processing, which uses a multi-resolution noise filtering, with a few line memories, the way to select an area of a reduced image which is used by the extraction of the low-frequency noise component from the reduced image is modified. By extracting the low-frequency noise component from the area being selected by the modified way, it is possible to suppress a volume of image data which needs to be read prior to the noise filtering object pixel.

Abstract: A surface inspection apparatus includes units illuminating repetitive patterns formed on a surface of a suspected substance and measuring a variation in an intensity of regular reflection light caused by a change in shapes of the repetitive patterns, units illuminating the repetitive patterns with linearly polarized light, setting an angle formed between a repetitive direction of the repetitive patterns and a direction of a plane of vibration of the linearly polarized light at a tilt angle, and measuring a variation in a polarized state of the regular reflection light caused by the change in the shapes of the repetitive patterns, and a unit detecting a defect of the repetitive patterns based on the variation in the intensity and the variation in the polarized state of the regular reflection light.