Abstract: An ABS resin molded part is manufactured by forming a molded part of an ABS resin into which a particulate filler is mixed, eluting butadiene particles from the surface of the molded part by etching, and forming a plating coat on the surface after the etching.

Abstract: An exposure apparatus restricts reduction in throughput. The exposure apparatus controls movement such that, (1) when a substrate is moving in one direction, a first pattern is moved in a specified direction to expose a first shot region using a first exposure light, then movement of the substrate in the one direction continues while moving the second pattern in the specified direction to expose a second shot region, and (2) then the respective movement directions of the substrate and the second pattern are reversed to expose a third shot region using the second exposure light, then movement of the substrate in the reverse direction continues while moving the first pattern in a direction that is the reverse of the specified direction to expose a fourth shot region using the first exposure light.

Abstract: A position detection device includes a magnetic generation unit that has: a first magnetism generating section that is provided on one end side along a predetermined direction and generates magnetism; a second magnetism generating section that is provided on another end side along the predetermined direction and generates magnetism of polarity different from that of the first magnetism generating section; and a low magnetism section that is formed in the first magnetism generating section and the second magnetism generating section such that a width of the low magnetism section varies along the predetermined direction to generate magnetism lower than those of the first magnetism generating section and the second magnetism generating section, and a magnetic detection unit that is capable of moving relative to the magnetic generation unit along the predetermined direction and that detects the magnetism generated by the first magnetism generating section and the second magnetism generating section.

Abstract: At Step 602, the grid of a wafer loaded into an exposure apparatus is approximated by a mathematical function fitting up to, for example, a cubic function, and at Step 612, the magnitude of a residual error between the position of a sample shot area obtained by the function and an actually measured position is compared with a predetermined threshold value. GCM measurement is performed in a mathematical function mode in a subroutine 616, or it is performed in a map mode in a subroutine 616, on the basis of the result of the comparison. In addition, it is determined whether to extract non-linear components from the wafer in each lot on the basis of a variation in the temperature of the wafer (Step 622) and a variation in random error between the wafers (Step 624).

Abstract: An exposure apparatus that: projects pattern images onto a substrate via liquid and a projection optical system, the liquid forming a liquid immersion region between the projection optical system and the substrate; and exposes the substrate. The apparatus has: a liquid-supplying-section that supplies the liquid onto the substrate; a first pipe section that introduces the liquid to the liquid-supplying-section; and a second pipe section, connected to the first pipe section, that collects the liquid not being supplied to the liquid-supplying-section from the first pipe section. By doing this, it is possible to provide a liquid-immersion exposure apparatus having a liquid-supplying-mechanism, exposure method, and a method for manufacturing devices so as to: restrict the temperature of the liquid, supplied between the projection optical system and the substrate, from varying; and prevent contaminants from invading into the liquid.

Abstract: A stage assembly (218) for positioning a work piece (30) includes a stage (238), a heat transfer region (246), a stage mover assembly (240), and an environmental system (226). The stage (238) retains the work piece (30). The heat transfer region (246) is positioned near the stage (238). The stage mover assembly (240) moves the stage (238) relative to the heat transfer region (246). The environmental system (226) directly controls the temperature of the heat transfer region (246). For example, the environmental system (226) can circulate a circulation fluid near the heat transfer region (246). A bearing (254B) can maintain the stage (238) spaced apart from the heat transfer region (246).

Abstract: An electronic camera includes a face detecting section, a setting section, and a controlling section. The face detecting section detects a face of a subject. The setting section sets a scene shooting mode to adjust a shooting condition to an optimum shooting condition in accordance with each pre-assumed shooting scene. The controlling section controls the face detection of the face detecting section only when the setting section has set a scene shooting mode for shooting a scene including a person.

Abstract: A beam transforming element for forming a predetermined light intensity distribution on a predetermined surface on the basis of an incident beam includes a first basic element made of an optical material with optical activity, for forming a first region distribution of the predetermined light intensity distribution on the basis of the incident beam; and a second basic element made of an optical material with optical activity, for forming a second region distribution of the predetermined light intensity distribution on the basis of the incident beam, wherein the first basic element and the second basic element have their respective thicknesses different from each other along a direction of transmission of light.

Abstract: To provide a laser scanning microscope capable of enhancing the degree of freedom of observation while keeping its structure simple. Accordingly, a laser scanning microscope includes a light source, a spectroscopic unit guiding light from the light source to a specimen and guiding the light from the specimen to a detector, light path switching units switching a light path between the spectroscopic unit and the specimen to one among a plurality of light paths with different routes, and a plurality of light deflecting units each disposed in each of the plurality of light paths.

Abstract: A projection optical system PL is used to project an image of a pattern. A manufacturing method of an exposure apparatus includes: a positioning step of positioning the projection optical system at a predetermined position; and a support step of supporting the positioned projection optical system. The positioning step includes a step of moving the projection optical system upward from below at the time of positioning.

Abstract: A focus adjusting apparatus includes an imaging unit, a calculation unit, a detection unit, and a control unit. The imaging unit is configured to generate an imaging signal of an image formed by an optical system. The calculation unit is configured to calculate based on the imaging signal a focus evaluation value in accordance with a focus adjustment position of the optical system. The detection unit is configured to detect a state with respect to a size of the image. The control unit is configured to control focus adjustment of the optical system based on a rate of change in the focus evaluation value and the state with respect to the size of the image.

Abstract: A beam transforming element for forming a predetermined light intensity distribution on a predetermined surface on the basis of an incident beam includes a first basic element made of an optical material with optical activity, for forming a first region distribution of the predetermined light intensity distribution on the basis of the incident beam; and a second basic element made of an optical material with optical activity, for forming a second region distribution of the predetermined light intensity distribution on the basis of the incident beam, wherein the first basic element and the second basic element have their respective thicknesses different from each other along a direction of transmission of light.

Abstract: A zoom lens system comprises, in order from an object, a first lens group having a positive refractive power, a second lens group having a negative refractive power, and a third lens group having a positive refractive power. The first lens group has a first-a partial lens group and a first-b partial lens group arranged on an image side of the first-a partial lens group with an air space and is constructed such that the first-b partial lens group moves along an optical axis direction upon focusing from infinity to a close-range object. The third lens group is constituted by a third-a partial lens group having a positive refractive power and a third-b partial lens group having a negative refractive power arranged on the image side of the third-a partial lens group with an air space.

Abstract: A defect inspecting apparatus inspects defects of a sample having a pattern formed on the surface. The defect inspecting apparatus is provided with a stage which has a sample placed thereon and linearly moves and turns; a light source; an illuminating optical system, which selects a discretionary wavelength region from the light source and epi-illuminates the sample surface through a polarizer and an objective lens; a detecting optical system, which obtains a pupil image, by passing through reflection light applied by the illuminating optical system from the surface of the sample through the objective lens and an analyzer which satisfies the cross-nichols conditions with the polarizer; and a detecting section which detects defects of the sample by comparing the obtained pupil image with a previously stored pupil image. Conformity of the pattern on a substrate to be inspected can be judged in a short time.

Abstract: A beam transforming element for forming a predetermined light intensity distribution on a predetermined surface on the basis of an incident beam includes a first basic element made of an optical material with optical activity, for forming a first region distribution of the predetermined light intensity distribution on the basis of the incident beam; and a second basic element made of an optical material with optical activity, for forming a second region distribution of the predetermined light intensity distribution on the basis of the incident beam, wherein the first basic element and the second basic element have their respective thicknesses different from each other along a direction of transmission of light.

Abstract: Grooves (22, 23) for containing an optical fiber and five recesses (24) for containing the optical components for an optical fiber amplifier are provided in the surface of a substrate (21). An optical fiber fitted in a groove (23a) for containing the optical fiber and introduced to the substrate (21) is passed through a groove (22a) for containing the optical fiber and fitted in a groove (22) for containing the optical fiber, thence passed through a groove (22b) for containing the optical fiber and introduced to the outside of the substrate (21). In the recess (24) for containing the optical component for an optical fiber amplifier, an optical component such as a photocoupler is fitted and coupled with the optical fiber. Light such as pumping light is passed through an optical fiber contained in the groove (23) for containing the optical fiber and introduced to an optical component such as a photocoupler.

Abstract: A projector optical system for forming a real image by projecting an image of a display element has, sequentially from a screen side or an observation side, a first lens group having positive refractive power, an aperture diaphragm, a second lens group, and a third lens group having positive refractive power, with a diffractive optical element being provided on at least one of the first lens group and the second lens group which are adjacent to the aperture diaphragm. The projector optical system satisfies: 0.05<G/L<0.9 wherein G is an air gap on the optical axis between the second lens group and the third lens group, and L is a length on the optical axis, from the surface that is closest to the screen side to the display element.

Abstract: A film of aluminum 2 is formed on a glass substrate (BK7) 1 by vacuum evaporation, and a multilayer optical thin film 3 is formed by an ion sputtering method on this aluminum film 2. Afterwards, such a member is cut into small pieces by means of dicing, and the aluminum 2 is then etched by a sodium hydroxide solution, so that the glass substrate 1 and the multilayer optical thin film 3 are separated. When the aluminum thickness exceeds 90 nm, clouding occurs in the multilayer optical thin film 3, and when the aluminum thickness is less than 10 nm, the separation of the glass substrate and multilayer optical thin film cannot be performed cleanly. Accordingly, the aluminum thickness is set in a range of 10 to 90 nm.

Abstract: A system for providing advice on photographing is constructed under the circumstance where a user side personal computer 1 and a server side personal computer 2 are connected via a network 3. Photographed image data are transferred to the server side personal computer 2 from the user side personal computer 1. The server side personal computer 2 analyzes the received image data. The server side personal computer 2 prepares an advice related to a photographing method based on the results of analysis and transfers it to the user side personal computer 1.

Abstract: A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system configured to project a patterned beam onto a target portion of the substrate, liquid being provided to a space between the projection system and the substrate, and a shutter configured to isolate the space from the substrate or a space to be occupied by a substrate. The shutter is separable from the remainder of the apparatus.

Abstract: A solid-state imaging device comprises a plurality of pixels disposed in a two-dimensional pattern and each equipped with a photoelectric conversion unit that generates and accumulates a signal charge corresponding to a subject image formed with light entering from an optical system and a readout control unit that executes control under which signals are read out from the plurality of pixels. The plurality of pixels include a plurality of imaging pixels that output imaging signals for forming image signals that represents the subject image and a plurality of focus detection pixels that output focus detection signals for detecting a focusing condition of the optical system through a split-pupil phase difference method.

Abstract: A reflection type illumination optical apparatus, which guides an exposure light to a reticle surface via a curved mirror, a concave mirror, etc. includes a vacuum chamber which accommodates the curved mirror, the concave mirror, etc; and a subchamber which is arranged in the vacuum chamber and which accommodates the curved mirror. The subchamber has openings through which the exposure light coming into the curved mirror and the exposure light exiting from the curved mirror pass, respectively. Each of the openings is arranged in the vicinity of a position at which the cross-sectional area of the light flux is smallest. It is possible to decrease the amount of adhesion of minute particles such as debris to the reflecting optical element, without unnecessarily enhancing the ability of the vacuum gas discharge mechanism.

Abstract: A computer performs following steps according to a program for tracking an object. Template matching of each frame of an input image to a plurality of template images is performed, a template image having a highest similarity with an image within a predetermined region of the input image is selected as a selected template among the plurality of template images and the predetermined region of the input image is extracted as a matched region. With reference to an image within the matched region thus extracted, by tracking motion between frames, motion of an object is tracked between the images of the plurality of frames. It is determined as to whether or not a result of template matching satisfies an update condition for updating the plurality of template images. In a case that the update condition is determined to be satisfied, at least one of the plurality of template images.

Abstract: A binary mask image for extracting subject is generated by binarizing an image after image-processing (processed image) with a predefined threshold value. Based on an image before image-processing (pre-processing image) and the binary mask image for extracting image, a subject image in which only a subject included in the pre-processing image is extracted is generated by eliminating a background region from the pre-processing image.

Abstract: A projection device includes: a projector unit that has at least a light source and a projection optical system housed in a chassis; a control unit that is assembled with a chassis separate from the chassis of the projector unit; and a rotation support member that rotatably supports the projector unit and the control unit around a rotation axis that extends perpendicular to a surface of the chassis of the projector unit and a surface of the chassis of the control unit, with these surfaces facing to one another.

Abstract: An image input apparatus includes an imaging optical system, a microlens array having a plurality of microlenses two-dimensionally arrayed with a predetermined pitch in the vicinity of a focal plane of the imaging optical system, and a photoreceptor array having a plurality of photoreceptors for each of the microlenses, each of the photoreceptors receiving bundles of rays passing through one of different exit-pupil regions of the imaging optical system. A power of the microlens and a gap between the microlens array and the photoreceptor array are determined so that a cross-sectional dimension of the bundles of rays for forming an image of each of the photoreceptors related to the microlens is equal to or smaller than the pitch of the microlens, within a range from the microlens array to a predetermined distance.

Abstract: A data communication apparatus comprises a storage unit that stores network connection information required for establishing a connection via a network with an external device, a light emission element that emits light, a light emission control unit that converts the network connection information into an optical signal and emits the optical signal from the light emission element by controlling an operation of the light emission element based upon the network connection information stored in the storage unit, and a reception unit that receives data transmitted from the external device via the network.

Abstract: An inspection apparatus includes an imaging device and an image processing device. The imaging device photographs a specimen and outputs a color image of the specimen to the image processing device. The image processing device subjects the color image of the specimen to negative-positive reversal. After detecting a mode value of the hue the color image having been subjected to negative-positive reversal, the image processing device changes the hue of the color image in accordance with a difference between a boundary value of two predefined hues and the detected mode value. In accordance with the change of the hue, a plurality of target pixels different in the saturation is extracted and the saturation and the intensity of each pixel are changed, or the gradation of each pixel is converted so that the plurality of target pixels becomes most distant from one another in a color space.

Abstract: A used viewfinder determination section determines whether an optical viewfinder is being used or if a liquid crystal monitor is being used, based upon signals from an eye approach detection section. A blur correction operation changing section changes a blur correction operation by a blur correction lens in accordance with determination results from the used viewfinder determination section. When it is determined that the optical viewfinder is not being used, a blur correction operation using the blur correction lens is not carried out.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a predetermined pattern through a liquid onto the substrate. The exposure apparatus includes a projection optical system which projects the image of the pattern onto the substrate, a liquid supply mechanism which has a supply flow passage through which the liquid is supplied onto the substrate, and a liquid recovery mechanism which has a recovery flow passage through which the supplied liquid is recovered. At least one of the supply flow passage and the recovery flow passage is formed in a stacked member in which a plurality of plate members are stacked.

Abstract: The head mounted display of the present invention has a display part for displaying images to the wearer, a supporting part which supports the display part, which is fed out into a position in front of as eye from a position that is not located in front of the face, and which is moved from this position in front of as eye into this position that is not located in front of the face, and a mounting part which holds this supporting part, and which is mounted on the wearer in a position that is not located in front of the face, and is constructed so that the supporting part can move past the side of the head along the contour of the head. As a result, a display device is produced which is relatively free of unsightliness with respect to the wearer.

Abstract: A zoom lens system excellently correcting various aberrations with accomplishing compactness, lightweight, and slimness upon accommodating lens barrel. The system consists of, in order from an object, a first group G1 having negative power, and a second group G2 having positive power. Upon zooming from a wide-angle end to a telephoto end, a distance between the first group G1 and the second group G2 decreases. The first group G1 consists of, in order from the object, a first lens L1 with negative power, and a second lens L2 with positive power. The second group G2 consists of three lenses that are, in order from the object, a third lens L3 with positive power, a fourth lens L4 with negative power having a convex surface facing the object, a fifth lens L5 with positive power. The three lenses are disposed without cemented each other. Given condition is satisfied.

Abstract: A diffraction display device includes a diffraction optical element that comprises a diffraction display portion and a non-display portion disposed between a pair of substrates, and an illuminating device that emits linearly polarized illuminating light to be incident on a side surface of the diffraction optical element. In the diffraction display device, the illuminating light having entered the diffraction optical element exits the diffraction optical element through a substrate surface at which the diffraction display portion is disposed.

Abstract: An illumination optical apparatus is able to individually illuminate two regions separate from each other, under required illumination conditions. The illumination optical apparatus comprises a first illumination system to illuminate a illumination region and a second illumination region to illuminate a second illumination region. The first illumination system includes a first variable system which varies a shape or size of a light intensity distribution on an illumination pupil of the first illumination system and the second illumination system includes a second variable system which varies a shape or size of a light intensity distribution on an illumination pupil of the second illumination system. The first variable system and the second variable system vary the light intensity distribution on the illumination pupil of the first illumination system and the light intensity distribution on the illumination pupil of the second illumination system independently of each other.

Abstract: A projection device includes: a light source; a modulation element that modulates light from the light source; a projection optical system that projects light modulated by the modulation element; a drive unit that drives the projection optical system; and a control unit that drives the light source and the drive unit in a complementary manner when driving the drive unit while turning on the light source.

Abstract: A camera includes: a light emission unit that emits illumination light; an amount of emitted light control unit that, during photography using the illumination light, controls the amount of illumination light to be emitted during photography based upon the amount of light reflected back from the photographic subject during a preliminary emission of light; and a color temperature control unit that controls the color temperature of the illumination light during the preliminary light emission, based upon color information for ambient light.

Abstract: An image processing apparatus includes a discriminating unit that discriminates a color component originating in an image structure in an image captured through an optical system from a color component attributable to a chromatic aberration of the optical system, and a correction unit that corrects the color component attributable to the chromatic aberration of the optical system based upon discrimination results provided by the discriminating unit.

Abstract: An input section of an incubator accepts, from a user, a first input selecting a specified incubation container which registers an observing schedule, and a second input specifying an imaging condition of the specified incubation container in an observing sequence. A calculating section calculates, according to the above-mentioned imaging condition, an observing duration of the specified incubation container from a first data relating to a carrying period of an incubation container and a second data with regard to an imaging duration. A schedule management section extracts, based on a schedule data, a registrable time zone in which an observing sequence of the specified incubation container can be executed without overlapping with previously registered observing schedules, and outputs to display the registrable time zone for presentation to the user.

Abstract: An image sensor includes: a plurality of imaging pixels disposed two-dimensionally in rows and columns to capture an image; a plurality of first focus detection pixels for focus detection and a plurality of second focus detection pixels for focus detection being disposed in a row in place of the imaging pixels; a row selection circuit that selects in turn a row; a column selection circuit that selects in turn a column; and an output circuit that outputs pixel signals from the pixels selected by the column selection circuit, out of the pixels in the rows selected by the row selection circuit, wherein the column selection circuit selects a column according to whether or not the row selected by the row selection circuit includes the first and the second focus detection pixels.

Abstract: A moving grating is arranged on a side of a wafer stage, a light source irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales and an index scale of which positional relation with the light source is fixed, and a detection instrument detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.

Abstract: The external device, for example, an electronic flash device, is wirelessly connectable to an information communication device, for example, a camera. The external device includes: a synchronization data creation unit that outputs synchronization data for synchronization of timing of processing related to photography; a packet creation unit that creates a communication packet including control information; and a packet output unit that outputs the communication packet to the exterior by wireless communication. The packet creation unit includes a packet reception unit that receives the communication packet; a detection unit that detects the synchronization data before all of the received communication packets received by the packet reception unit has been read in; and a signal output unit that outputs a synchronization signal used for establishing synchronization of the timing of the processing related to photography on the basis of detection by the detection unit of the synchronization data.

Abstract: An illumination optical apparatus which illuminates an illumination objective surface with an exposure light includes: an illumination optical system having a curved mirror and a concave mirror and defining a position substantially conjugate with the illumination objective surface between the curved and concave mirrors; and a second aperture plate separating a space in which the curved mirror is arranged and a space in which the concave mirror is arranged into mutually different vacuum environments or pressure-reduced environments, and having an aperture through which the exposure light passes, the aperture being arranged at a position at which a cross-sectional area of the exposure light is smallest, or in the vicinity of the position. It is possible to decrease the amount of passage of minute particles such as debris in relation to any downstream-side optical system.

Abstract: A drive system determines a combination of basic patterns (type of basic patterns to be generated and the number of pulses of each basic pattern) based on design data of patterns and pattern combination information stored in a memory. Then, based on the determined result, each micro mirror of a variable molding mask is individually controlled such that a plurality of basic patterns are sequentially generated according to each of the number of pulses, and each basic pattern generated by the variable molding mask is sequentially image-formed on a plate via a projection optical system. Thus, a pattern with a desired line width corresponding to the design data is formed at a desired position on the object with a good accuracy.

Abstract: The electronic album providing system, with which publishing and viewing of an electronic album by a system user is possible, includes: a first decision unit that detects whether or not a designated reader who has been designated by a publisher has viewed the album, and that decides that a first condition has become valid when a number of persons who have completed viewing to a total number of the designated readers reaches a predetermined value; a second decision unit that decides that a second condition has become valid when a time limit for publishing the album that has been set in advance arrives; and a deletion unit that performs deletion control of the album when at least one of the first condition and the second condition becomes valid.

Abstract: A vibration actuator by which stable drive can be obtained, a lens barrel, a camera system and a vibrating element are provided. In first vibration mode and second vibration mode, vibrating elements of the vibration actuator can vibrate. Resonance frequency of the second vibration mode, which is different from the first vibration mode used for driving a relatively moving member, is prevented from being same as the frequency of the higher harmonic of a driving signal.

Abstract: An exposure method includes a first step filling a liquid in a predetermined optical path space for exposure light (EL) in an optical system (PL), or for exchanging the liquid (LQ) filled in the space; a second step for successively exposing a predetermined number of substrates (P) through the liquid (LQ) filled in the optical path space or through the exchanged liquid; and a third step for judging, after the completion of the second step and based on an elapsed time elapsed after the first step, whether or not to exchange the liquid (LQ) filled in the optical path space. Exposure processing and measurement processing can be satisfactorily performed by making the liquid filled in the optical path space held in a desired state.

Abstract: A zoom lens comprises the following lens groups in the order from an object side: a first lens group having a positive refracting power; a second lens group having a negative refracting power; a third lens group having a positive refracting power; and a fourth lens group having a positive refracting power; wherein, upon zooming, at least the first lens group and the fourth lens group move to the object side; and wherein, upon focusing, the fourth lens group comprises a front lens group, and a rear lens group arranged with an air space on an image side of the front lens group, and the rear lens group is moved in a direction of an optical axis of the zoom lens.

Abstract: An autofocus system (222C) for measuring the position of a work piece (200) along an axis includes a slit light source assembly (236), a slit detector assembly (238), and a control system (224). The slit light source assembly (236) directs a first slit of light (342A) at a first slit area (344A) of the work piece (200). The slit detector assembly (238) detects light reflected off of the first slit area (344A) and generates a first slit signal relating to the amount of light reflected off of the first slit area (344A) at the slit detector assembly (238). The control system (224) uses the first slit signal from the slit detector assembly (238), and first reflectance information of the first slit area (344A) to determine the position of the work piece (200) along the axis. With this design, the autofocus system (222C) can compensate for the changes in reflectivity of the work piece (200).

Abstract: This invention relates to an illumination optical apparatus capable of forming a pupil intensity distribution of a desired shape and desired illuminance and, in turn, capable of realizing illumination conditions of great variety. The illumination optical apparatus has a spatial light modulation unit composed of a first spatial light modulator and a second spatial light modulator arranged in an order of incidence of light, and a distribution forming optical system to form a predetermined light intensity distribution on an illumination pupil, based on a beam having traveled via the first spatial light modulator and the second spatial light modulator. The first spatial light modulator has a plurality of first optical elements which are two-dimensionally arranged and postures of which each are individually controlled.

Abstract: An image recognition device includes; an image sensor that captures an image via an image forming optical system and outputs image information repeatedly; a detector that detects differences between reference image information related to a reference image and a plurality of sets of partial information included in the image information; a recognition circuit that includes a microprocessor and recognizes a set of partial information, for which a smallest difference value among a plurality of differences detected in correspondence to the plurality of sets of partial information is calculated, as information matching the reference image information if the smallest value is smaller than a threshold value; and a controller that includes a microprocessor and sets the threshold value in correspondence to a color indicated in the reference image information